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style=\"color: #800000\">\uff1c\u30dd\u30a4\u30f3\u30c8\uff1e<\/span><\/strong><br \/><span style=\"color: #000000\">\u25cb\u30b7\u30ea\u30b3\u30f3\u30d5\u30a9\u30c8\u30cb\u30af\u30b9\u30d7\u30ed\u30bb\u30b9\u306b\u9069\u3057\u305f\u30ca\u30ce\u30a4\u30f3\u30d7\u30ea\u30f3\u30c8\u7528\u306e\u5149\u786c\u5316\u6027\u6a39\u8102\u3092\u958b\u767a\u3002<\/span> <br \/>\u25cbUV \u30ca\u30ce\u30a4\u30f3\u30d7\u30ea\u30f3\u30c8\u3092\u7528\u3044\u305f\u2f24\u9762\u7a4d\u30fb\u9ad8\u30b9\u30eb\u30fc\u30d7\u30c3\u30c8\u306e\u30b7\u30ea\u30b3\u30f3\u30d5\u30a9\u30c8\u30cb\u30af\u30b9\u30d7\u30ed\u30bb\u30b9\u3092\u78ba\u7acb\u3002 <br \/><span style=\"color: #000000\">\u25cb\u96fb\u5b50\u7dda\u63cf\u753b\u306b\u3088\u308b\u5149\u5c0e\u6ce2\u8def\u3068\u5909\u308f\u3089\u306a\u3044\u7279\u6027\u3092\u6301\u3064\u30b7\u30ea\u30b3\u30f3\u5c0e\u6ce2\u8def\u306e\u4f5c\u88fd\u306b\u6210\u529f\u3002<\/span> <br \/><strong><span style=\"color: #800000\"><br \/>\u6982\u8981<\/span><\/strong> <br \/>\u3000\u6771\u4eac\u79d1\u5b66\u2f24\u5b66\uff08Science Tokyo\uff09 \u5de5\u5b66\u9662 \u96fb\u6c17\u96fb\u5b50\u7cfb\u306e\u96e8\u5bae\u667a\u5b8f\u51c6\u6559\u6388\u3001\u6c38\u677e\u5468\u5b66\u58eb\u8ab2\u7a0b\u5b66\u751f\u3001\u2ec4\u2f2d\u4f38\u5f66\u6559\u6388\u3089\u306f\u3001\u6771\u4eac\u5fdc\u5316\u5de5\u696d\u306e\u68ee\u8389\u7d17\u5b50\u6c0f\u3001\u85e4\u4e95\u606d\u6c0f\u3001\u6d45\u4e95\u9686\u5b8f\u6c0f\u3001\u5869\u7530 \u2f24\u6c0f\u3089\u3068\u5171\u540c\u3067\u3001UV\u30ca\u30ce\u30a4\u30f3\u30d7\u30ea\u30f3\u30c8\uff08UV-NIL\uff09\u3092\u7528\u3044\u305f\u30b7\u30ea\u30b3\u30f3\u30d5\u30a9\u30c8\u30cb\u30af\u30b9\u30d7\u30ed\u30bb\u30b9\u3092\u958b\u767a\u3057\u305f\u3002<br \/>\u3000\u30ca\u30ce\u30a4\u30f3\u30d7\u30ea\u30f3\u30c8\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\uff08NIL\uff09\u306f\u3001\u534a\u5c0e\u4f53\u306b\u304a\u3051\u308b\u6b21\u4e16\u4ee3\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u6280\u8853\u306e1\u3064\u3068\u3057\u3066\u671f\u5f85\u3055\u308c\u3066\u3044\u308b\u3002\u7279\u306bUV-NIL\u306f\u5b9f\u7528\u7684\u306a\u91cf\u7523\u6280\u8853\u3068\u3057\u3066\u5c0e\u5165\u5b9f\u7e3e\u304c\u3042\u308b\u3002<br \/>\u3000\u672c\u7814\u7a76\u3067\u306f\u3001\u30b7\u30ea\u30b3\u30f3\u30d5\u30a9\u30c8\u30cb\u30af\u30b9\u30d7\u30ed\u30bb\u30b9\u306b\u5408\u308f\u305b\u305fNIL\u7528\u306e\u5149\u786c\u5316\u6027\u6a39\u8102\u306e\u958b\u767a\u3092\u884c\u3063\u305f\u3002\u3055\u3089\u306b\u3001SmartNIL\u00ae\u6280\u8853\uff08\u7528\u8a9e1\uff09\u306b\u57fa\u3065\u3044\u305f\u30ed\u30fc\u30eb\u30aa\u30f3\u30d7\u30ed\u30bb\u30b9\u306e\u6700\u9069\u5316\u3092\u5b9f\u65bd\u3057\u3001\u5f93\u6765\u306e90nm CMOS\u30d7\u30ed\u30bb\u30b9\u30e9\u30a4\u30f3\uff08\u7528\u8a9e2\uff09\u3084\u96fb\u5b50\u7dda\u63cf\u753b\uff08\u7528\u8a9e3\uff09\u3092\u7528\u3044\u3066\u4f5c\u3089\u308c\u305f\u5149\u5c0e\u6ce2\u8def\u3068\u540c\u7a0b\u5ea6\u306e\u6027\u80fd\u3092\u5f97\u308b\u3053\u3068\u306b\u6210\u529f\u3057\u305f\u3002\u4eca\u56de\u958b\u767a\u3057\u305f\u30b7\u30ea\u30b3\u30f3\u30d5\u30a9\u30c8\u30cb\u30af\u30b9\u30d7\u30ed\u30bb\u30b9\u3067\u306f\u3001UV-NIL\u306e\u2f24\u9762\u7a4d\u8ee2\u5199\u6027\u3084\u9ad8\u30b9\u30eb\u30fc\u30d7\u30c3\u30c8\u6027\u3092\u2f24\u3044\u306b\u6d3b\u304b\u3059\u3053\u3068\u304c\u3067\u304d\u3001\u304b\u3064\u30b3\u30b9\u30c8\u306e\u89b3\u70b9\u304b\u3089\u3082\u512a\u4f4d\u6027\u304c\u3042\u308b\u3068\u8003\u3048\u3089\u308c\u308b\u3002<br \/>\u3000\u672c\u7814\u7a76\u306f\u3001\u6771\u4eac\u79d1\u5b66\u2f24\u5b66\u5185\u306b\u8a2d\u7acb\u3055\u308c\u305f\u6771\u4eac\u5fdc\u5316\u5de5\u696d\u672a\u6765\u5275\u9020\u5354\u50cd\u7814\u7a76\u62e0\u70b9\u306b\u304a\u3044\u3066\u884c\u308f\u308c\u305f\u3082\u306e\u3067\u3001\u958b\u767a\u3057\u305f\u30ca\u30ce\u30a4\u30f3\u30d7\u30ea\u30f3\u30c8\u7528\u306e\u5149\u786c\u5316\u6027\u6a39\u8102\u304a\u3088\u3073\u30d7\u30ed\u30bb\u30b9\u30ec\u30b7\u30d4\u306f\u5916\u90e8\u63d0\u4f9b\u304c\u53ef\u80fd\u3002\u4f75\u305b\u3066\u3001\u672c\u7814\u7a76\u6210\u679c\u306f\u30012025\u5e741\u670825\u301c30\u65e5\uff08\u73fe\u5730\u6642\u9593\uff09\u306b\u7c73\u56fd\u30b5\u30f3\u30d5\u30e9\u30f3\u30b7\u30b9\u30b3\u3067\u958b\u50ac\u3055\u308c\u308b\u300cSPIE Photonics West\u300d\u306b\u3066\u5831\u544a\u3055\u308c\u308b\u3002<br \/><strong><span style=\"color: #800000\"><br \/>\u80cc\u666f<\/span><\/strong> <br \/>\u3000\u30ca\u30ce\u30a4\u30f3\u30d7\u30ea\u30f3\u30c8\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\uff08NIL\uff09\u306f\u3001\u30ca\u30ce\u30b9\u30b1\u30fc\u30eb\u306e\u30b9\u30bf\u30f3\u30d7\u3092\u7528\u3044\u305f\u62bc\u5370\u6280\u8853\u3067\u3042\u308a\u3001\u5f93\u6765\u306e\u9732\u5149\u6cd5\u3068\u9055\u3063\u3066\u9732\u5149\u6ce2\u2ed1\u306b\u89e3\u50cf\u5ea6\u304c\u4f9d\u5b58\u3057\u306a\u3044\u3053\u3068\u3084\u3001\u2f24\u9762\u7a4d\u8ee2\u5199\u6027\u3084\u9ad8\u30b9\u30eb\u30fc\u30d7\u30c3\u30c8\u6027\u306a\u3069\u3092\u6709\u3057\u3066\u3044\u308b\u3053\u3068\u304b\u3089\u3001\u534a\u5c0e\u4f53\u306b\u304a\u3051\u308b\u6b21\u4e16\u4ee3\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u6280\u8853\u306e1\u3064\u3068\u3057\u3066\u671f\u5f85\u3055\u308c\u3066\u3044\u308b\u3002\u7279\u306b\u30bd\u30d5\u30c8UV-NIL\uff08\u7528\u8a9e4\uff09\u306f\u3001\u534a\u5c0e\u4f53\u88fd\u9020\u74b0\u5883\u3068\u306e\u4e92\u63db\u6027\u3092\u62c5\u4fdd\u3057\u3064\u3064\u3001\u534a\u6c38\u4e45\u7684\u306a\u6a5f\u80fd\u5c64\u3092\u2f24\u9762\u7a4d\u304b\u3064\u9ad8\u89e3\u50cf\u5ea6\u3067\u30d1\u30bf\u30fc\u30cb\u30f3\u30b0\u3067\u304d\u308b\u3053\u3068\u304b\u3089\u3001\u8fd1\u5e74\u3001\u62e1\u5f35\u73fe\u5b9f\uff08AR\u30b0\u30e9\u30b9\uff09\u3084\u751f\u7269\u533b\u5b66\u8a3a\u65ad\uff08DNA\u30b7\u30fc\u30b1\u30f3\u30b5\u30fc\uff09\u306a\u3069\u306e\u65b0\u305f\u306a\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u306b\u5bfe\u3059\u308b\u5b9f\u7528\u7684\u306a\u91cf\u7523\u6280\u8853\u3068\u3057\u3066\u5c0e\u5165\u5b9f\u7e3e\u304c\u3042\u308b\u3002\u3055\u3089\u306b\u57fa\u790e\u7814\u7a76\u30ec\u30d9\u30eb\u3067\u3082\u3001\u30e1\u30bf\u30de\u30c6\u30ea\u30a2\u30eb\u3084\u30e1\u30bf\u30b5\u30fc\u30d5\u30a7\u30b9\u306a\u3069\u306e\u30a6\u30a7\u30cf\u5149\u5b66\u7d20\u5b50\u3092\u5b9f\u73fe\u3059\u308b\u969b\u306b\u6d3b\u7528\u3055\u308c\u3066\u3044\u308b\u3002 <br \/>\u3000\u305d\u306e\u3088\u3046\u306a\u4e2d\u3067\u3001\u534a\u5c0e\u4f53\u306e\u88fd\u9020\u6280\u8853\u3092\u7528\u3044\u3066\u30a6\u30a7\u30cf\u4e0a\u306b\u2f24\u898f\u6a21\u306a\u5149\u56de\u8def\u3092\u69cb\u7bc9\u3059\u308b\u96c6\u7a4d\u30d5\u30a9\u30c8\u30cb\u30af\u30b9\u5206\u91ce\u3067\u3082\u3001NIL\u3092\u5c0e\u5165\u3067\u304d\u308b\u53ef\u80fd\u6027\u304c\u3042\u308b\u3002\u96c6\u7a4d\u30d5\u30a9\u30c8\u30cb\u30af\u30b9\u5206\u91ce\u306b\u304a\u3044\u3066\u7279\u306b\u9ad8\u3044\u89e3\u50cf\u5ea6\u304c\u5fc5\u8981\u3068\u3055\u308c\u308b\u5834\u9762\u306f\u3001DFB\uff08\u5206\u5e03\u5e30\u9084\u578b\uff09\u30ec\u30fc\u30b6\u30fc\uff08\u7528\u8a9e5\uff09\u306b\u304a\u3051\u308b\u56de\u6298\u683c\u5b50\u306e\u5f62\u6210\u3001\u5149\u56de\u8def\u306e\u5165\u51fa\u529b\u306b\u4f7f\u7528\u3059\u308b\u30b0\u30ec\u30fc\u30c6\u30a3\u30f3\u30b0\u30ab\u30d7\u30e9\uff08\u7528\u8a9e6\uff09\u306e\u5f62\u6210\u3001\u30b7\u30ea\u30b3\u30f3\u30d5\u30a9\u30c8\u30cb\u30af\u30b9\u5149\u56de\u8def\u306b\u304a\u3051\u308b\u5c0e\u6ce2\u8def\u306e\u5f62\u6210\u306a\u3069\u3067\u3042\u308a\u3001\u3044\u305a\u308c\u3082100nm\u7a0b\u5ea6\u306e\u89e3\u50cf\u5ea6\u304c\u4fdd\u8a3c\u3055\u308c\u3066\u3044\u308c\u3070\u5341\u5206\u3068\u3044\u3048\u308b\uff08\u56f31\u306e\u8d64\u5e2f\u57df\uff09\u3002\u305d\u306e\u305f\u3081\u3001\u4e0a\u8a18\u30d7\u30ed\u30bb\u30b9\u5de5\u7a0b\u3067\u306f\u3001NIL\u306e\u2f24\u9762\u7a4d\u8ee2\u5199\u6027\u3084\u9ad8\u30b9\u30eb\u30fc\u30d7\u30c3\u30c8\u6027\u3092\u2f24\u3044\u306b\u6d3b\u304b\u3059\u3053\u3068\u304c\u3067\u304d\u3001\u304b\u3064\u30b3\u30b9\u30c8\u306e\u89b3\u70b9\u304b\u3089\u3082\u512a\u4f4d\u6027\u304c\u3042\u308b\u3068\u8003\u3048\u3089\u308c\u308b\u3002 <br \/>\u3000\u672c\u7814\u7a76\u3067\u306f\u3053\u3046\u3057\u305f\u80cc\u666f\u304b\u3089\u3001\u96c6\u7a4d\u30d5\u30a9\u30c8\u30cb\u30af\u30b9\u306e\u4e00\u5206\u91ce\u3068\u3057\u3066\u8fd1\u5e74\u767a\u5c55\u304c\u8457\u3057\u3044\u30b7\u30ea\u30b3\u30f3\u30d5\u30a9\u30c8\u30cb\u30af\u30b9\u306b\u7740\u76ee\u3057\u3066\u3001\u5b9f\u969b\u306bUV-NIL\u3092\u5c0e\u5165\u3057\u305f\u30d7\u30ed\u30bb\u30b9\u3092\u958b\u767a\u3057\u305f\u3002 <\/p>\n\n\n<div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full is-resized\"><img loading=\"lazy\" src=\"https:\/\/ctiweb.co.jp\/con\/wp-content\/uploads\/2025\/01\/20250130-073814.jpg\" alt=\"\" class=\"wp-image-15331\" width=\"372\" height=\"233\" srcset=\"https:\/\/ctiweb.co.jp\/con\/wp-content\/uploads\/2025\/01\/20250130-073814.jpg 737w, https:\/\/ctiweb.co.jp\/con\/wp-content\/uploads\/2025\/01\/20250130-073814-300x188.jpg 300w\" sizes=\"(max-width: 372px) 85vw, 372px\" \/><figcaption>\u56f3 1\u3000\u5404\u7a2e\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u6280\u8853\u306e\u6027\u80fd\u6307\u6570<\/figcaption><\/figure><\/div>\n\n\n<p><span style=\"color: #800000\"><strong>\u7814\u7a76\u6210\u679c<\/strong><\/span> <br \/>\u3000\u672c\u7814\u7a76\u3067\u306f\u3001\u6771\u4eac\u79d1\u5b66\u2f24\u5b66\u5185\u306b\u8a2d\u7acb\u3057\u305f\u6771\u4eac\u5fdc\u5316\u5de5\u696d\u672a\u6765\u5275\u9020\u5354\u50cd\u7814\u7a76\u62e0\u70b9\u306b\u304a\u3044\u3066\u3001\u30b7\u30ea\u30b3\u30f3\u30d5\u30a9\u30c8\u30cb\u30af\u30b9\u30d7\u30ed\u30bb\u30b9\u306b\u5408\u308f\u305b\u305fNIL\u7528\u306e\u5149\u786c\u5316\u6027\u6a39\u8102\u306e\u958b\u767a\u3092\u884c\u3046\u3068\u3068\u3082\u306b\u3001SmartNIL\u00ae\u6280\u8853\u306b\u57fa\u3065\u3044\u305f\u30ed\u30fc\u30eb\u30aa\u30f3\u30d7\u30ed\u30bb\u30b9\u306e\u6700\u9069\u5316\u3092\u884c\u3063\u305f\u3002\u3053\u308c\u306b\u3088\u308a\u3001\u958b\u767a\u3057\u305f\u30d7\u30ed\u30bb\u30b9\u3092\u7528\u3044\u3066\u4f5c\u88fd\u3057\u305f\u30b7\u30ea\u30b3\u30f3\u5c0e\u6ce2\u8def\u3067\u306f\u3001\u5f93\u6765\u306e90nm CMOS\u30d7\u30ed\u30bb\u30b9\u30e9\u30a4\u30f3\u3084\u96fb\u5b50\u7dda\u63cf\u753b\u3092\u7528\u3044\u3066\u4f5c\u3089\u308c\u305f\u5149\u5c0e\u6ce2\u8def\u3068\u540c\u7a0b\u5ea6\u306e\u6027\u80fd\u3092\u5f97\u308b\u3053\u3068\u306b\u6210\u529f\u3057\u305f\u3002<br \/><br \/><span style=\"color: #800000\"><strong>\u6210\u679c1\uff1a\u5149\u786c\u5316\u6027\u6a39\u8102\u306e\u958b\u767a<\/strong><\/span><br \/>\u3000\u4eca\u56de\u958b\u767a\u3057\u305f\u3001\u30b7\u30ea\u30b3\u30f3\u30d5\u30a9\u30c8\u30cb\u30af\u30b9\u30d7\u30ed\u30bb\u30b9\u306b\u9069\u3057\u305f\u5149\u786c\u5316\u6027\u6a39\u8102\uff08\u56f32\uff09\u306f\u3001UVNIL\u306e\u6a19\u6e96\u4ed5\u69d8\uff08\u7528\u8a9e7\uff09\u306b\u52a0\u3048\u3066\u3001\u30b7\u30ea\u30b3\u30f3\u30d5\u30a9\u30c8\u30cb\u30af\u30b9\u30d7\u30ed\u30bb\u30b9\u306b\u5fc5\u9808\u3068\u306a\u308b\u4ee5\u4e0b3\u3064\u306e\u7279\u5fb4\u3092\u6709\u3057\u3066\u3044\u308b\u3002<br \/>\uff081\uff09SF6-C4F8\u6df7\u5408\u30ac\u30b9\u306b\u3088\u308b\u30a8\u30c3\u30c1\u30f3\u30b0\u8010\u6027 <br \/>\u3000\u6a19\u6e96\u7684\u306a\u30b7\u30ea\u30b3\u30f3\u30d5\u30a9\u30c8\u30cb\u30af\u30b9\u30d7\u30ed\u30bb\u30b9\u3067\u306f\u3001\u30b7\u30ea\u30b3\u30f3\u5c0e\u6ce2\u8def\u69cb\u9020\u3092\u5f62\u6210\u3059\u308b\u305f\u3081\u306b\u3001SF6-C4F8\u6df7\u5408\u30ac\u30b9\u306b\u3088\u308b\u64ec\u4f3c\u7684\u306a\u30dc\u30c3\u30b7\u30e5\u30d7\u30ed\u30bb\u30b9\u3092\u7528\u3044\u3066\u3001\u819c\u539a200\uff5e300nm\u306e\u30b7\u30ea\u30b3\u30f3\u5c64\u3092\u524a\u308a\u304d\u308b\u3002\u305d\u306e\u305f\u3081\u3001\u3053\u306e\u30d7\u30ed\u30bb\u30b9\u3067\u7528\u3044\u308b\u5149\u786c\u5316\u6027\u6a39\u8102\u306b\u306f\u3001SF6\u30d7\u30e9\u30ba\u30de\u306b\u5bfe\u3059\u308b\u9ad8\u3044\u30a8\u30c3\u30c1\u30f3\u30b0\u8010\u6027\u304c\u8981\u6c42\u3055\u308c\u308b\u3002\u4f75\u305b\u3066\u3001SF6-C4F8\u6df7\u5408\u30ac\u30b9\u306b\u3088\u308b\u5909\u8cea\u6027\u3082\u6975\u529b\u6291\u3048\u308b\u3053\u3068\u304c\u6c42\u3081\u3089\u308c\u308b\u3002<br \/>\uff082\uff09O2\u30a2\u30c3\u30b7\u30f3\u30b0\u306b\u3088\u308b\u9664\u53bb\u6027 <br \/>\u3000\u4e00\u822c\u7684\u306aUV-NIL\u3067\u7528\u3044\u3089\u308c\u308b\u5149\u786c\u5316\u6027\u6a39\u8102\u306f\u3001\u4e3b\u306b\u30d5\u30c3\u9178\u6eb6\u6db2\u51e6\u7406\u306b\u3088\u308a\u9664\u53bb\u3067\u304d\u308b\u3088\u3046\u30c7\u30b6\u30a4\u30f3\u3055\u308c\u3066\u3044\u308b\u3002\u3057\u304b\u3057\u30b7\u30ea\u30b3\u30f3\u30d5\u30a9\u30c8\u30cb\u30af\u30b9\u3067\u306f\u3001\u4e0b\u90e8\u30af\u30e9\u30c3\u30c9\u6750\u3068\u3057\u3066SiO2\u3092\u7528\u3044\u3066\u3044\u308b\u3053\u3068\u304b\u3089\u3001\u30a8\u30c3\u30c1\u30f3\u30b0\u5f8c\u306e\u9664\u53bb\u30d7\u30ed\u30bb\u30b9\u3068\u3057\u3066\u30d5\u30c3\u9178\u6eb6\u6db2\u51e6\u7406\u306f\u9069\u5f53\u3067\u306f\u306a\u3044\u3002\u305d\u306e\u305f\u3081\u3001\u6709\u6a5f\u6eb6\u5264\u51e6\u7406\u3082\u3057\u304f\u306fO2\u30d7\u30e9\u30ba\u30de\u30a2\u30c3\u30b7\u30f3\u30b0\u3067\u9664\u53bb\u3067\u304d\u308b\u3053\u3068\u304c\u5fc5\u9808\u3068\u306a\u308b\u3002<br \/>\uff083\uff09\u30ef\u30fc\u30ad\u30f3\u30b0\u30b9\u30bf\u30f3\u30d7\u5264\u3068\u306e\u89aa\u548c\u6027 <br \/>\u3000\u5149\u786c\u5316\u6027\u6a39\u8102\u306b\u306f\u3001\u30b9\u30bf\u30f3\u30d7\u30e2\u30fc\u30eb\u30c9\u8868\u9762\u304b\u3089\u306e\u9069\u5207\u306a\u96e2\u578b\u304c\u53ef\u80fd\u306a\u30c7\u30b6\u30a4\u30f3\u304c\u5fc5\u9808\u3002\u4f75\u305b\u3066\u3001NIL\u30d7\u30ed\u30bb\u30b9\u6642\u306b\u5747\u4e00\u306bUV\u7167\u5c04\u3092\u884c\u3046\u76ee\u7684\u304b\u3089\u3001\u5149\u786c\u5316\u6027\u6a39\u8102\u306e\u5c48\u6298\u7387\u306f\u30b9\u30bf\u30f3\u30d7\u30e2\u30fc\u30eb\u30c9\u306e\u5c48\u6298\u7387\u3068\u8fd1\u3044\u3053\u3068\u304c\u671b\u307e\u3057\u3044\u3002\u4eca\u56de\u306f\u3001EVG\u306e\u30ca\u30ce\u30a4\u30f3\u30d7\u30ea\u30f3\u30c8\u88c5\u7f6e\u3092\u30d9\u30fc\u30b9\u3068\u3057\u3066\u304a\u308a\u3001\u30b9\u30bf\u30f3\u30d7\u5264\u3068\u3057\u3066EVG NIL UV\/AS5\u3092\u7528\u3044\u3066\u3044\u308b\u3002<\/p>\n\n\n<div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full\"><img loading=\"lazy\" width=\"866\" height=\"220\" src=\"https:\/\/ctiweb.co.jp\/con\/wp-content\/uploads\/2025\/01\/20250130-074022.jpg\" alt=\"\" class=\"wp-image-15332\" srcset=\"https:\/\/ctiweb.co.jp\/con\/wp-content\/uploads\/2025\/01\/20250130-074022.jpg 866w, https:\/\/ctiweb.co.jp\/con\/wp-content\/uploads\/2025\/01\/20250130-074022-300x76.jpg 300w, https:\/\/ctiweb.co.jp\/con\/wp-content\/uploads\/2025\/01\/20250130-074022-768x195.jpg 768w\" sizes=\"(max-width: 709px) 85vw, (max-width: 909px) 67vw, (max-width: 1362px) 62vw, 840px\" \/><figcaption>\u56f32\u3000\u958b\u767a\u3057\u305f\u30b7\u30ea\u30b3\u30f3\u30d5\u30a9\u30c8\u30cb\u30af\u30b9\u30d7\u30ed\u30bb\u30b9\u306b\u9069\u3057\u305f\u5149\u786c\u5316\u6027\u6a39\u8102\uff08\u5404\u6210\u5206\u306e\u6bd4\u7387\u306f\u3001SF6-C4F8\u6df7\u5408\u30ac\u30b9\u306b\u3088\u308b\u30c9\u30e9\u30a4\u30a8\u30c3\u30c1\u30f3\u30b0\u6761\u4ef6\u306b\u5bfe\u3057\u3066\u6700\u9069\u5316\u3057\u3066\u3044\u308b\uff09<\/figcaption><\/figure><\/div>\n\n\n<p><span style=\"color: #800000\"><strong>\u6210\u679c2\uff1aUV-NIL\u3092\u7528\u3044\u305f\u30b7\u30ea\u30b3\u30f3\u30d5\u30a9\u30c8\u30cb\u30af\u30b9\u30d7\u30ed\u30bb\u30b9\u306e\u78ba\u7acb<\/strong><\/span><br \/>\u3000\u4eca\u56de\u958b\u767a\u3057\u305f\u30b7\u30ea\u30b3\u30f3\u30d5\u30a9\u30c8\u30cb\u30af\u30b9\u30d7\u30ed\u30bb\u30b9\u306f\u300cNI \u5de5\u7a0b\u300d\uff08\u56f33a\uff09\u3068\u300c\u5149\u56de\u8def\u5f62\u6210\u5de5\u7a0b\u300d\uff08\u56f33b\uff09\u306e2\u3064\u306e\u30d7\u30ed\u30bb\u30b9\u30d5\u30ed\u30fc\u306b\u5206\u304b\u308c\u3066\u3044\u308b\u3002<br \/><br \/><span style=\"color: #800000\"><strong>NIL\u5de5\u7a0b<\/strong><\/span> <br \/>\u5de5\u7a0bA\uff1a\u5149\u56de\u8def\u30d1\u30bf\u30fc\u30f3\u304c\u5f62\u6210\u3055\u308c\u305f\u30b7\u30ea\u30b3\u30f3\u30de\u30b9\u30bf\u30fc\u30b9\u30bf\u30f3\u30d7\u306b\u3001\u96e2\u578b\u5264\u304a\u3088\u3073\u30ef\u30fc\u30ad\u30f3\u30b0\u30b9\u30bf\u30f3\u30d7\u5264\uff08EVG NIL UV\/AS5\uff09\u3092\u5857\u5e03\uff08\u56f33a\u306e1, 2\uff09 <br \/>\u5de5\u7a0bB\uff1a\u4e0a\u90e8\u304b\u3089\u30dd\u30ea\u30a8\u30c1\u30ec\u30f3\u30c6\u30ec\u30d5\u30bf\u30e9\u30fc\u30c8\u306e\u30d5\u30ec\u30ad\u30b7\u30d6\u30eb\u30d0\u30c3\u30af\u30d7\u30ec\u30fc\u30f3\u3092\u62bc\u3057\u5f53\u3066\u3066\u3001\u7d2b\u5916\u7dda\u786c\u5316\u3055\u305b\u305f\u5f8c\u306b\u96e2\u578b\uff08\u56f33a\u306e3, 4\uff09 <br \/>\u5de5\u7a0bC\uff1aSOI\uff08Silicon on Insulator\uff09\u30a6\u30a7\u30cf\u306b\u5bc6\u7740\u6750\u304a\u3088\u3073\u958b\u767a\u3057\u305f\u5149\u786c\u5316\u6027\u6a39\u8102\u3092\u30b9\u30d4\u30f3\u30b3\u30fc\u30c8\u3057\u305f\u5f8c\u3001\u5148\u307b\u3069\u4f5c\u88fd\u3057\u305f\u30ef\u30fc\u30ad\u30f3\u30b0\u30b9\u30bf\u30f3\u30d7\u3092\u62bc\u5370\uff08\u56f33a\u306e5, 6\uff09<br \/>\u5de5\u7a0bD\uff1aUV\u7167\u5c04\u3092\u884c\u3063\u305f\u5f8c\u3001\u30ef\u30fc\u30ad\u30f3\u30b0\u30b9\u30bf\u30f3\u30d7\u3092\u8131\u96e2\u3055\u305b\u3001NIL\u306b\u3088\u3063\u3066\u5149\u56de\u8def\u30d1\u30bf\u30fc\u30f3\u3092\u5f62\u6210\uff08\u56f33a\u306e7, 8\uff09<br \/>\u3000\u672c\u30d7\u30ed\u30bb\u30b9\u3067\u306f\u3001\u5149\u786c\u5316\u6027\u6a39\u8102\u306e\u819c\u539a\u304a\u3088\u3073\u5145\u586b\u7387\u3001\u56de\u8def\u30ec\u30a4\u30a2\u30a6\u30c8\u306a\u3069\u3092\u6700\u9069\u5316\u3059\u308b\u3053\u3068\u3067\u3001\u819c\u539a20nm\u4ee5\u4e0b\u306e\u6b8b\u819c\u5236\u5fa1\u304c\u53ef\u80fd\uff08\u56f34a\uff09\u3002<br \/><br \/><span style=\"color: #800000\"><strong>\u5149\u56de\u8def\u5f62\u6210\u5de5\u7a0b<\/strong><\/span> <br \/>\u5de5\u7a0bA\uff1aSF6-C4F8\u6df7\u5408\u30ac\u30b9\u306b\u3088\u308b\u30c9\u30e9\u30a4\u30a8\u30c3\u30c1\u30f3\u30b0\u306b\u3088\u308a\u5149\u786c\u5316\u6027\u6a39\u8102\u306e\u6b8b\u819c\u9664\u53bb\uff08\u56f33b\u306e1\uff09<br \/>\u5de5\u7a0bB\uff1a\u9023\u7d9a\u3057\u3066SF6-C4F8\u6df7\u5408\u30ac\u30b9\u306b\u3088\u308b\u30c9\u30e9\u30a4\u30a8\u30c3\u30c1\u30f3\u30b0\u306b\u3088\u308a\u3001\u30b7\u30ea\u30b3\u30f3\u5c64\u3092\u30a8\u30c3\u30c1\u30f3\u30b0\uff08\u56f33b\u306e2\uff09<br \/>\u5de5\u7a0bC\uff1aO2\u30a2\u30c3\u30b7\u30f3\u30b0\u51e6\u7406\u306b\u3088\u308a\u3001\u30de\u30b9\u30af\u3068\u3057\u3066\u7528\u3044\u305f\u5149\u786c\u5316\u6027\u6a39\u8102\u3092\u9664\u53bb\uff08\u56f33b\u306e3\uff09<br \/>\u5de5\u7a0bD\uff1a\u30d7\u30e9\u30ba\u30deCVD\u306b\u3088\u308a\u3001\u4e0a\u90e8\u30af\u30e9\u30c3\u30c9\u3068\u3057\u3066SiO2\u3092\u5806\u7a4d\uff08\u56f33b\u306e4\uff09<br \/>\u3000NIL\u306b\u3088\u308b\u30d1\u30bf\u30fc\u30f3\u5f62\u6210\u5f8c\u306f\u3001\u5149\u786c\u5316\u6027\u6a39\u8102\u306e\u9664\u53bb\u306bO2\u30d7\u30e9\u30ba\u30de\u30a2\u30c3\u30b7\u30f3\u30b0\u3092\u7528\u3044\u308b\u70b9\u3092\u9664\u3044\u3066\u3001\u6a19\u6e96\u7684\u306a\u30b7\u30ea\u30b3\u30f3\u30d5\u30a9\u30c8\u30cb\u30af\u30b9\u30d7\u30ed\u30bb\u30b9\u3068\u540c\u4e00\u306e\u624b\u9806\u3002\u30a8\u30c3\u30c1\u30f3\u30b0\u5de5\u7a0b\u3067\u306f\u3001\u5341\u5206\u306a\u5782\u76f4\u6027\u3092\u7dad\u6301\u3057\u305f\u307e\u307e\u3001\u6a19\u6e96\u7684\u306a\u30b7\u30ea\u30b3\u30f3\u5c0e\u6ce2\u8def\u30d1\u30bf\u30fc\u30f3\u3092\u5f62\u6210\u3067\u304d\u308b\u3053\u3068\u3092\u78ba\u8a8d\u3057\u305f\uff08\u56f34b\uff09\u3002<\/p>\n\n\n<div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full\"><img loading=\"lazy\" width=\"866\" height=\"593\" src=\"https:\/\/ctiweb.co.jp\/con\/wp-content\/uploads\/2025\/01\/20250130-074144.jpg\" alt=\"\" class=\"wp-image-15333\" srcset=\"https:\/\/ctiweb.co.jp\/con\/wp-content\/uploads\/2025\/01\/20250130-074144.jpg 866w, https:\/\/ctiweb.co.jp\/con\/wp-content\/uploads\/2025\/01\/20250130-074144-300x205.jpg 300w, https:\/\/ctiweb.co.jp\/con\/wp-content\/uploads\/2025\/01\/20250130-074144-768x526.jpg 768w\" sizes=\"(max-width: 709px) 85vw, (max-width: 909px) 67vw, (max-width: 1362px) 62vw, 840px\" \/><figcaption>\u56f33\u3000UV-NIL\u306b\u3088\u308b\u30b7\u30ea\u30b3\u30f3\u30d5\u30a9\u30c8\u30cb\u30af\u30b9\u30d7\u30ed\u30bb\u30b9\u306e\uff08a\uff09NIL\u5de5\u7a0b\u3068\uff08b\uff09\u5149\u56de\u8def\u5f62\u6210\u5de5\u7a0b<\/figcaption><\/figure><\/div>\n\n<div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full is-resized\"><img loading=\"lazy\" src=\"https:\/\/ctiweb.co.jp\/con\/wp-content\/uploads\/2025\/01\/20250130-074259.jpg\" alt=\"\" class=\"wp-image-15334\" width=\"324\" height=\"286\" srcset=\"https:\/\/ctiweb.co.jp\/con\/wp-content\/uploads\/2025\/01\/20250130-074259.jpg 415w, https:\/\/ctiweb.co.jp\/con\/wp-content\/uploads\/2025\/01\/20250130-074259-300x265.jpg 300w\" sizes=\"(max-width: 324px) 85vw, 324px\" \/><figcaption>\u56f34\u3000\u5404\u5de5\u7a0b\u5f8c\u306e\u8d70\u67fb\u96fb\u5b50\u9855\u5fae\u93e1\u753b\u50cf\uff08a\uff09NIL\u306b\u3088\u308b\u30d1\u30bf\u30fc\u30f3\u5f62\u6210\u5f8c\u3001\uff08b\uff09SF6-C4F8\u6df7\u5408\u30ac\u30b9\u306b\u3088\u308b\u30a8\u30c3\u30c1\u30f3\u30b0\u5f8c\u3001\uff08c\uff09O2\u30d7\u30e9\u30ba\u30de\u30a2\u30c3\u30b7\u30f3\u30b0\u5f8c<\/figcaption><\/figure><\/div>\n\n\n<p><span style=\"color: #800000\"><strong>\u6210\u679c3\uff1a\u958b\u767a\u30d7\u30ed\u30bb\u30b9\u3067\u4f5c\u88fd\u3057\u305f\u30b7\u30ea\u30b3\u30f3\u5c0e\u6ce2\u8def\u306e\u4f1d\u642c\u7279\u6027<\/strong><\/span><br \/>\u3000\u4eca\u56de\u958b\u767a\u3057\u305f\u30d7\u30ed\u30bb\u30b9\u3067\u4f5c\u88fd\u3057\u305f\u30b7\u30ea\u30b3\u30f3\u5c0e\u6ce2\u8def\u306e\u4f1d\u642c\u7279\u6027\u3092\u8a55\u4fa1\u3057\u305f\u7d50\u679c\u3001\u6ce2\u2ed11550nm\u306eTE\u30e2\u30fc\u30c9\u5149\u306b\u5bfe\u3059\u308b\u5358\u4f4d\u2ed1\u3055\u5f53\u305f\u308a\u306e\u4f1d\u642c\u640d\u5931\u306f1.6 dB\/cm\u7a0b\u5ea6\u3068\u306a\u3063\u305f\uff08\u56f35\uff09\u3002\u3053\u308c\u306f\u3001\u5f93\u6765\u306e\u30c9\u30e9\u30a4ArF\u304c\u7528\u3044\u3089\u308c\u308b90nm CMOS\u8a66\u4f5c\u30e9\u30a4\u30f3\u3084\u96fb\u5b50\u7dda\u63cf\u753b\u3092\u7528\u3044\u3066\u4f5c\u3089\u308c\u305f\u30b7\u30ea\u30b3\u30f3\u5c0e\u6ce2\u8def\u3068\u905c\u8272\u306a\u3044\u5024\u3067\u3042\u308a\u3001NIL\u306b\u3088\u3063\u3066\u5341\u5206\u306a\u6027\u80fd\u3092\u6301\u3064\u5149\u56de\u8def\u304c\u5f62\u6210\u53ef\u80fd\u3067\u3042\u308b\u3053\u3068\u3092\u793a\u3057\u3066\u3044\u308b\u3002<\/p>\n\n\n<div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full is-resized\"><img loading=\"lazy\" src=\"https:\/\/ctiweb.co.jp\/con\/wp-content\/uploads\/2025\/01\/20250130-074426.jpg\" alt=\"\" class=\"wp-image-15335\" width=\"369\" height=\"265\" srcset=\"https:\/\/ctiweb.co.jp\/con\/wp-content\/uploads\/2025\/01\/20250130-074426.jpg 698w, https:\/\/ctiweb.co.jp\/con\/wp-content\/uploads\/2025\/01\/20250130-074426-300x216.jpg 300w\" sizes=\"(max-width: 369px) 85vw, 369px\" \/><figcaption>\u56f35\u3000\u958b\u767a\u30d7\u30ed\u30bb\u30b9\u3067\u4f5c\u88fd\u3057\u305f\u30b7\u30ea\u30b3\u30f3\u5c0e\u6ce2\u8def\u306e\u4f1d\u642c\u7279\u6027<\/figcaption><\/figure><\/div>\n\n\n<p><strong><span style=\"color: #800000\">\u793e\u4f1a\u7684\u30a4\u30f3\u30d1\u30af\u30c8<\/span><\/strong> <br \/>\u3000\u30b7\u30ea\u30b3\u30f3\u30d5\u30a9\u30c8\u30cb\u30af\u30b9\u306f\u3001\u9ad8\u901f\u3001\u9ad8\u5e2f\u57df\u3001\u4f4e\u30a8\u30cd\u30eb\u30ae\u30fc\u3067\u3042\u308b\u3053\u3068\u304b\u3089\u3001\u5c06\u6765\u306e\u30c7\u30fc\u30bf\u30bb\u30f3\u30bf\u30fc\u3068\u30c7\u30fc\u30bf\u4f1d\u9001\u306e\u30dc\u30c8\u30eb\u30cd\u30c3\u30af\u3092\u89e3\u6c7a\u3059\u308b\u305f\u3081\u306e\u91cd\u8981\u306a\u6280\u8853\u306e1\u3064\u3068\u898b\u306a\u3055\u308c\u3066\u3044\u308b\u3002\u672c\u6280\u8853\u306f\u3001\u30b7\u30ea\u30b3\u30f3\u30d5\u30a9\u30c8\u30cb\u30af\u30b9\u95a2\u9023\u306e\u30c7\u30d0\u30a4\u30b9\u958b\u767a\u3068\u7523\u696d\u5fdc\u7528\u3092\u63a8\u9032\u3059\u308b\u4e0a\u3067\u306e\u4e00\u52a9\u3068\u306a\u308a\u3001\u5149\u96fb\u878d\u5408\u3082\u898b\u636e\u3048\u305f\u30b7\u30ea\u30b3\u30f3\u30d5\u30a9\u30c8\u30cb\u30af\u30b9\u5206\u91ce\u62e1\u2f24\u306b\u8ca2\u732e\u3067\u304d\u308b\u3068\u8003\u3048\u3089\u308c\u308b\u3002\u6771\u4eac\u79d1\u5b66\u2f24\u5b66\u5185\u306b\u8a2d\u7acb\u3057\u305f\u6771\u4eac\u5fdc\u5316\u5de5\u696d\u672a\u6765\u5275\u9020\u5354\u50cd\u7814\u7a76\u62e0\u70b9\u306b\u304a\u3044\u3066\u3001\u672c\u5b66\u306e\u30df\u30c3\u30b7\u30e7\u30f3\u3067\u3042\u308b\u300c\u79d1\u5b66\u306e\u9032\u6b69\u300d\u3068\u300c\u4eba\u3005\u306e\u5e78\u305b\u300d\u3068\u3092\u63a2\u6c42\u3057\u3001\u793e\u4f1a\u3068\u3068\u3082\u306b\u65b0\u305f\u306a\u4fa1\u5024\u3092\u5275\u9020\u3057\u7d9a\u3051\u308b\u3002<br \/><br \/><strong><span style=\"color: #800000\">\u4eca\u5f8c\u306e\u5c55\u958b<\/span><\/strong> <br \/>\u3000EUV\u306a\u3069\u306e\u8d85\u9ad8\u89e3\u50cf\u9732\u5149\u6280\u8853\u3092\u5fc5\u8981\u3068\u3059\u308b\u5148\u7aef\u96fb\u5b50\u30c7\u30d0\u30a4\u30b9\u30fb\u96c6\u7a4d\u56de\u8def\u5206\u91ce\u3068\u6bd4\u8f03\u3059\u308b\u3068\u3001\u30d5\u30a9\u30c8\u30cb\u30af\u30b9\u5206\u91ce\u3067\u306f\u9732\u5149\u30d7\u30ed\u30bb\u30b9\u306b\u305d\u308c\u307b\u3069\u9ad8\u3044\u89e3\u50cf\u5ea6\u3092\u5fc5\u8981\u3068\u3057\u306a\u3044\u305f\u3081\u3001NIL 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\/>\u30fb\u6771\u4eac\u5fdc\u5316\u5de5\u696d\u672a\u6765\u5275\u9020\u5354\u50cd\u7814\u7a76\u62e0\u70b9 <br \/>\u3000\u7814\u7a76\u8ab2\u984c\uff1a\u300c\u534a\u5c0e\u4f53\u88fd\u9020\u5de5\u7a0b\u306b\u7528\u3044\u308b\u6750\u6599\u3084\u5316\u5b66\u85ac\u54c1\u3001\u52a0\u5de5\u6280\u8853\u3092\u57fa\u8ef8\u3068\u3057\u305f\u3001\u30d5\u30a9\u30c8\u30cb\u30af\u30b9\u30c7\u30d0\u30a4\u30b9\u3084\u30e9\u30a4\u30d5\u30b5\u30a4\u30a8\u30f3\u30b9\u3001\u30ab\u30fc\u30dc\u30f3\u30cb\u30e5\u30fc\u30c8\u30e9\u30eb\u306b\u95a2\u3059\u308b\u7814\u7a76\u300d<br \/>\u3000\u62e0\u70b9\u2ed1\uff1a\u2ec4\u2f2d\u4f38\u5f66 \u6771\u4eac\u79d1\u5b66\u2f24\u5b66 \u6559\u6388 <br \/>\u3000\u526f\u62e0\u70b9\u2ed1\uff1a\u9cf4\u6d77\u88d5\u4ecb \u6771\u4eac\u5fdc\u5316\u5de5\u696d \u65b0\u4e8b\u696d\u958b\u767a\u672c\u90e8 \u672c\u90e8\u2ed1 <br \/>\u30fb\u6771\u4eac\u5de5\u696d\u2f24\u5b66\u300c\u6771\u5de5\u2f24\u306e\u661f\u300d\u7279\u5225\u8cde\uff08STAR\uff09<br \/>\u3000\u7814\u7a76\u4ee3\u8868\u8005\uff1a\u96e8\u5bae\u667a\u5b8f \u6771\u4eac\u79d1\u5b66\u2f24\u5b66 \u51c6\u6559\u6388 <br \/>\uff1c\u7528\u8a9e\u8aac\u660e\uff1e<br \/>\uff081\uff09SmartNIL\u00ae\u6280\u8853\uff1a\u900f\u660e\u306a\u30d5\u30ec\u30ad\u30b7\u30d6\u30eb\u30dd\u30ea\u30de\u30fc\u306e\u30ef\u30fc\u30ad\u30f3\u30b0\u30b9\u30bf\u30f3\u30d7\u3092\u4f7f\u7528\u3057\u3066\u3001\u30a6\u30a7\u30cf\u30ec\u30d9\u30eb\u3067UV\u30ca\u30ce\u30a4\u30f3\u30d7\u30ea\u30f3\u30c8\u3092\u884c\u3046\u6280\u8853\u3002\u534a\u5c0e\u4f53\u88c5\u7f6e\u30e1\u30fc\u30ab\u30fc\u3067\u3042\u308bEV Group\u793e\u304c\u958b\u767a\u3057\u305f\u3002<br \/>\uff082\uff09CMOS\u30d7\u30ed\u30bb\u30b9\u30e9\u30a4\u30f3\uff1a\u30b7\u30ea\u30b3\u30f3LSI\u306e\u8a66\u4f5c\u30e9\u30a4\u30f3\u3092\u4f7f\u3063\u3066\u5149\u96c6\u7a4d\u56de\u8def\u3092\u4f5c\u308b\u6280\u8853\u3002KrF\u30a8\u30ad\u30b7\u30de\u30ec\u30fc\u30b6\u30fc\u5149\uff08\u6ce2\u2ed1248nm\uff09\u3001ArF\u30a8\u30ad\u30b7\u30de\u30ec\u30fc\u30b6\u30fc\u5149\uff08\u6ce2\u2ed1193nm\uff09\u3092\u7528\u3044\u305f\u9732\u5149\u3092\u57fa\u672c\u3068\u3059\u308b\u300290nm\u30e9\u30a4\u30f3\u3067\u306f\u3001ArF\u3092\u5c0e\u6ce2\u8def\u4f5c\u88fd\u306b\u4e3b\u306b\u7528\u3044\u3089\u308c\u308b\u3002<br \/>\uff083\uff09\u96fb\u5b50\u7dda\u63cf\u753b\uff1a\u96fb\u5b50\u7dda\u306b\u611f\u5149\u3059\u308b\u6a39\u8102\u8584\u819c\u306b\u5fae\u7d30\u30d1\u30bf\u30fc\u30f3\u3092\u63cf\u753b\u3059\u308b\u6280\u8853\u3002\u4e3b\u306b\u3001\u57fa\u677f\u306b\u76f4\u63a5\u63cf\u753b\u3059\u308b\u3053\u3068\u306b\u3088\u308b\u5c11\u91cf\u591a\u54c1\u7a2e\u306e\u8a66\u4f5c\u54c1\u306e\u958b\u767a\u3084\u3001\u534a\u5c0e\u4f53\u30c1\u30c3\u30d7\u306e\u30ec\u30c1\u30af\u30eb\u306e\u4f5c\u88fd\u306b\u7528\u3044\u3089\u308c\u308b\u3002<br \/>\uff084\uff09\u30bd\u30d5\u30c8UV-NIL\uff1a\u30dd\u30ea\u30de\u30fc\u3067\u5f62\u6210\u3055\u308c\u305f\u67d4\u8edf\u306a\u900f\u660e\u30b9\u30bf\u30f3\u30d7\u3092\u4f7f\u7528\u3057\u3066\u30ca\u30ce\u30a4\u30f3\u30d7\u30ea\u30f3\u30c8\u3092\u884c\u3046\u6280\u8853\u3002<br \/>\uff085\uff09DFB\uff08\u5206\u5e03\u5e30\u9084\u578b\uff09\u30ec\u30fc\u30b6\u30fc\uff1a\u534a\u5c0e\u4f53\u30ec\u30fc\u30b6\u30fc\u306e\u4e00\u7a2e\u3067\u3001\u30ec\u30fc\u30b6\u30fc\u4e2d\u306b\u8a2d\u3051\u305f\u5468\u671f\u7684\u69cb\u9020\u306b\u3088\u3063\u3066\u4e0d\u8981\u306a\u6ce2\u2ed1\u306e\u767a\u632f\u3092\u6291\u5727\u3057\u3001\u5358\u4e00\u6ce2\u2ed1\u306e\u5149\u51fa\u529b\u3092\u5b9f\u73fe\u3059\u308b\u3002\u901a\u4fe1\u7528\u306e\u534a\u5c0e\u4f53\u30ec\u30fc\u30b6\u30fc\u306e\u591a\u304f\u306b\u7528\u3044\u3089\u308c\u308b\u3002<br \/>\uff086\uff09\u30b0\u30ec\u30fc\u30c6\u30a3\u30f3\u30b0\u30ab\u30d7\u30e9\uff1a\u5149\u30d5\u30a1\u30a4\u30d0\u3068\u30b7\u30ea\u30b3\u30f3\u57fa\u677f\u4e0a\u306eSOI\u5c0e\u6ce2\u8def\u3092\u52b9\u7387\u7684\u306b\u7d50\u5408\u3059\u308b\u305f\u3081\u306e\u30c7\u30d0\u30a4\u30b9\u3002\u57fa\u677f\u5c0e\u6ce2\u8def\u306b\u56de\u6298\u683c\u5b50\u72b6\u306e\u9069\u5207\u306a\u5468\u671f\u69cb\u9020\u3092\u4e0e\u3048\u308b\u3053\u3068\u306b\u3088\u3063\u3066\u3001\u5149\u30d5\u30a1\u30a4\u30d0\u304b\u3089\u5165\u5c04\u3057\u305f\u5149\u3092\u57fa\u5c0e\u6ce2\u8def\u677f\u5185\u306b\u56de\u6298\u3055\u305b\u3001\u5149\u3092\u7d50\u5408\u3059\u308b\u3002<br \/>\uff087\uff09UV-NIL\u306e\u6a19\u6e96\u4ed5\u69d8\uff1a\u53cd\u5fdc\u6027\u30a4\u30aa\u30f3\u30a8\u30c3\u30c1\u30f3\u30b0\u8010\u6027\u3092\u4ed8\u4e0e\u3059\u308b\u305f\u3081\u306b\u30b7\u30ed\u30f3\u30ad\u30b5\u30f3\u3092\u542b\u6709\u3057\u305f\u91cd\u5408\u6027\u30e2\u30ce\u30de\u30fc\u3001\u786c\u5316\u6a39\u8102\u306e\u529b\u5b66\u5f37\u5ea6\u3084\u71b1\u8010\u6027\u3092\u4ed8\u4e0e\u3059\u308b\u67b6\u6a4b\u5264\u5206\u5b50\u3001\u5149\u91cd\u5408\u958b\u59cb\u5264\u3001\u57fa\u677f\u3078\u306e\u5bc6\u7740\u3092\u4fc3\u9032\u3059\u308b\u6dfb\u52a0\u5264\u3084\u30e2\u30fc\u30eb\u30c9\u8868\u9762\u304b\u3089\u306e\u96e2\u578b\u3092\u4fc3\u9032\u3059\u308b\u6dfb\u52a0\u5264\u306a\u3069\u3092\u542b\u3093\u3067\u3044\u308b\u3002 <br \/>\uff1c\u958b\u767a\u3057\u305f\u30ca\u30ce\u30a4\u30f3\u30d7\u30ea\u30f3\u30c8\u7528\u306e\u5149\u786c\u5316\u6027\u6a39\u8102\uff1e <br \/>\u3000\u6771\u4eac\u5fdc\u5316\u5de5\u696d\u682a\u5f0f\u4f1a\u793e\u304b\u3089\u30b5\u30f3\u30d7\u30eb\u54c1\u3068\u3057\u3066\u5916\u90e8\u306b\u63d0\u4f9b\u53ef\u80fd <br \/>\uff1c\u958b\u767a\u3057\u305f\u30b7\u30ea\u30b3\u30f3\u30d5\u30a9\u30c8\u30cb\u30af\u30b9\u306e\u30d7\u30ed\u30bb\u30b9\u30ec\u30b7\u30d4\uff1e <br \/>\u3000\u6771\u4eac\u79d1\u5b66\u2f24\u5b66\u304b\u3089\u30c7\u30fc\u30bf\u30b7\u30fc\u30c8\u3068\u3057\u3066\u5916\u90e8\u306b\u63d0\u4f9b\u53ef\u80fd <br \/>\uff1c\u5916\u90e8\u767a\u8868\uff1e<br \/>\u201cDevelopment of silicon photonics process using UV nanoimprinting,\u201d SPIE Photonics West 2025, Silicon Photonics XX 13371-42 (2025). <br \/><a href=\"https:\/\/spie.org\/conferences-and-exhibitions\/photonics-west\"><strong><span style=\"color: #0000ff\">https:\/\/spie.org\/conferences-and-exhibitions\/photonics-west<\/span><\/strong><\/a><br \/><a href=\"https:\/\/spie.org\/photonics-west\/presentation\/Development-of-silicon-photonicsprocess-using-UV-nanoimprinting\/13371-42\"><strong><span style=\"color: #0000ff\">https:\/\/spie.org\/photonics-west\/presentation\/Development-of-silicon-photonicsprocess-using-UV-nanoimprinting\/13371-42<\/span><\/strong><\/a><\/p>\n","protected":false},"excerpt":{"rendered":"<p>\u3010\u30b7\u30ea\u30b3\u30f3\u30d5\u30a9\u30c8\u30cb\u30af\u30b9\u534a\u5c0e\u4f53\u3011\u6771\u4eac\u79d1\u5b66\u2f24\u5b66\u3068\u6771\u4eac\u5fdc\u5316\u5de5\u696d\u3001UV\u30ca\u30ce\u30a4\u30f3\u30d7\u30ea\u30f3\u30c8\u3092\u7528\u3044\u305f\u30d7\u30ed\u30bb\u30b9\u958b\u767a<br \/>\n\uff1c\u30dd\u30a4\u30f3\u30c8\uff1e<br \/>\n\u25cb\u30b7\u30ea\u30b3\u30f3\u30d5\u30a9\u30c8\u30cb\u30af\u30b9\u30d7\u30ed\u30bb\u30b9\u306b\u9069\u3057\u305f\u30ca\u30ce\u30a4\u30f3\u30d7\u30ea\u30f3\u30c8\u7528\u306e\u5149\u786c\u5316\u6027\u6a39\u8102\u3092\u958b\u767a\u3002<br \/>\n\u25cbUV \u30ca\u30ce\u30a4\u30f3\u30d7\u30ea\u30f3\u30c8\u3092\u7528\u3044\u305f\u2f24\u9762\u7a4d\u30fb\u9ad8\u30b9\u30eb\u30fc\u30d7\u30c3\u30c8\u306e\u30b7\u30ea\u30b3\u30f3\u30d5\u30a9\u30c8\u30cb\u30af\u30b9\u30d7\u30ed\u30bb\u30b9\u3092\u78ba\u7acb\u3002<br \/>\n\u25cb\u96fb\u5b50\u7dda\u63cf\u753b\u306b\u3088\u308b\u5149\u5c0e\u6ce2\u8def\u3068\u5909\u308f\u3089\u306a\u3044\u7279\u6027\u3092\u6301\u3064\u30b7\u30ea\u30b3\u30f3\u5c0e\u6ce2\u8def\u306e\u4f5c\u88fd\u306b\u6210\u529f\u3002<\/p>\n<p>\u6982\u8981<br \/>\n\u3000\u6771\u4eac\u79d1\u5b66\u2f24\u5b66\uff08Science Tokyo\uff09 \u5de5\u5b66\u9662 \u96fb\u6c17\u96fb\u5b50\u7cfb\u306e\u96e8\u5bae\u667a\u5b8f\u51c6\u6559\u6388\u3001\u6c38\u677e\u5468\u5b66\u58eb\u8ab2\u7a0b\u5b66\u751f\u3001\u2ec4\u2f2d\u4f38\u5f66\u6559\u6388\u3089\u306f\u3001\u6771\u4eac\u5fdc\u5316\u5de5\u696d\u306e\u68ee\u8389\u7d17\u5b50\u6c0f\u3001\u85e4\u4e95\u606d\u6c0f\u3001\u6d45\u4e95\u9686\u5b8f\u6c0f\u3001\u5869\u7530 \u2f24\u6c0f\u3089\u3068\u5171\u540c\u3067\u3001UV\u30ca\u30ce\u30a4\u30f3\u30d7\u30ea\u30f3\u30c8\uff08UV-NIL\uff09\u3092\u7528\u3044\u305f\u30b7\u30ea\u30b3\u30f3\u30d5\u30a9\u30c8\u30cb\u30af\u30b9\u30d7\u30ed\u30bb\u30b9\u3092\u958b\u767a\u3057\u305f\u3002<br \/>\n\u3000\u30ca\u30ce\u30a4\u30f3\u30d7\u30ea\u30f3\u30c8\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\uff08NIL\uff09\u306f\u3001\u534a\u5c0e\u4f53\u306b\u304a\u3051\u308b\u6b21\u4e16\u4ee3\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u6280\u8853\u306e1\u3064\u3068\u3057\u3066\u671f\u5f85\u3055\u308c\u3066\u3044\u308b\u3002\u7279\u306bUV-NIL\u306f\u5b9f\u7528\u7684\u306a\u91cf\u7523\u6280\u8853\u3068\u3057\u3066\u5c0e\u5165\u5b9f\u7e3e\u304c\u3042\u308b\u3002<br \/>\n\u3000\u672c\u7814\u7a76\u3067\u306f\u3001\u30b7\u30ea\u30b3\u30f3\u30d5\u30a9\u30c8\u30cb\u30af\u30b9\u30d7\u30ed\u30bb\u30b9\u306b\u5408\u308f\u305b\u305fNIL\u7528\u306e\u5149\u786c\u5316\u6027\u6a39\u8102\u306e\u958b\u767a\u3092\u884c\u3063\u305f\u3002\u3055\u3089\u306b\u3001SmartNIL\u00ae\u6280\u8853\uff08\u7528\u8a9e1\uff09\u306b\u57fa\u3065\u3044\u305f\u30ed\u30fc\u30eb\u30aa\u30f3\u30d7\u30ed\u30bb\u30b9\u306e\u6700\u9069\u5316\u3092\u5b9f\u65bd\u3057\u3001\u5f93\u6765\u306e90nm CMOS\u30d7\u30ed\u30bb\u30b9\u30e9\u30a4\u30f3\uff08\u7528\u8a9e2\uff09\u3084\u96fb\u5b50\u7dda\u63cf\u753b\uff08\u7528\u8a9e3\uff09\u3092\u7528\u3044\u3066\u4f5c\u3089\u308c\u305f\u5149\u5c0e\u6ce2\u8def\u3068\u540c\u7a0b\u5ea6\u306e\u6027\u80fd\u3092\u5f97\u308b\u3053\u3068\u306b\u6210\u529f\u3057\u305f\u3002\u4eca\u56de\u958b\u767a\u3057\u305f\u30b7\u30ea\u30b3\u30f3\u30d5\u30a9\u30c8\u30cb\u30af\u30b9\u30d7\u30ed\u30bb\u30b9\u3067\u306f\u3001UV-NIL\u306e\u2f24\u9762\u7a4d\u8ee2\u5199\u6027\u3084\u9ad8\u30b9\u30eb\u30fc\u30d7\u30c3\u30c8\u6027\u3092\u2f24\u3044\u306b\u6d3b\u304b\u3059\u3053\u3068\u304c\u3067\u304d\u3001\u304b\u3064\u30b3\u30b9\u30c8\u306e\u89b3\u70b9\u304b\u3089\u3082\u512a\u4f4d\u6027\u304c\u3042\u308b\u3068\u8003\u3048\u3089\u308c\u308b\u3002<br \/>\n\u3000\u672c\u7814\u7a76\u306f\u3001\u6771\u4eac\u79d1\u5b66\u2f24\u5b66\u5185\u306b\u8a2d\u7acb\u3055\u308c\u305f\u6771\u4eac\u5fdc\u5316\u5de5\u696d\u672a\u6765\u5275\u9020\u5354\u50cd\u7814\u7a76\u62e0\u70b9\u306b\u304a\u3044\u3066\u884c\u308f\u308c\u305f\u3082\u306e\u3067\u3001\u958b\u767a\u3057\u305f\u30ca\u30ce\u30a4\u30f3\u30d7\u30ea\u30f3\u30c8\u7528\u306e\u5149\u786c\u5316\u6027\u6a39\u8102\u304a\u3088\u3073\u30d7\u30ed\u30bb\u30b9\u30ec\u30b7\u30d4\u306f\u5916\u90e8\u63d0\u4f9b\u304c\u53ef\u80fd\u3002\u4f75\u305b\u3066\u3001\u672c\u7814\u7a76\u6210\u679c\u306f\u30012025\u5e741\u670825\u301c30\u65e5\uff08\u73fe\u5730\u6642\u9593\uff09\u306b\u7c73\u56fd\u30b5\u30f3\u30d5\u30e9\u30f3\u30b7\u30b9\u30b3\u3067\u958b\u50ac\u3055\u308c\u308b\u300cSPIE Photonics West\u300d\u306b\u3066\u5831\u544a\u3055\u308c\u308b\u3002<\/p>\n<p>\u80cc\u666f<br 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