{"id":13214,"date":"2024-11-12T07:30:45","date_gmt":"2024-11-11T22:30:45","guid":{"rendered":"https:\/\/ctiweb.co.jp\/con\/?p=13214"},"modified":"2024-11-12T07:31:06","modified_gmt":"2024-11-11T22:31:06","slug":"%e3%80%90%e5%8d%8a%e5%b0%8e%e4%bd%93%e3%80%91basf%e3%81%a8%e3%83%95%e3%83%a9%e3%82%a6%e3%83%b3%e3%83%9b%e3%83%bc%e3%83%95%e3%82%a1%e3%83%bcipms%e3%80%81%e9%9d%a9%e6%96%b0%e7%9a%84%e3%82%bd%e3%83%aa","status":"publish","type":"post","link":"https:\/\/ctiweb.co.jp\/con\/%e3%80%90%e5%8d%8a%e5%b0%8e%e4%bd%93%e3%80%91basf%e3%81%a8%e3%83%95%e3%83%a9%e3%82%a6%e3%83%b3%e3%83%9b%e3%83%bc%e3%83%95%e3%82%a1%e3%83%bcipms%e3%80%81%e9%9d%a9%e6%96%b0%e7%9a%84%e3%82%bd%e3%83%aa\/","title":{"rendered":"\u3010\u534a\u5c0e\u4f53\u3011BASF\u3068\u30d5\u30e9\u30a6\u30f3\u30db\u30fc\u30d5\u30a1\u30fcIPMS\u3001\u9769\u65b0\u7684\u30bd\u30ea\u30e5\u30fc\u30b7\u30e7\u30f3\u306e\u7814\u7a76\u958b\u767a\u5354\u529b\u306710\u5468\u5e74\u3002\u30de\u30a4\u30af\u30ed\u30c1\u30c3\u30d7\u76f8\u4e92\u63a5\u7d9a\u7528\u306e\u6539\u826f\u6750\u6599\u306b\u95a2\u3059\u308b\u5171\u540c\u7814\u7a76"},"content":{"rendered":"\n

\u3000BASF\u3068\u30d5\u30e9\u30a6\u30f3\u30db\u30fc\u30d5\u30a1\u30fcIPMS\uff08\u672c\u793e\uff1a\u30c9\u30a4\u30c4\u30fb\u30c9\u30ec\u30b9\u30c7\u30f3\uff09\u306f\u3001\u63d0\u643a\u304b\u308910\u5468\u5e74\u3092\u8fce\u3048\u305f\u3002\u3053\u308c\u307e\u3067\u4e21\u793e\u306f\u3001\u300cBASF Plating-Lab \uff08BASF\u30e1\u30c3\u30ad\u30e9\u30dc\uff09\u300d\u306e\u4e00\u74b0\u3068\u3057\u3066\u3001\u534a\u5c0e\u4f53\u88fd\u9020\u3068\u30c1\u30c3\u30d7\u7d71\u5408\u306e\u5206\u91ce\u306b\u304a\u3051\u308b\u9769\u65b0\u7684\u3067\u30ab\u30b9\u30bf\u30de\u30a4\u30ba\u3055\u308c\u305f\u30bd\u30ea\u30e5\u30fc\u30b7\u30e7\u30f3\u306e\u958b\u767a\u306b\u53d6\u308a\u7d44\u3093\u3067\u304d\u305f\u3002\u30d5\u30e9\u30a6\u30f3\u30db\u30fc\u30d5\u30a1\u30fcIPMS\u306e\u30ca\u30ce\u96fb\u5b50\u6280\u8853\u30bb\u30f3\u30bf\u30fc\uff08CNT\uff09\u306b\u304a\u3051\u308b\u30d1\u30a4\u30ed\u30c3\u30c8\u30c6\u30b9\u30c8\u3067\u306f\u3001\u534a\u5c0e\u4f53\u96c6\u7a4d\u306b\u304a\u3051\u308b\u6750\u6599\u3068\u6280\u8853\u306e\u52b9\u7387\u6027\u3068\u8cbb\u7528\u5bfe\u52b9\u679c\u3092\u9ad8\u3081\u308b\u305f\u3081\u306e\u6226\u7565\u304c\u7b56\u5b9a\u3055\u308c\u3001\u5b9f\u65bd\u3055\u308c\u3066\u3044\u308b\u3002
<\/p>\n\n\n

\n
\"\"
10\u5e74\u9593\u306e\u5354\u529b\u95a2\u4fc2\u3092\u795d\u3046BASF\u3068\u30d5\u30e9\u30a6\u30f3\u30db\u30fc\u30d5\u30a1\u30fcIPMS\u3000(C)Fraunhofer IPMS<\/figcaption><\/figure><\/div>\n\n\n

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\u3000\u30de\u30a4\u30af\u30ed\u30c1\u30c3\u30d7\u306e\u88fd\u9020\u3068\u7d71\u5408\u306b\u306f\u3001\u6570\u591a\u304f\u306e\u96fb\u6c17\u5316\u5b66\u7684\u30d7\u30ed\u30bb\u30b9\u304c\u5fc5\u8981\u3002\u500b\u3005\u306e\u56de\u8def\u3092\u63a5\u7d9a\u3057\u3001\u30c1\u30c3\u30d7\u5185\u3067\u5c0e\u4f53\u7d4c\u8def\u306e\u30cd\u30c3\u30c8\u30ef\u30fc\u30af\u3092\u5f62\u6210\u3059\u308b\u305f\u3081\u306b\u306f\u3001\u3055\u307e\u3056\u307e\u306a\u5c64\u306e\u91d1\u5c5e\u307e\u305f\u306f\u91d1\u5c5e\u5408\u91d1\u3092\u30a6\u30a7\u30cf\u30fc\u306b\u5857\u5e03\u3059\u308b\u5fc5\u8981\u304c\u3042\u308b\u3002\u5168\u4f53\u7684\u306a\u7d71\u5408\u306e\u3042\u3089\u3086\u308b\u6bb5\u968e\u3084\u3001\u305d\u306e\u5f8c\u306e\u3055\u307e\u3056\u307e\u306a\u7528\u9014\u306b\u5bfe\u5fdc\u3059\u308b\u305f\u3081\u306b\u306f\u3001\u5316\u5b66\u54c1\u3084\u4f5c\u696d\u5de5\u7a0b\u3092\u304a\u5ba2\u69d8\u306e\u500b\u3005\u306e\u5de5\u7a0b\u306b\u9069\u5408\u3055\u305b\u308b\u5fc5\u8981\u304c\u3042\u308b\u3002BASF\u3068\u306e\u5354\u529b\u95a2\u4fc2\u306e\u4e00\u74b0\u3068\u3057\u3066\u8fd1\u5e74\u3001\u96fb\u89e3\u30e1\u30c3\u30ad\u84b8\u7740\u30d7\u30ed\u30bb\u30b9\u7528\u306e\u65b0\u3057\u3044\u5316\u5b66\u54c1\u306e\u8a55\u4fa1\u304c\u884c\u308f\u308c\u3066\u3044\u308b\u3002
\u3000\u540c\u6642\u306b\u3001\u305d\u308c\u306b\u5bfe\u5fdc\u3059\u308b\u88fd\u54c1\u30c6\u30b9\u30c8\u3068\u5b9f\u8a3c\u8a66\u9a13\u3082\u3001\u30a6\u30a7\u30cf\u30fc\u30ec\u30d9\u30eb\u3067\u304a\u5ba2\u69d8\u306e\u305f\u3081\u306b\u5b9f\u65bd\u3055\u308c\u3066\u3044\u308b\u3002BASF\u306f\u3001\u30d5\u30e9\u30a6\u30f3\u30db\u30fc\u30d5\u30a1\u30fcIPMS\u306e\u30af\u30ea\u30fc\u30f3\u30eb\u30fc\u30e0\u306b\u6700\u5148\u7aef\u306e\u30d7\u30ed\u30bb\u30b9\u30c4\u30fc\u30eb\u3092\u8a2d\u7f6e\u3057\u3001\u30d5\u30e9\u30a6\u30f3\u30db\u30fc\u30d5\u30a1\u30fc\u306e\u7d4c\u9a13\u8c4a\u5bcc\u306a\u79d1\u5b66\u8005\u305f\u3061\u304c\u3053\u308c\u3092\u4f7f\u7528\u3057\u3066\u3044\u308b\u3002\u3053\u306e\u3088\u3046\u306b\u3001\u4e21\u793e\u306f\u696d\u754c\u306e\u30d7\u30ed\u30bb\u30b9\u3067\u4f7f\u308f\u308c\u3066\u3044\u308b\u3082\u306e\u3068\u540c\u3058\u30c4\u30fc\u30eb\u3092\u4f7f\u7528\u3057\u3066\u304a\u308a\u3001\u30e6\u30fc\u30b6\u30fc\u306f\u9069\u683c\u6027\u78ba\u8a8d\u306b\u304b\u304b\u308b\u30b3\u30b9\u30c8\u3092\u5927\u5e45\u306b\u524a\u6e1b\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u308b\u3002\u7d50\u679c\u3001\u958b\u767a\u6642\u9593\u3068\u30b3\u30b9\u30c8\u3092\u7bc0\u7d04\u3057\u3001\u3088\u308a\u52b9\u7387\u7684\u306a\u30d7\u30ed\u30bb\u30b9\u3092\u78ba\u7acb\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u308b\u3002\u305d\u306e\u305f\u3081\u3001\u9769\u65b0\u7684\u306a\u30bd\u30ea\u30e5\u30fc\u30b7\u30e7\u30f3\u3092\u958b\u767a\u3057\u3001\u751f\u7523\u6761\u4ef6\u4e0b\u3067\u76f4\u63a5\u8a55\u4fa1\u3059\u308b\u3053\u3068\u304c\u53ef\u80fd\u306b\u306a\u308b\u3002
<\/p>\n\n\n

\n
\"\"
\u30d7\u30ed\u30bb\u30b9\u30c4\u30fc\u30eb\u300cLAM Sabre Extreme\u300d\u306e\u524d\u306b\u7acb\u3064BASF\u3068\u30d5\u30e9\u30a6\u30f3\u30db\u30fc\u30d5\u30a1\u30fcIPMS\u306e\u30d1\u30fc\u30c8\u30ca\u30fc\u3000(C)Fraunhofer IPMS<\/figcaption><\/figure><\/div>\n\n\n

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\u3000\u3053\u306e10\u5e74\u9593\u3067\u3001\u4e21\u793e\u306f12,000\u56de\u4ee5\u4e0a\u306e\u30d7\u30ed\u30bb\u30b9\u5b9f\u884c\u3092\u5b8c\u4e86\u3057\u305f\u3002\u30d5\u30e9\u30a6\u30f3\u30db\u30fc\u30d5\u30a1\u30fcIPMS\u306e\u6b21\u4e16\u4ee3\u30b3\u30f3\u30d4\u30e5\u30fc\u30c6\u30a3\u30f3\u30b0\u30d3\u30b8\u30cd\u30b9\u30e6\u30cb\u30c3\u30c8\u8cac\u4efb\u8005\u3001Dr.\u30d9\u30f3\u30b8\u30e3\u30df\u30f3\u30fb\u30ea\u30ea\u30a8\u30f3\u30bf\u30fc\u30eb\uff1d\u30a6\u30fc\u30ea\u30c3\u30d2\u6c0f\u306f\u3001\u300c\u958b\u767a\u3055\u308c\u305f\u30b1\u30df\u30ab\u30eb\u30d1\u30c3\u30b1\u30fc\u30b8\u3084\u88fd\u54c1\u306f\u3001\u79c1\u305f\u3061\u306e\u304a\u5ba2\u69d8\u306e\u5de5\u696d\u30d7\u30ed\u30bb\u30b9\u3067\u76f4\u63a5\u4f7f\u7528\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059\u300d\u3068\u8ff0\u3079\u3066\u3044\u308b\u3002\u4f8b\u3048\u3070\u3001\u30c7\u30e5\u30a2\u30eb\u30c0\u30de\u30b7\u30f3\u6280\u8853\u306b\u3088\u308b\u5c0f\u578b\u56de\u8def\u306e\u914d\u7dda\u69cb\u9020\u306e\u88fd\u9020\u306b\u3082\u4f7f\u308f\u308c\u3066\u3044\u308b\u3002\u3053\u308c\u3089\u306e\u88fd\u54c1\u306f\u3001\u30a4\u30f3\u30bf\u30fc\u30dd\u30fc\u30b6\u3001\u30c1\u30c3\u30d7\u30ec\u30c3\u30c8\u3001\u518d\u914d\u7dda\u69cb\u9020\uff08\u30d4\u30e9\u30fc\u3001RDL\u3001TSV\uff09\u75283D\u30d1\u30c3\u30b1\u30fc\u30b8\u306e\u88fd\u9020\u306b\u304a\u3044\u3066\u3082\u91cd\u8981\u3067\u3042\u308a\u3001\u30a6\u30a7\u30cf\u30fc\u5bfe\u30a6\u30a7\u30cf\u30fc\u306e\u30cf\u30a4\u30d6\u30ea\u30c3\u30c9\u63a5\u5408\u3067\u91d1\u5c5e\u5c64\u3092\u5f62\u6210\u3059\u308b\u3053\u3068\u3082\u3042\u308b\u3002
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<\/p>\n\n\n

\n
\"\"
\u30d5\u30e9\u30a6\u30f3\u30db\u30fc\u30d5\u30a1\u30fcIPMS\u306e\u76f4\u5f84300mm\u30af\u30ea\u30fc\u30f3\u30eb\u30fc\u30e0\u3000(C)Fraunhofer IPMS<\/figcaption><\/figure><\/div>\n\n\n

\u25a0\u30d5\u30e9\u30a6\u30f3\u30db\u30fc\u30d5\u30a1\u30fcIPMS\u306b\u3064\u3044\u3066
\u00a0\u3000\u30d5\u30e9\u30a6\u30f3\u30db\u30fc\u30d5\u30a1\u30fcIPMS\uff08\u30d5\u30a9\u30c8\u30cb\u30c3\u30af\u30fb\u30de\u30a4\u30af\u30ed\u30b7\u30b9\u30c6\u30e0\u7814\u7a76\u6240\uff09\u306f\u3001\u30a4\u30f3\u30c6\u30ea\u30b8\u30a7\u30f3\u30c8\u306a\u7523\u696d\u30bd\u30ea\u30e5\u30fc\u30b7\u30e7\u30f3\u3001\u533b\u7642\u6280\u8853\u3001\u30e2\u30d3\u30ea\u30c6\u30a3\u306e\u5206\u91ce\u306b\u304a\u3051\u308b\u5fdc\u7528\u7814\u7a76\u958b\u767a\u306e\u30ea\u30fc\u30c0\u30fc\u3002\u30d5\u30e9\u30a6\u30f3\u30db\u30fc\u30d5\u30a1\u30fcIPMS\u306f\u3001\u96fb\u5b50\u90e8\u54c1\u3001\u6a5f\u68b0\u90e8\u54c1\u3001\u5149\u5b66\u90e8\u54c1\u3001\u304a\u3088\u3073\u305d\u308c\u3089\u306e\u5c0f\u578b\u5316\u6a5f\u5668\u3084\u30b7\u30b9\u30c6\u30e0\u3078\u306e\u7d71\u5408\u306b\u53d6\u308a\u7d44\u3093\u3067\u3044\u308b\u3002\u307e\u305f\u3001\u8a2d\u8a08\u3084\u88fd\u54c1\u958b\u767a\u304b\u3089\u3001\u81ea\u793e\u30e9\u30dc\u3084\u30af\u30ea\u30fc\u30f3\u30eb\u30fc\u30e0\u3067\u306e\u30d1\u30a4\u30ed\u30c3\u30c8\u751f\u7523\u307e\u3067\u3001\u5e45\u5e83\u3044\u30b5\u30fc\u30d3\u30b9\u3092\u63d0\u4f9b\u3057\u3066\u3044\u308b\u3002\u30ca\u30ce\u96fb\u5b50\u6280\u8853\u30bb\u30f3\u30bf\u30fc\uff08CNT\uff09\u3067\u306f\u3001\u30de\u30a4\u30af\u30ed\u30c1\u30c3\u30d7\u88fd\u9020\u696d\u8005\u3001\u90e8\u54c1\u30b5\u30d7\u30e9\u30a4\u30e4\u30fc\u3001\u6a5f\u5668\u88fd\u9020\u696d\u8005\u3001R&D\u30d1\u30fc\u30c8\u30ca\u30fc\u306e\u305f\u3081\u306b\u3001300mm\u306e\u30b7\u30ea\u30b3\u30f3\u30a6\u30a7\u30cf\u30fc\u306e\u5fdc\u7528\u7814\u7a76\u3092\u884c\u3063\u3066\u3044\u308b\u3002<\/p>\n","protected":false},"excerpt":{"rendered":"

\u3010\u534a\u5c0e\u4f53\u3011BASF\u3068\u30d5\u30e9\u30a6\u30f3\u30db\u30fc\u30d5\u30a1\u30fcIPMS\u3001\u9769\u65b0\u7684\u30bd\u30ea\u30e5\u30fc\u30b7\u30e7\u30f3\u306e\u7814\u7a76\u958b\u767a\u5354\u529b\u306710\u5468\u5e74\u3002\u30de\u30a4\u30af\u30ed\u30c1\u30c3\u30d7\u76f8\u4e92\u63a5\u7d9a\u7528\u306e\u6539\u826f\u6750\u6599\u306b\u95a2\u3059\u308b\u5171\u540c\u7814\u7a76
\n\u3000BASF\u3068\u30d5\u30e9\u30a6\u30f3\u30db\u30fc\u30d5\u30a1\u30fcIPMS\uff08\u672c\u793e\uff1a\u30c9\u30a4\u30c4\u30fb\u30c9\u30ec\u30b9\u30c7\u30f3\uff09\u306f\u3001\u63d0\u643a\u304b\u308910\u5468\u5e74\u3092\u8fce\u3048\u305f\u3002\u3053\u308c\u307e\u3067\u4e21\u793e\u306f\u3001\u300cBASF Plating-Lab \uff08BASF\u30e1\u30c3\u30ad\u30e9\u30dc\uff09\u300d\u306e\u4e00\u74b0\u3068\u3057\u3066\u3001\u534a\u5c0e\u4f53\u88fd\u9020\u3068\u30c1\u30c3\u30d7\u7d71\u5408\u306e\u5206\u91ce\u306b\u304a\u3051\u308b\u9769\u65b0\u7684\u3067\u30ab\u30b9\u30bf\u30de\u30a4\u30ba\u3055\u308c\u305f\u30bd\u30ea\u30e5\u30fc\u30b7\u30e7\u30f3\u306e\u958b\u767a\u306b\u53d6\u308a\u7d44\u3093\u3067\u304d\u305f\u3002\u30d5\u30e9\u30a6\u30f3\u30db\u30fc\u30d5\u30a1\u30fcIPMS\u306e\u30ca\u30ce\u96fb\u5b50\u6280\u8853\u30bb\u30f3\u30bf\u30fc\uff08CNT\uff09\u306b\u304a\u3051\u308b\u30d1\u30a4\u30ed\u30c3\u30c8\u30c6\u30b9\u30c8\u3067\u306f\u3001\u534a\u5c0e\u4f53\u96c6\u7a4d\u306b\u304a\u3051\u308b\u6750\u6599\u3068\u6280\u8853\u306e\u52b9\u7387\u6027\u3068\u8cbb\u7528\u5bfe\u52b9\u679c\u3092\u9ad8\u3081\u308b\u305f\u3081\u306e\u6226\u7565\u304c\u7b56\u5b9a\u3055\u308c\u3001\u5b9f\u65bd\u3055\u308c\u3066\u3044\u308b\u3002
\n10\u5e74\u9593\u306e\u5354\u529b\u95a2\u4fc2\u3092\u795d\u3046BASF\u3068\u30d5\u30e9\u30a6\u30f3\u30db\u30fc\u30d5\u30a1\u30fcIPMS\u3000(C)Fraunhofer IPMS
\n\u3000BASF\u306e\u96fb\u5b50\u6750\u6599\u30d3\u30b8\u30cd\u30b9\u30e6\u30cb\u30c3\u30c8\u306e\u30b7\u30cb\u30a2\u30fb\u30d0\u30a4\u30b9\u30d7\u30ec\u30b8\u30c7\u30f3\u30c8\u3067\u3042\u308bDr. \u30ed\u30fc\u30bf\u30fc\u30fb\u30e9\u30a6\u30d4\u30d2\u30e9\u30fc\u306f\u6b21\u306e\u3088\u3046\u306b\u8ff0\u3079\u3066\u3044\u308b\u3002
\n\u3000\u300c\u3053\u306e\u63d0\u643a\u3092\u901a\u3057\u3066\u3001\u79c1\u305f\u3061\u306f\u5e02\u5834\u3067\u62e1\u5927\u3059\u308b\u8ab2\u984c\u306b\u5bfe\u51e6\u3057\u3001\u76f8\u4e92\u63a5\u7d9a\u3068\u30d1\u30c3\u30b1\u30fc\u30b8\u30f3\u30b0\u306e\u5206\u91ce\u306b\u304a\u3051\u308b\u65b0\u6280\u8853\u3092\u5b9f\u73fe\u3057\u3066\u3044\u307e\u3059\u300d
\n\u696d\u754c\u6a19\u6e96\u306b\u6cbf\u3063\u305f\u30d7\u30ed\u30bb\u30b9\u8a55\u4fa1
\n\u3000\u30de\u30a4\u30af\u30ed\u30c1\u30c3\u30d7\u306e\u88fd\u9020\u3068\u7d71\u5408\u306b\u306f\u3001\u6570\u591a\u304f\u306e\u96fb\u6c17\u5316\u5b66\u7684\u30d7\u30ed\u30bb\u30b9\u304c\u5fc5\u8981\u3002\u500b\u3005\u306e\u56de\u8def\u3092\u63a5\u7d9a\u3057\u3001\u30c1\u30c3\u30d7\u5185\u3067\u5c0e\u4f53\u7d4c\u8def\u306e\u30cd\u30c3\u30c8\u30ef\u30fc\u30af\u3092\u5f62\u6210\u3059\u308b\u305f\u3081\u306b\u306f\u3001\u3055\u307e\u3056\u307e\u306a\u5c64\u306e\u91d1\u5c5e\u307e\u305f\u306f\u91d1\u5c5e\u5408\u91d1\u3092\u30a6\u30a7\u30cf\u30fc\u306b\u5857\u5e03\u3059\u308b\u5fc5\u8981\u304c\u3042\u308b\u3002\u5168\u4f53\u7684\u306a\u7d71\u5408\u306e\u3042\u3089\u3086\u308b\u6bb5\u968e\u3084\u3001\u305d\u306e\u5f8c\u306e\u3055\u307e\u3056\u307e\u306a\u7528\u9014\u306b\u5bfe\u5fdc\u3059\u308b\u305f\u3081\u306b\u306f\u3001\u5316\u5b66\u54c1\u3084\u4f5c\u696d\u5de5\u7a0b\u3092\u304a\u5ba2\u69d8\u306e\u500b\u3005\u306e\u5de5\u7a0b\u306b\u9069\u5408\u3055\u305b\u308b\u5fc5\u8981\u304c\u3042\u308b\u3002BASF\u3068\u306e\u5354\u529b\u95a2\u4fc2\u306e\u4e00\u74b0\u3068\u3057\u3066\u8fd1\u5e74\u3001\u96fb\u89e3\u30e1\u30c3\u30ad\u84b8\u7740\u30d7\u30ed\u30bb\u30b9\u7528\u306e\u65b0\u3057\u3044\u5316\u5b66\u54c1\u306e\u8a55\u4fa1\u304c\u884c\u308f\u308c\u3066\u3044\u308b\u3002
\n\u3000\u540c\u6642\u306b\u3001\u305d\u308c\u306b\u5bfe\u5fdc\u3059\u308b\u88fd\u54c1\u30c6\u30b9\u30c8\u3068\u5b9f\u8a3c\u8a66\u9a13\u3082\u3001\u30a6\u30a7\u30cf\u30fc\u30ec\u30d9\u30eb\u3067\u304a\u5ba2\u69d8\u306e\u305f\u3081\u306b\u5b9f\u65bd\u3055\u308c\u3066\u3044\u308b\u3002BASF\u306f\u3001\u30d5\u30e9\u30a6\u30f3\u30db\u30fc\u30d5\u30a1\u30fcIPMS\u306e\u30af\u30ea\u30fc\u30f3\u30eb\u30fc\u30e0\u306b\u6700\u5148\u7aef\u306e\u30d7\u30ed\u30bb\u30b9\u30c4\u30fc\u30eb\u3092\u8a2d\u7f6e\u3057\u3001\u30d5\u30e9\u30a6\u30f3\u30db\u30fc\u30d5\u30a1\u30fc\u306e\u7d4c\u9a13\u8c4a\u5bcc\u306a\u79d1\u5b66\u8005\u305f\u3061\u304c\u3053\u308c\u3092\u4f7f\u7528\u3057\u3066\u3044\u308b\u3002\u3053\u306e\u3088\u3046\u306b\u3001\u4e21\u793e\u306f\u696d\u754c\u306e\u30d7\u30ed\u30bb\u30b9\u3067\u4f7f\u308f\u308c\u3066\u3044\u308b\u3082\u306e\u3068\u540c\u3058\u30c4\u30fc\u30eb\u3092\u4f7f\u7528\u3057\u3066\u304a\u308a\u3001\u30e6\u30fc\u30b6\u30fc\u306f\u9069\u683c\u6027\u78ba\u8a8d\u306b\u304b\u304b\u308b\u30b3\u30b9\u30c8\u3092\u5927\u5e45\u306b\u524a\u6e1b\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u308b\u3002\u7d50\u679c\u3001\u958b\u767a\u6642\u9593\u3068\u30b3\u30b9\u30c8\u3092\u7bc0\u7d04\u3057\u3001\u3088\u308a\u52b9\u7387\u7684\u306a\u30d7\u30ed\u30bb\u30b9\u3092\u78ba\u7acb\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u308b\u3002\u305d\u306e\u305f\u3081\u3001\u9769\u65b0\u7684\u306a\u30bd\u30ea\u30e5\u30fc\u30b7\u30e7\u30f3\u3092\u958b\u767a\u3057\u3001\u751f\u7523\u6761\u4ef6\u4e0b\u3067\u76f4\u63a5\u8a55\u4fa1\u3059\u308b\u3053\u3068\u304c\u53ef\u80fd\u306b\u306a\u308b\u3002
\n\u30d7\u30ed\u30bb\u30b9\u30c4\u30fc\u30eb\u300cLAM Sabre Extreme\u300d\u306e\u524d\u306b\u7acb\u3064BASF\u3068\u30d5\u30e9\u30a6\u30f3\u30db\u30fc\u30d5\u30a1\u30fcIPMS\u306e\u30d1\u30fc\u30c8\u30ca\u30fc\u3000(C)Fraunhofer IPMS
\n\u696d\u754c\u30d1\u30fc\u30c8\u30ca\u30fc\u3078\u306e\u76f4\u63a5\u9069\u7528\u306e\u53ef\u80fd\u6027
\n\u3000\u3053\u306e10\u5e74\u9593\u3067\u3001\u4e21\u793e\u306f12,000\u56de\u4ee5\u4e0a\u306e\u30d7\u30ed\u30bb\u30b9\u5b9f\u884c\u3092\u5b8c\u4e86\u3057\u305f\u3002\u30d5\u30e9\u30a6\u30f3\u30db\u30fc\u30d5\u30a1\u30fcIPMS\u306e\u6b21\u4e16\u4ee3\u30b3\u30f3\u30d4\u30e5\u30fc\u30c6\u30a3\u30f3\u30b0\u30d3\u30b8\u30cd\u30b9\u30e6\u30cb\u30c3\u30c8\u8cac\u4efb\u8005\u3001Dr.\u30d9\u30f3\u30b8\u30e3\u30df\u30f3\u30fb\u30ea\u30ea\u30a8\u30f3\u30bf\u30fc\u30eb\uff1d\u30a6\u30fc\u30ea\u30c3\u30d2\u6c0f\u306f\u3001\u300c\u958b\u767a\u3055\u308c\u305f\u30b1\u30df\u30ab\u30eb\u30d1\u30c3\u30b1\u30fc\u30b8\u3084\u88fd\u54c1\u306f\u3001\u79c1\u305f\u3061\u306e\u304a\u5ba2\u69d8\u306e\u5de5\u696d\u30d7\u30ed\u30bb\u30b9\u3067\u76f4\u63a5\u4f7f\u7528\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059\u300d\u3068\u8ff0\u3079\u3066\u3044\u308b\u3002\u4f8b\u3048\u3070\u3001\u30c7\u30e5\u30a2\u30eb\u30c0\u30de\u30b7\u30f3\u6280\u8853\u306b\u3088\u308b\u5c0f\u578b\u56de\u8def\u306e\u914d\u7dda\u69cb\u9020\u306e\u88fd\u9020\u306b\u3082\u4f7f\u308f\u308c\u3066\u3044\u308b\u3002\u3053\u308c\u3089\u306e\u88fd\u54c1\u306f\u3001\u30a4\u30f3\u30bf\u30fc\u30dd\u30fc\u30b6\u3001\u30c1\u30c3\u30d7\u30ec\u30c3\u30c8\u3001\u518d\u914d\u7dda\u69cb\u9020\uff08\u30d4\u30e9\u30fc\u3001RDL\u3001TSV\uff09\u75283D\u30d1\u30c3\u30b1\u30fc\u30b8\u306e\u88fd\u9020\u306b\u304a\u3044\u3066\u3082\u91cd\u8981\u3067\u3042\u308a\u3001\u30a6\u30a7\u30cf\u30fc\u5bfe\u30a6\u30a7\u30cf\u30fc\u306e\u30cf\u30a4\u30d6\u30ea\u30c3\u30c9\u63a5\u5408\u3067\u91d1\u5c5e\u5c64\u3092\u5f62\u6210\u3059\u308b\u3053\u3068\u3082\u3042\u308b\u3002
\n\u30002014\u5e746\u6708\u3001BASF\u3068\u30d5\u30e9\u30a6\u30f3\u30db\u30fc\u30d5\u30a1\u30fcIPMS\u306f\u3001CNT\u306b\u958b\u8a2d\u3055\u308c\u305f\u30b9\u30af\u30ea\u30fc\u30cb\u30f3\u30b0\u30d5\u30a1\u30d6\u306e\u4e00\u74b0\u3068\u3057\u3066\u5354\u529b\u95a2\u4fc2\u3092\u78ba\u7acb\u3057\u305f\u3002\u30d5\u30e9\u30a6\u30f3\u30db\u30fc\u30d5\u30a1\u30fcIPMS\u306f\u3001\u3053\u306e\u76ee\u7684\u306e\u305f\u3081\u306b\u76f4\u5f84300mm\u306e\u30af\u30ea\u30fc\u30f3\u30eb\u30fc\u30e0\u30a4\u30f3\u30d5\u30e9\u3092BASF\u306b\u63d0\u4f9b\u3057\u3066\u3044\u308b\u3002\u30e6\u30fc\u30b6\u30fc\u3068\u30d1\u30fc\u30c8\u30ca\u30fc\u306f\u3001\u7814\u7a76\u6240\u306e\u3042\u308b\u30b7\u30ea\u30b3\u30f3\u30b5\u30af\u30bd\u30cb\u30fc\u306e\u30cd\u30c3\u30c8\u30ef\u30fc\u30af\u304b\u3089\u3082\u6069\u6075\u3092\u53d7\u3051\u308b\u3053\u3068\u304c\u3067\u304d\u308b\u3002\u3053\u308c\u306b\u3088\u308a\u3001\u30d5\u30e9\u30a6\u30f3\u30db\u30fc\u30d5\u30a1\u30fcIZM-ASSID\u306e\u30c9\u30ec\u30b9\u30c7\u30f3\u652f\u6240\u306a\u3069\u3001\u4ed6\u306e\u5730\u5143\u65bd\u8a2d\u306e\u95a2\u4e0e\u3084\u3001\u30d5\u30e9\u30a6\u30f3\u30db\u30fc\u30d5\u30a1\u30fcIPMS\u306e\u30b0\u30ed\u30fc\u30d0\u30eb\u306a\u7523\u696d\u30d1\u30fc\u30c8\u30ca\u30fc\uff08\u30dc\u30c3\u30b7\u30e5\u3001\u30a4\u30f3\u30d5\u30a3\u30cb\u30aa\u30f3\u3001\u30b0\u30ed\u30fc\u30d0\u30eb\u30d5\u30a1\u30a6\u30f3\u30c9\u30ea\u30fc\u30ba\uff09\u5c02\u7528\u306e\u76f4\u63a5\u30d7\u30ed\u30bb\u30b9\u958b\u767a\u304c\u53ef\u80fd\u306b\u306a\u308b\u3002\u65b0\u305f\u306b\u8a2d\u7acb\u3055\u308c\u305f\u7814\u7a76\u30bb\u30f3\u30bf\u30fcCEASAX\uff08Center for Advanced CMOS and Heterointegration Saxony\uff09\u3067\u306f\u3001\u7279\u306b\u30de\u30a4\u30af\u30ed\u30b7\u30b9\u30c6\u30e0\u306e\u30d8\u30c6\u30ed\u30a4\u30f3\u30c6\u30b0\u30ec\u30fc\u30b7\u30e7\u30f3\u306b\u95a2\u3057\u3066\u3001\u7528\u9014\u306b\u6cbf\u3063\u305f\u30bd\u30ea\u30e5\u30fc\u30b7\u30e7\u30f3\u306b\u3055\u3089\u306b\u7dca\u5bc6\u306b\u53d6\u308a\u7d44\u3080\u3053\u3068\u304c\u53ef\u80fd\u306b\u306a\u308b\u3002
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