{"id":14240,"date":"2024-12-12T22:25:30","date_gmt":"2024-12-12T13:25:30","guid":{"rendered":"https:\/\/ctiweb.co.jp\/con\/?p=14240"},"modified":"2024-12-12T22:40:00","modified_gmt":"2024-12-12T13:40:00","slug":"%e3%80%90%e5%8d%8a%e5%b0%8e%e4%bd%93%e3%80%91%e5%a4%a7%e6%97%a5%e6%9c%ac%e5%8d%b0%e5%88%b7%e3%80%81euv%e3%83%aa%e3%82%bd%e3%82%b0%e3%83%a9%e3%83%95%e3%82%a3%e5%90%91%e3%81%91%e3%83%95%e3%82%a9","status":"publish","type":"post","link":"https:\/\/ctiweb.co.jp\/con\/%e3%80%90%e5%8d%8a%e5%b0%8e%e4%bd%93%e3%80%91%e5%a4%a7%e6%97%a5%e6%9c%ac%e5%8d%b0%e5%88%b7%e3%80%81euv%e3%83%aa%e3%82%bd%e3%82%b0%e3%83%a9%e3%83%95%e3%82%a3%e5%90%91%e3%81%91%e3%83%95%e3%82%a9\/","title":{"rendered":"\u3010\u534a\u5c0e\u4f53\u3011\u5927\u65e5\u672c\u5370\u5237\u3001EUV\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u5411\u3051\u30d5\u30a9\u30c8\u30de\u30b9\u30af\u4e0a\u306b2nm\u4e16\u4ee3\u4ee5\u964d\u306e\u5fae\u7d30\u306a\u30d1\u30bf\u30fc\u30f3\u306e\u89e3\u50cf\u306b\u6210\u529f"},"content":{"rendered":"<div class=\"wp-block-image\">\n<figure class=\"aligncenter size-large is-resized\"><img loading=\"lazy\" src=\"https:\/\/ctiweb.co.jp\/con\/wp-content\/uploads\/2024\/12\/image-40-1024x680.png\" alt=\"\" class=\"wp-image-14241\" width=\"383\" height=\"254\" srcset=\"https:\/\/ctiweb.co.jp\/con\/wp-content\/uploads\/2024\/12\/image-40-1024x680.png 1024w, https:\/\/ctiweb.co.jp\/con\/wp-content\/uploads\/2024\/12\/image-40-300x199.png 300w, https:\/\/ctiweb.co.jp\/con\/wp-content\/uploads\/2024\/12\/image-40-768x510.png 768w, https:\/\/ctiweb.co.jp\/con\/wp-content\/uploads\/2024\/12\/image-40-1536x1020.png 1536w, https:\/\/ctiweb.co.jp\/con\/wp-content\/uploads\/2024\/12\/image-40-1200x797.png 1200w, https:\/\/ctiweb.co.jp\/con\/wp-content\/uploads\/2024\/12\/image-40.png 1600w\" sizes=\"(max-width: 383px) 85vw, 383px\" \/><figcaption>2nm\u4e16\u4ee3\u4ee5\u964d\u306eEUV\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u5411\u3051\u30d5\u30a9\u30c8\u30de\u30b9\u30af<\/figcaption><\/figure><\/div>\n\n\n<p>\u3000<a href=\"https:\/\/www.dnp.co.jp\/\"><strong><span style=\"color: #0000ff\">\u5927\u65e5\u672c\u5370\u5237\uff08DNP\uff09<\/span><\/strong><\/a>\u306f\u3001\u534a\u5c0e\u4f53\u88fd\u9020\u306e\u6700\u5148\u7aef\u30d7\u30ed\u30bb\u30b9\u306eEUV\uff08Extreme Ultra-Violet\uff1a\u6975\u7aef\u7d2b\u5916\u7dda\uff09\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u306b\u5bfe\u5fdc\u3057\u305f\u30012nm\u4e16\u4ee3\u4ee5\u964d<sup>\uff0a1<\/sup>\u306e\u30ed\u30b8\u30c3\u30af\u534a\u5c0e\u4f53\u5411\u3051\u30d5\u30a9\u30c8\u30de\u30b9\u30af\u306b\u8981\u6c42\u3055\u308c\u308b\u5fae\u7d30\u306a\u30d1\u30bf\u30fc\u30f3\u306e\u89e3\u50cf\u306b\u6210\u529f\u3057\u305f\u3002\u307e\u305f\u3001DNP\u306f\u30012nm\u4e16\u4ee3\u4ee5\u964d\u306e\u6b21\u4e16\u4ee3\u534a\u5c0e\u4f53\u5411\u3051\u306b\u9069\u7528\u304c\u691c\u8a0e\u3055\u308c\u3066\u3044\u308b\u9ad8\u958b\u53e3\u6570\uff08High-Numerical Aperture\uff1a\u9ad8NA\uff09<sup>\uff0a2<\/sup>\u306b\u5bfe\u5fdc\u3057\u305f\u30d5\u30a9\u30c8\u30de\u30b9\u30af\u306e\u57fa\u790e\u8a55\u4fa1\u304c\u5b8c\u4e86\u3057\u3001\u534a\u5c0e\u4f53\u958b\u767a\u30b3\u30f3\u30bd\u30fc\u30b7\u30a2\u30e0\u3084\u88fd\u9020\u88c5\u7f6e\u30e1\u30fc\u30ab\u30fc\u3001\u6750\u6599\u30e1\u30fc\u30ab\u30fc\u7b49\u3078\u8a55\u4fa1\u7528\u30d5\u30a9\u30c8\u30de\u30b9\u30af\u306e\u63d0\u4f9b\u3092\u958b\u59cb\u3057\u305f\u3002\u9ad8NA-EUV\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u306f\u3001\u5f93\u6765\u306b\u6bd4\u3079\u3066\u9ad8\u3044\u89e3\u50cf\u5ea6\u306e\u5fae\u7d30\u306a\u30d1\u30bf\u30fc\u30f3\u3092\u30b7\u30ea\u30b3\u30f3\u30a6\u30a8\u30cf\u30fc\u4e0a\u306b\u5f62\u6210\u3059\u308b\u3053\u3068\u3092\u53ef\u80fd\u306b\u3057\u3001\u305d\u308c\u306b\u3088\u308a\u9ad8\u6027\u80fd\u304b\u3064\u4f4e\u6d88\u8cbb\u96fb\u529b\u306e\u534a\u5c0e\u4f53\u306e\u5b9f\u73fe\u304c\u671f\u5f85\u3055\u308c\u3066\u3044\u308b\u3002<br>\u3000\u8fd1\u5e74\u3001\u6700\u5148\u7aef\u306e\u30ed\u30b8\u30c3\u30af\u534a\u5c0e\u4f53\u3067\u306fEUV\u5149\u6e90\u3092\u7528\u3044\u308bEUV\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u306b\u3088\u308b\u91cf\u7523\u304c\u3055\u3089\u306b\u9032\u307f\u3001\u30e1\u30e2\u30ea\u534a\u5c0e\u4f53\u306b\u304a\u3044\u3066\u3082\u305d\u306e\u63a1\u7528\u304c\u62e1\u5927\u3059\u308b\u306a\u3069\u3001\u6700\u5148\u7aef\u534a\u5c0e\u4f53\u306e\u4f9b\u7d66\u306bEUV\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u304c\u6b20\u304b\u305b\u306a\u3044\u3082\u306e\u306b\u306a\u3063\u3066\u3044\u308b\u3002<br>\u3000DNP\u306f\u30012023\u5e74\u306b\u30013nm\u4e16\u4ee3\u306eEUV\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u5411\u3051\u30d5\u30a9\u30c8\u30de\u30b9\u30af\u88fd\u9020\u30d7\u30ed\u30bb\u30b9\u306e\u958b\u767a<sup>\uff0a3<\/sup>\u3092\u5b8c\u4e86\u30022024\u5e74\u306b\u306f\u3001Rapidus\u304c\u53c2\u753b\u3057\u3066\u3044\u308b\u65b0\u30a8\u30cd\u30eb\u30ae\u30fc\u30fb\u7523\u696d\u6280\u8853\u7dcf\u5408\u958b\u767a\u6a5f\u69cb\uff08NEDO\uff09\u306e\u300c\u30dd\u30b9\u30c85G\u60c5\u5831\u901a\u4fe1\u30b7\u30b9\u30c6\u30e0\u57fa\u76e4\u5f37\u5316\u7814\u7a76\u958b\u767a\u4e8b\u696d\u300d\u306b\u518d\u59d4\u8a17\u5148\u3068\u3057\u3066\u53c2\u753b\u3057\u3001\u6700\u5148\u7aef\u30ed\u30b8\u30c3\u30af\u534a\u5c0e\u4f53\u5411\u3051\u30d5\u30a9\u30c8\u30de\u30b9\u30af\u88fd\u9020\u30d7\u30ed\u30bb\u30b9\u304a\u3088\u3073\u4fdd\u8a3c\u306b\u304b\u304b\u308f\u308b\u6280\u8853\u3092\u958b\u767a<sup>\uff0a4<\/sup>\u3057\u3066\u3044\u308b\u3002<br><br><strong><span style=\"color: #800000\">\u958b\u767a\u306e\u6982\u8981<\/span><\/strong><br>\u3000\u4eca\u56deDNP\u306f\u3001\u5148\u7aef\u9818\u57df\u306e\u534a\u5c0e\u4f53\u88fd\u9020\u306b\u5411\u3051\u3066\u30012nm\u4e16\u4ee3\u4ee5\u964d\u306e\u30ed\u30b8\u30c3\u30af\u534a\u5c0e\u4f53\u5411\u3051\u30d5\u30a9\u30c8\u30de\u30b9\u30af\u306b\u8981\u6c42\u3055\u308c\u308b\u5fae\u7d30\u30d1\u30bf\u30fc\u30f3\u3092\u3001EUV\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u5411\u3051\u30d5\u30a9\u30c8\u30de\u30b9\u30af\u3078\u306e\u89e3\u50cf\u306b\u6210\u529f\u3057\u305f\u3002\u307e\u305f\u3001\u305d\u308c\u306b\u52a0\u3048\u30662nm\u4e16\u4ee3\u4ee5\u964d\u306e\u6b21\u4e16\u4ee3\u534a\u5c0e\u4f53\u5411\u3051\u306b\u9069\u7528\u304c\u691c\u8a0e\u3055\u308c\u3066\u3044\u308b\u9ad8NA\u306b\u5bfe\u5fdc\u3057\u305fEUV\u30d5\u30a9\u30c8\u30de\u30b9\u30af\u306e\u57fa\u790e\u8a55\u4fa1\u3082\u5b8c\u4e86\u3055\u305b\u3001\u30b5\u30f3\u30d7\u30eb\u30de\u30b9\u30af\u306e\u63d0\u4f9b\u3092\u958b\u59cb\u3057\u3066\u3044\u308b\u3002<br><br><strong><span style=\"color: #800000\">\u958b\u767a\u306e\u30dd\u30a4\u30f3\u30c8<\/span><\/strong><br>\uff081\uff092nm\u4e16\u4ee3\u4ee5\u964d\u306eEUV\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u5411\u3051\u30d5\u30a9\u30c8\u30de\u30b9\u30af\u306e\u5b9f\u73fe\u306b\u306f3nm\u4e16\u4ee3\u306b\u6bd4\u3079\u3066\u300120\uff05\u4ee5\u4e0a\u7e2e\u5c0f\u3055\u308c\u305f\u30d1\u30bf\u30fc\u30f3\u304c\u8981\u6c42\u3055\u308c\u308b\u3002\u30b5\u30a4\u30ba\u3060\u3051\u3067\u306a\u304f\u5f62\u72b6\u3082\u4e00\u822c\u7684\u306a\u76f4\u7dda\u3084\u77e9\u5f62\u30d1\u30bf\u30fc\u30f3\u3060\u3051\u3067\u306a\u304f\u3001\u8907\u96d1\u3055\u3092\u5897\u3057\u305f\u66f2\u7dda\u30d1\u30bf\u30fc\u30f3\u3092\u542b\u3081\u305f\u3001\u3059\u3079\u3066\u306e\u5fae\u7d30\u306a\u30d1\u30bf\u30fc\u30f3\u3092\u540c\u4e00\u30de\u30b9\u30af\u4e0a\u3067\u89e3\u50cf\u3055\u305b\u308b\u6280\u8853\u304c\u5fc5\u8981\u3068\u306a\u308b\u3002DNP\u306f\u78ba\u7acb\u6e08\u307f\u306e3nm\u4e16\u4ee3\u306e\u88fd\u9020\u30d7\u30ed\u30bb\u30b9\u3092\u30d9\u30fc\u30b9\u306b\u6539\u5584\u3092\u91cd\u306d\u308b\u3053\u3068\u3067\u30012nm\u4e16\u4ee3\u4ee5\u964d\u306b\u8981\u6c42\u3055\u308c\u308b\u30d1\u30bf\u30fc\u30f3\u306e\u89e3\u50cf\u3092\u9054\u6210\u3057\u305f\u3002<br><\/p>\n\n\n<div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full is-resized\"><img loading=\"lazy\" src=\"https:\/\/ctiweb.co.jp\/con\/wp-content\/uploads\/2024\/12\/image-41.png\" alt=\"\" class=\"wp-image-14242\" width=\"353\" height=\"353\" srcset=\"https:\/\/ctiweb.co.jp\/con\/wp-content\/uploads\/2024\/12\/image-41.png 600w, https:\/\/ctiweb.co.jp\/con\/wp-content\/uploads\/2024\/12\/image-41-300x300.png 300w, https:\/\/ctiweb.co.jp\/con\/wp-content\/uploads\/2024\/12\/image-41-150x150.png 150w\" sizes=\"(max-width: 353px) 85vw, 353px\" \/><figcaption>EUV\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u7528\u30d5\u30a9\u30c8\u30de\u30b9\u30af\u4e0a\u306e\u7dda\u5e4517nm\u306eLine&amp;Space\u30d1\u30bf\u30fc\u30f3\u753b\u50cf<\/figcaption><\/figure><\/div>\n\n<div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full is-resized\"><img loading=\"lazy\" src=\"https:\/\/ctiweb.co.jp\/con\/wp-content\/uploads\/2024\/12\/image-42.png\" alt=\"\" class=\"wp-image-14243\" width=\"357\" height=\"354\" srcset=\"https:\/\/ctiweb.co.jp\/con\/wp-content\/uploads\/2024\/12\/image-42.png 600w, https:\/\/ctiweb.co.jp\/con\/wp-content\/uploads\/2024\/12\/image-42-300x298.png 300w, https:\/\/ctiweb.co.jp\/con\/wp-content\/uploads\/2024\/12\/image-42-150x150.png 150w\" sizes=\"(max-width: 357px) 85vw, 357px\" \/><figcaption>EUV\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u7528\u30d5\u30a9\u30c8\u30de\u30b9\u30af\u4e0a\u306e\u5fae\u7d30\u66f2\u7dda\u30d1\u30bf\u30fc\u30f3\u753b\u50cf<\/figcaption><\/figure><\/div>\n\n\n<p>\uff082\uff09\u9ad8NA-EUV\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u7528\u306e\u30d5\u30a9\u30c8\u30de\u30b9\u30af\u306b\u3064\u3044\u3066\u306f\u3001\u901a\u5e38\u306eEUV\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u7528\u306b\u6bd4\u3079\u3001\u3088\u308a\u9ad8\u3044\u7cbe\u5ea6\u3068\u5fae\u7d30\u306a\u52a0\u5de5\u304c\u8981\u6c42\u3055\u308c\u308b\u3002DNP\u306f\u901a\u5e38\u306eEUV\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u5411\u3051\u30d5\u30a9\u30c8\u30de\u30b9\u30af\u3068\u306f\u7570\u306a\u308b\u88fd\u9020\u30d7\u30ed\u30bb\u30b9\u30d5\u30ed\u30fc\u3092\u69cb\u7bc9\u3057\u305f\u4e0a\u3067\u6700\u9069\u5316\u3092\u884c\u3063\u305f\u3002<br><br><strong><span style=\"color: #800000\">\u4eca\u5f8c\u306e\u5c55\u958b<\/span><\/strong><br>\u3000DNP\u306f\u3001\u4eca\u5f8c\u3001\u88fd\u9020\u306e\u6b69\u7559\u307e\u308a\u5411\u4e0a\u306a\u3069\u306e\u751f\u7523\u6280\u8853\u306e\u78ba\u7acb\u3092\u9032\u3081\u30012027\u5e74\u5ea6\u306e2nm\u4e16\u4ee3\u30ed\u30b8\u30c3\u30af\u534a\u5c0e\u4f53\u5411\u3051\u91cf\u7523\u30d5\u30a9\u30c8\u30de\u30b9\u30af\u4f9b\u7d66\u958b\u59cb\u3092\u76ee\u6307\u3059\u3002\u307e\u305f\u3001\u5f15\u304d\u7d9a\u304d\u30d9\u30eb\u30ae\u30fc\u306b\u672c\u90e8\u3092\u7f6e\u304f\u6700\u5148\u7aef\u306e\u56fd\u969b\u7814\u7a76\u6a5f\u95a2imec\u3068\u3082\u5354\u529b\u3057\u30011nm\u4e16\u4ee3\u3082\u898b\u636e\u3048\u305f\u30d5\u30a9\u30c8\u30de\u30b9\u30af\u88fd\u9020\u6280\u8853\u306e\u958b\u767a\u3092\u63a8\u9032\u3059\u308b\u3002DNP\u306f\u3001\u56fd\u969b\u7684\u306a\u534a\u5c0e\u4f53\u7523\u696d\u306b\u304a\u3044\u3066\u3001\u3055\u307e\u3056\u307e\u306a\u30d1\u30fc\u30c8\u30ca\u30fc\u3068\u9023\u643a\u3057\u3066\u958b\u767a\u3092\u63a8\u9032\u3057\u3001\u65e5\u672c\u306e\u534a\u5c0e\u4f53\u7523\u696d\u306e\u6210\u9577\u306b\u8ca2\u732e\u3057\u3066\u3044\u304f\u3002<br>\uff0a1\u3000\u56fd\u969b\u30c7\u30d0\u30a4\u30b9\u30b7\u30b9\u30c6\u30e0\u30ed\u30fc\u30c9\u30de\u30c3\u30d7\uff08IRDS\uff1aInternational Roadmap for Devices and Systems\uff09\u306e\u57fa\u6e96\u306b\u6e96\u62e0<br>\uff0a2\u3000Numerical Aperture\uff08NA\uff09\u306f\u3001\u5149\u5b66\u7cfb\u306e\u660e\u308b\u3055\u3084\u89e3\u50cf\u529b\u3092\u8868\u3059\u6570\u5024\u3067\u3059\u3002\u9ad8NA\u306f\u3001EUV\u9732\u5149\u88c5\u7f6e\u306e\u30ec\u30f3\u30ba\u306e\u958b\u53e3\u6570\u3092\u5f93\u6765\u306e0.33\u304b\u30890.55\u306b\u62e1\u5927\u306b\u3057\u305f\u3082\u306e\u3002<br>\uff0a3\u3000<a href=\"https:\/\/www.dnp.co.jp\/news\/detail\/20170116_1587.html\"><strong><span style=\"color: #0000ff\">3nm\u76f8\u5f53\u306eEUV\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u5411\u3051\u30d5\u30a9\u30c8\u30de\u30b9\u30af\u88fd\u9020\u30d7\u30ed\u30bb\u30b9\u3092\u958b\u767a<\/span><\/strong><\/a>\uff082023\u5e7412\u670812\u65e5\uff09<br>\uff0a4\u3000<a href=\"https:\/\/www.dnp.co.jp\/news\/detail\/20173719_1587.html\"><strong><span style=\"color: #0000ff\">2nm\u4e16\u4ee3\u306eEUV\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u5411\u3051\u30d5\u30a9\u30c8\u30de\u30b9\u30af\u88fd\u9020\u30d7\u30ed\u30bb\u30b9\u958b\u767a\u3092\u52a0\u901f<\/span><\/strong><\/a>\uff082024\u5e743\u670827\u65e5\uff09<\/p>\n","protected":false},"excerpt":{"rendered":"<p>\u3010\u534a\u5c0e\u4f53\u3011\u5927\u65e5\u672c\u5370\u5237\u3001EUV\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u5411\u3051\u30d5\u30a9\u30c8\u30de\u30b9\u30af\u4e0a\u306b2nm\u4e16\u4ee3\u4ee5\u964d\u306e\u5fae\u7d30\u306a\u30d1\u30bf\u30fc\u30f3\u306e\u89e3\u50cf\u306b\u6210\u529f<br \/>\n\u3000\u5927\u65e5\u672c\u5370\u5237\uff08DNP\uff09\u306f\u3001\u534a\u5c0e\u4f53\u88fd\u9020\u306e\u6700\u5148\u7aef\u30d7\u30ed\u30bb\u30b9\u306eEUV\uff08Extreme Ultra-Violet\uff1a\u6975\u7aef\u7d2b\u5916\u7dda\uff09\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u306b\u5bfe\u5fdc\u3057\u305f\u30012nm\u4e16\u4ee3\u4ee5\u964d\uff0a1\u306e\u30ed\u30b8\u30c3\u30af\u534a\u5c0e\u4f53\u5411\u3051\u30d5\u30a9\u30c8\u30de\u30b9\u30af\u306b\u8981\u6c42\u3055\u308c\u308b\u5fae\u7d30\u306a\u30d1\u30bf\u30fc\u30f3\u306e\u89e3\u50cf\u306b\u6210\u529f\u3057\u305f\u3002\u307e\u305f\u3001DNP\u306f\u30012nm\u4e16\u4ee3\u4ee5\u964d\u306e\u6b21\u4e16\u4ee3\u534a\u5c0e\u4f53\u5411\u3051\u306b\u9069\u7528\u304c\u691c\u8a0e\u3055\u308c\u3066\u3044\u308b\u9ad8\u958b\u53e3\u6570\uff08High-Numerical Aperture\uff1a\u9ad8NA\uff09\uff0a2\u306b\u5bfe\u5fdc\u3057\u305f\u30d5\u30a9\u30c8\u30de\u30b9\u30af\u306e\u57fa\u790e\u8a55\u4fa1\u304c\u5b8c\u4e86\u3057\u3001\u534a\u5c0e\u4f53\u958b\u767a\u30b3\u30f3\u30bd\u30fc\u30b7\u30a2\u30e0\u3084\u88fd\u9020\u88c5\u7f6e\u30e1\u30fc\u30ab\u30fc\u3001\u6750\u6599\u30e1\u30fc\u30ab\u30fc\u7b49\u3078\u8a55\u4fa1\u7528\u30d5\u30a9\u30c8\u30de\u30b9\u30af\u306e\u63d0\u4f9b\u3092\u958b\u59cb\u3057\u305f\u3002\u9ad8NA-EUV\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u306f\u3001\u5f93\u6765\u306b\u6bd4\u3079\u3066\u9ad8\u3044\u89e3\u50cf\u5ea6\u306e\u5fae\u7d30\u306a\u30d1\u30bf\u30fc\u30f3\u3092\u30b7\u30ea\u30b3\u30f3\u30a6\u30a8\u30cf\u30fc\u4e0a\u306b\u5f62\u6210\u3059\u308b\u3053\u3068\u3092\u53ef\u80fd\u306b\u3057\u3001\u305d\u308c\u306b\u3088\u308a\u9ad8\u6027\u80fd\u304b\u3064\u4f4e\u6d88\u8cbb\u96fb\u529b\u306e\u534a\u5c0e\u4f53\u306e\u5b9f\u73fe\u304c\u671f\u5f85\u3055\u308c\u3066\u3044\u308b\u3002<br \/>\n\u3000\u8fd1\u5e74\u3001\u6700\u5148\u7aef\u306e\u30ed\u30b8\u30c3\u30af\u534a\u5c0e\u4f53\u3067\u306fEUV\u5149\u6e90\u3092\u7528\u3044\u308bEUV\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u306b\u3088\u308b\u91cf\u7523\u304c\u3055\u3089\u306b\u9032\u307f\u3001\u30e1\u30e2\u30ea\u534a\u5c0e\u4f53\u306b\u304a\u3044\u3066\u3082\u305d\u306e\u63a1\u7528\u304c\u62e1\u5927\u3059\u308b\u306a\u3069\u3001\u6700\u5148\u7aef\u534a\u5c0e\u4f53\u306e\u4f9b\u7d66\u306bEUV\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u304c\u6b20\u304b\u305b\u306a\u3044\u3082\u306e\u306b\u306a\u3063\u3066\u3044\u308b\u3002<br \/>\n\u3000DNP\u306f\u30012023\u5e74\u306b\u30013nm\u4e16\u4ee3\u306eEUV\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u5411\u3051\u30d5\u30a9\u30c8\u30de\u30b9\u30af\u88fd\u9020\u30d7\u30ed\u30bb\u30b9\u306e\u958b\u767a\uff0a3\u3092\u5b8c\u4e86\u30022024\u5e74\u306b\u306f\u3001Rapidus\u304c\u53c2\u753b\u3057\u3066\u3044\u308b\u65b0\u30a8\u30cd\u30eb\u30ae\u30fc\u30fb\u7523\u696d\u6280\u8853\u7dcf\u5408\u958b\u767a\u6a5f\u69cb\uff08NEDO\uff09\u306e\u300c\u30dd\u30b9\u30c85G\u60c5\u5831\u901a\u4fe1\u30b7\u30b9\u30c6\u30e0\u57fa\u76e4\u5f37\u5316\u7814\u7a76\u958b\u767a\u4e8b\u696d\u300d\u306b\u518d\u59d4\u8a17\u5148\u3068\u3057\u3066\u53c2\u753b\u3057\u3001\u6700\u5148\u7aef\u30ed\u30b8\u30c3\u30af\u534a\u5c0e\u4f53\u5411\u3051\u30d5\u30a9\u30c8\u30de\u30b9\u30af\u88fd\u9020\u30d7\u30ed\u30bb\u30b9\u304a\u3088\u3073\u4fdd\u8a3c\u306b\u304b\u304b\u308f\u308b\u6280\u8853\u3092\u958b\u767a\uff0a4\u3057\u3066\u3044\u308b\u3002<br \/>\n\u958b\u767a\u306e\u6982\u8981<br \/>\n\u3000\u4eca\u56deDNP\u306f\u3001\u5148\u7aef\u9818\u57df\u306e\u534a\u5c0e\u4f53\u88fd\u9020\u306b\u5411\u3051\u3066\u30012nm\u4e16\u4ee3\u4ee5\u964d\u306e\u30ed\u30b8\u30c3\u30af\u534a\u5c0e\u4f53\u5411\u3051\u30d5\u30a9\u30c8\u30de\u30b9\u30af\u306b\u8981\u6c42\u3055\u308c\u308b\u5fae\u7d30\u30d1\u30bf\u30fc\u30f3\u3092\u3001EUV\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u5411\u3051\u30d5\u30a9\u30c8\u30de\u30b9\u30af\u3078\u306e\u89e3\u50cf\u306b\u6210\u529f\u3057\u305f\u3002\u307e\u305f\u3001\u305d\u308c\u306b\u52a0\u3048\u30662nm\u4e16\u4ee3\u4ee5\u964d\u306e\u6b21\u4e16\u4ee3\u534a\u5c0e\u4f53\u5411\u3051\u306b\u9069\u7528\u304c\u691c\u8a0e\u3055\u308c\u3066\u3044\u308b\u9ad8NA\u306b\u5bfe\u5fdc\u3057\u305fEUV\u30d5\u30a9\u30c8\u30de\u30b9\u30af\u306e\u57fa\u790e\u8a55\u4fa1\u3082\u5b8c\u4e86\u3055\u305b\u3001\u30b5\u30f3\u30d7\u30eb\u30de\u30b9\u30af\u306e\u63d0\u4f9b\u3092\u958b\u59cb\u3057\u3066\u3044\u308b\u3002<br \/>\n\u958b\u767a\u306e\u30dd\u30a4\u30f3\u30c8<br \/>\n\uff081\uff092nm\u4e16\u4ee3\u4ee5\u964d\u306eEUV\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u5411\u3051\u30d5\u30a9\u30c8\u30de\u30b9\u30af\u306e\u5b9f\u73fe\u306b\u306f3nm\u4e16\u4ee3\u306b\u6bd4\u3079\u3066\u300120\uff05\u4ee5\u4e0a\u7e2e\u5c0f\u3055\u308c\u305f\u30d1\u30bf\u30fc\u30f3\u304c\u8981\u6c42\u3055\u308c\u308b\u3002\u30b5\u30a4\u30ba\u3060\u3051\u3067\u306a\u304f\u5f62\u72b6\u3082\u4e00\u822c\u7684\u306a\u76f4\u7dda\u3084\u77e9\u5f62\u30d1\u30bf\u30fc\u30f3\u3060\u3051\u3067\u306a\u304f\u3001\u8907\u96d1\u3055\u3092\u5897\u3057\u305f\u66f2\u7dda\u30d1\u30bf\u30fc\u30f3\u3092\u542b\u3081\u305f\u3001\u3059\u3079\u3066\u306e\u5fae\u7d30\u306a\u30d1\u30bf\u30fc\u30f3\u3092\u540c\u4e00\u30de\u30b9\u30af\u4e0a\u3067\u89e3\u50cf\u3055\u305b\u308b\u6280\u8853\u304c\u5fc5\u8981\u3068\u306a\u308b\u3002DNP\u306f\u78ba\u7acb\u6e08\u307f\u306e3nm\u4e16\u4ee3\u306e\u88fd\u9020\u30d7\u30ed\u30bb\u30b9\u3092\u30d9\u30fc\u30b9\u306b\u6539\u5584\u3092\u91cd\u306d\u308b\u3053\u3068\u3067\u30012nm\u4e16\u4ee3\u4ee5\u964d\u306b\u8981\u6c42\u3055\u308c\u308b\u30d1\u30bf\u30fc\u30f3\u306e\u89e3\u50cf\u3092\u9054\u6210\u3057\u305f\u3002<br \/>\n\uff082\uff09\u9ad8NA-EUV\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u7528\u306e\u30d5\u30a9\u30c8\u30de\u30b9\u30af\u306b\u3064\u3044\u3066\u306f\u3001\u901a\u5e38\u306eEUV\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u7528\u306b\u6bd4\u3079\u3001\u3088\u308a\u9ad8\u3044\u7cbe\u5ea6\u3068\u5fae\u7d30\u306a\u52a0\u5de5\u304c\u8981\u6c42\u3055\u308c\u308b\u3002DNP\u306f\u901a\u5e38\u306eEUV\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u5411\u3051\u30d5\u30a9\u30c8\u30de\u30b9\u30af\u3068\u306f\u7570\u306a\u308b\u88fd\u9020\u30d7\u30ed\u30bb\u30b9\u30d5\u30ed\u30fc\u3092\u69cb\u7bc9\u3057\u305f\u4e0a\u3067\u6700\u9069\u5316\u3092\u884c\u3063\u305f\u3002<br \/>\n\u4eca\u5f8c\u306e\u5c55\u958b<br \/>\n\u3000DNP\u306f\u3001\u4eca\u5f8c\u3001\u88fd\u9020\u306e\u6b69\u7559\u307e\u308a\u5411\u4e0a\u306a\u3069\u306e\u751f\u7523\u6280\u8853\u306e\u78ba\u7acb\u3092\u9032\u3081\u30012027\u5e74\u5ea6\u306e2nm\u4e16\u4ee3\u30ed\u30b8\u30c3\u30af\u534a\u5c0e\u4f53\u5411\u3051\u91cf\u7523\u30d5\u30a9\u30c8\u30de\u30b9\u30af\u4f9b\u7d66\u958b\u59cb\u3092\u76ee\u6307\u3059\u3002\u307e\u305f\u3001\u5f15\u304d\u7d9a\u304d\u30d9\u30eb\u30ae\u30fc\u306b\u672c\u90e8\u3092\u7f6e\u304f\u6700\u5148\u7aef\u306e\u56fd\u969b\u7814\u7a76\u6a5f\u95a2imec\u3068\u3082\u5354\u529b\u3057\u30011nm\u4e16\u4ee3\u3082\u898b\u636e\u3048\u305f\u30d5\u30a9\u30c8\u30de\u30b9\u30af\u88fd\u9020\u6280\u8853\u306e\u958b\u767a\u3092\u63a8\u9032\u3059\u308b\u3002DNP\u306f\u3001\u56fd\u969b\u7684\u306a\u534a\u5c0e\u4f53\u7523\u696d\u306b\u304a\u3044\u3066\u3001\u3055\u307e\u3056\u307e\u306a\u30d1\u30fc\u30c8\u30ca\u30fc\u3068\u9023\u643a\u3057\u3066\u958b\u767a\u3092\u63a8\u9032\u3057\u3001\u65e5\u672c\u306e\u534a\u5c0e\u4f53\u7523\u696d\u306e\u6210\u9577\u306b\u8ca2\u732e\u3057\u3066\u3044\u304f\u3002<br 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