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\u3000\u7acb\u547d\u9928\u5927\u5b66\u7dcf\u5408\u79d1\u5b66\u6280\u8853\u7814\u7a76\u6a5f\u69cb<\/a><\/span>\uff08\u6ecb\u8cc0\u770c\u8349\u6d25\u5e02\uff09\u306e\u91d1\u5b50\u5065\u592a\u90ce\u6559\u6388\uff08\u534a\u5c0e\u4f53\u5fdc\u7528\u7814\u7a76\u30bb\u30f3\u30bf\u30fc\u3008RISA\u3009\u30bb\u30f3\u30bf\u30fc\u9577\u3001\u7acb\u547d\u9928\u5148\u9032\u7814\u7a76\u30a2\u30ab\u30c7\u30df\u30fc\u3008RARA\u3009\u30d5\u30a7\u30ed\u30fc\uff09\u3001\u540c\u5927\u5b66\u5927\u5b66\u9662\u7406\u5de5\u5b66\u7814\u7a76\u79d1\u306e\u8352\u6728\u52aa\u6559\u6388\u3001\u540c\u7814\u7a76\u79d1\u535a\u58eb\u524d\u671f\u8ab2\u7a0b2\u56de\u751f\u306e\u670d\u90e8\u592a\u653f\u3055\u3093\u3089\u306e\u7814\u7a76\u30b0\u30eb\u30fc\u30d7\u306f\u3001\u5ca9\u5d0e\u96fb\u6c17<\/a><\/strong><\/span>\u3001\u30a2\u30a4\u30c6\u30c3\u30af<\/strong><\/a><\/span>\u3068\u5171\u540c\u3067\u3001\u5b89\u4fa1\u306a\u534a\u5c0e\u4f53\u6210\u819c\u65b9\u6cd5\u3067\u3042\u308b\u30df\u30b9\u30c8CVD\u6cd5\u203b1<\/sup>\u3092\u7528\u3044\u3066\u3001\u6c34\u96fb\u89e3\u30bb\u30d1\u30ec\u30fc\u30bf\u203b2<\/sup>\u306b\u6709\u52b9\u306a\u4f4e\u62b5\u6297\u304b\u3064\u9ad8\u8010\u98df\u6027\u3092\u6709\u3059\u308b\u91d1\u5c5e\u9178\u5316\u7269\u819c\uff08\u9178\u5316\u30b9\u30ba\u3008SnO\u2082\u3009\u3001\u9178\u5316\u30a4\u30f3\u30b8\u30a6\u30e0\u3008In\u2082O\u2083\u3009\uff09\u306e\u4f5c\u88fd\u306b\u6210\u529f\u3057\u3001\u6c34\u96fb\u89e3\u3067\u4f7f\u7528\u3055\u308c\u308b\u30bb\u30d1\u30ec\u30fc\u30bf\u306b\u5bfe\u3057\u3001\u30df\u30b9\u30c8CVD\u3067\u6210\u819c\u3057\u305f\u91d1\u5c5e\u9178\u5316\u819c\u304c\u6709\u7528\u6027\u306e\u3042\u308b\u3053\u3068\u3092\u4e16\u754c\u3067\u521d\u3081\u3066\u793a\u3057\u305f\u3002<\/p>\n

\u3000\u540c\u7814\u7a76\u6210\u679c\u306f\u30012024\u5e749\u6708\u306e\u7b2c85\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u79cb\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u30012024\u5e7410\u6708\u306e\u7b2c43\u56de\u96fb\u5b50\u6750\u6599\u30b7\u30f3\u30dd\u30b8\u30a6\u30e0\uff08EMS\uff09\u30012024\u5e7412\u6708\u306b\u306f\u6750\u6599\u7814\u7a76\u306b\u95a2\u3059\u308b\u4e16\u754c\u6709\u6570\u306e\u56fd\u969b\u79d1\u5b66\u4f1a\u8b702024 <\/span>MRS Fall Meeting & Exhibit\uff08\u7c73\u56fd\u30dc\u30b9\u30c8\u30f3\uff09\u306a\u3069\u306b\u3066\u5831\u544a\u3055\u308c\u305f\u3002
\u307e\u305f\u3001\u8ad6\u6587\u60c5\u5831\u306e\u5185\u5bb9\u306f\u30012023\u5e7411\u6708\u306b\u884c\u308f\u308c\u305f\u7b2c3\u56de\u534a\u5c0e\u4f53\u30a8\u30ec\u30af\u30c8\u30ed\u30cb\u30af\u30b9\u90e8\u9580\u59d4\u54e1\u4f1a\u7b2c2\u56de\u7814\u7a76\u4f1a\u306b\u3066\u3001\u5b66\u751f\u512a\u79c0\u8b1b\u6f14\u8cde\u3092\u53d7\u8cde\u3057\u305f\u3002<\/p>\n\n\n\n

\u7814\u7a76\u306e\u80cc\u666f<\/h2>\n\n\n\n

\u30002050\u5e74\u306e\u30ab\u30fc\u30dc\u30f3\u30cb\u30e5\u30fc\u30c8\u30e9\u30eb\u5b9f\u73fe\u3068\u6c34\u7d20\u793e\u4f1a\u306b\u5411\u3051\u3066\u3001\u65e5\u672c\u653f\u5e9c\u306f2023\u5e746\u6708\u306b\u6c34\u7d20\u3092\u4e3b\u306a\u30a8\u30cd\u30eb\u30ae\u30fc\u6e90\u3068\u3059\u308b\u56fd\u5bb6\u6226\u7565\u300c\u6c34\u7d20\u57fa\u672c\u6226\u7565\u300d\u306e\u6539\u8a02\u3084\u30012024\u5e745\u6708\u306b\u6c34\u7d20\u306e\u793e\u4f1a\u5b9f\u88c5\u3092\u5f37\u529b\u306b\u63a8\u9032\u3057\u3066\u3044\u304f\u305f\u3081\u306e\u6cd5\u5f8b\u300c\u6c34\u7d20\u793e\u4f1a\u63a8\u9032\u6cd5\u300d\u306e\u6210\u7acb\u306a\u3069\u5b9f\u73fe\u306b\u5411\u3051\u305f\u653f\u7b56\u3084\u76ee\u6a19\u3092\u63b2\u3052\u3066\u3044\u308b\u3002
\u3000\u6c34\u7d20\u306f\u76f4\u63a5\u7684\u306b\u96fb\u529b\u5206\u91ce\u3067\u306e\u8ca2\u732e\u3060\u3051\u3067\u306a\u304f\u3001\u592a\u967d\u5149\u767a\u96fb\u306a\u3069\u306e\u518d\u751f\u53ef\u80fd\u30a8\u30cd\u30eb\u30ae\u30fc\u306e\u4f59\u5270\u96fb\u529b\u3092\u6c34\u7d20\u306b\u5909\u63db\u3057\u3066\u8caf\u8535\u30fb\u5229\u7528\u3059\u308b\u3053\u3068\u3067\u3001\u518d\u751f\u53ef\u80fd\u30a8\u30cd\u30eb\u30ae\u30fc\u306e\u30bc\u30ed\u30a8\u30df\u30c3\u30b7\u30e7\u30f3\u96fb\u6e90\u3068\u3057\u3066\u6d3b\u7528\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u308b\u3002
\u3000\u5ca9\u5d0e\u96fb\u6c17\u3067\u306f\u3001\u518d\u751f\u53ef\u80fd\u30a8\u30cd\u30eb\u30ae\u30fc\u3092\u5229\u7528\u3057\u305f\u5730\u57df\u81ea\u7acb\u5206\u6563\u578b\u30a8\u30cd\u30eb\u30ae\u30fc\u30b7\u30b9\u30c6\u30e0\u3084\u3001\u76f4\u6d41\u6a5f\u5668\u30c7\u30d0\u30a4\u30b9(\u592a\u967d\u96fb\u6c60\u3001\u84c4\u96fb\u6c60\u3001\u6c34\u96fb\u89e3\u3001\u71c3\u6599\u96fb\u6c60\u3001\u7167\u660e\u306a\u3069)\u3092\u76f4\u6d41\u3067\u3064\u306a\u3050\u76f4\u6d41\u7d66\u96fb\u30b7\u30b9\u30c6\u30e0\u306a\u3069\u3001\u5730\u57df\u30a8\u30cd\u30eb\u30ae\u30fc\u306e\u52b9\u7387\u7684\u5229\u7528\u306b\u5411\u3051\u305f\u958b\u767a\u306b\u53d6\u308a\u7d44\u3093\u3067\u3044\u308b\u3002
\u3000\u30a2\u30a4\u30c6\u30c3\u30af\u3067\u306f\u3001\u65b0\u3057\u3044\u6c34\u7d20\u793e\u4f1a\u5b9f\u73fe\u306b\u5411\u3051\u3066\u6c34\u96fb\u89e3\u7528\u91d1\u5c5e\u30bb\u30d1\u30ec\u30fc\u30bf\u306e\u30df\u30b9\u30c8CVD\u6cd5\u306b\u3088\u308b\u9ad8\u8010\u98df\u6027\u819c\u306e\u958b\u767a\u306b\u53d6\u308a\u7d44\u3093\u3067\u3044\u308b\u3002<\/p>\n\n\n\n

\"\"
\u56f31. \u7d66\u96fb\u30b7\u30b9\u30c6\u30e0\u306e\u4f8b<\/figcaption><\/figure>\n\n\n\n

\u3000\u6c34\u3092\u96fb\u6c17\u5206\u89e3\u3057\u3066\u6c34\u7d20\u3092\u751f\u6210\u3059\u308b\u6c34\u96fb\u89e3\u88c5\u7f6e(\u56f32)\u306f\u3001\u518d\u751f\u53ef\u80fd\u30a8\u30cd\u30eb\u30ae\u30fc\u306e\u30bc\u30ed\u30a8\u30df\u30c3\u30b7\u30e7\u30f3\u96fb\u6e90\u3068\u7d44\u5408\u305b\u3001\u3053\u308c\u304b\u3089\u306e\u6301\u7d9a\u53ef\u80fd\u306a\u793e\u4f1a\u5b9f\u73fe\u306b\u5411\u3051\u3066\u6d3b\u7528\u304c\u671f\u5f85\u3055\u308c\u3066\u3044\u308b\u3002
\u3000\u4e2d\u3067\u3082\u56fa\u4f53\u9ad8\u5206\u5b50(PEM)\u578b\u6c34\u96fb\u89e3\u203b3\u306f\u3001\u9ad8\u3044\u30a8\u30cd\u30eb\u30ae\u30fc\u52b9\u7387\u3084\u6c34\u7d20\u751f\u6210\u901f\u5ea6\u304c\u901f\u3044\u3053\u3068\u3001\u518d\u751f\u53ef\u80fd\u30a8\u30cd\u30eb\u30ae\u30fc\u306e\u3088\u3046\u306a\u5909\u52d5\u96fb\u5727\u3078\u306e\u5bfe\u5fdc\u304c\u53ef\u80fd\u3067\u3042\u308b\u3053\u3068\u3001\u53d6\u308a\u51fa\u305b\u308b\u6c34\u7d20\u30ac\u30b9\u306e\u7d14\u5ea6\u304c\u9ad8\u3044\u3053\u3068\u3001\u9ad8\u96fb\u6d41\u5bc6\u5ea6\u3067\u306e\u904b\u8ee2\u304c\u53ef\u80fd\u3067\u5c0f\u578b\u5316\u3067\u304d\u308b\u3001\u306a\u3069\u306e\u7279\u9577\u304c\u3042\u308a\u6ce8\u76ee\u3055\u308c\u3066\u3044\u308b\u3002<\/p>\n\n\n

\n
\"\"<\/figure><\/div>\n\n\n

\u3000\u56fa\u4f53\u9ad8\u5206\u5b50\uff08PEM\uff09\u578b\u6c34\u96fb\u89e3\u306f\u3001\u71c3\u6599\u96fb\u6c60\uff080.7V\uff09\u4ee5\u4e0a\u306b\u9ad8\u3044\u96fb\u4f4d\uff08>2V vs. \u6c34\u7d20\u96fb\u6975\uff1aRHE\uff09\u306b\u3055\u3089\u3055\u308c\u308b\u3053\u3068\u306a\u3069\u3067\u306e\u9178\u6027\u74b0\u5883\u4e0b\u306e\u96fb\u6c17\u5316\u5b66\u53cd\u5fdc\u3068\u306a\u308b\u305f\u3081\u3001\u6c34\u96fb\u89e3\u3067\u4f7f\u7528\u3059\u308b\u6c34\u96fb\u89e3\u30bb\u30d1\u30ec\u30fc\u30bf\u306f\u9ad8\u6027\u80fd\u306a\u8010\u8150\u98df\u6027\u3068\u5c0e\u96fb\u6027\u304c\u6c42\u3081\u3089\u308c\u3001\u73fe\u5728\u306f\u30c1\u30bf\u30f3\uff08Ti\uff09\u30bb\u30d1\u30ec\u30fc\u30bf\u4e0a\u306b\u30d7\u30e9\u30c1\u30ca\uff08Pt\uff09\u3092\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u3059\u308b\u624b\u6cd5\u304c\u3068\u3089\u308c\u3066\u3044\u308b\u304c\u3001\u9ad8\u30b3\u30b9\u30c8\u306e\u8cb4\u91d1\u5c5e\u985e\u3092\u4f7f\u7528\u3059\u308b\u305f\u3081\u3001\u4f5c\u88fd\u30b3\u30b9\u30c8\u304c\u8ab2\u984c\u3068\u306a\u3063\u3066\u3044\u305f\u3002<\/p>\n\n\n\n

\u3000\u540c\u5171\u540c\u7814\u7a76\u30b0\u30eb\u30fc\u30d7\u306f\u3001\u3053\u306e\u9178\u6027\u74b0\u5883\u4e0b\u3067\u5b89\u5b9a\u3057\u3066\u6c34\u306e\u96fb\u6c17\u5206\u89e3\u3092\u4f4e\u30b3\u30b9\u30c8\u3067\u5b9f\u73fe\u3059\u308b\u305f\u3081\u306e\u7814\u7a76\u958b\u767a\u3068\u3057\u3066\u3001\u3053\u308c\u307e\u3067\u7814\u7a76\u3092\u884c\u3063\u3066\u3044\u305f\u4f4e\u30b3\u30b9\u30c8\u6210\u819c\u6cd5\u3067\u3042\u308b\u30df\u30b9\u30c8CVD\u6cd5\u3092\u7528\u3044\u3066\u3001\u71c3\u6599\u96fb\u6c60\u30bb\u30d1\u30ec\u30fc\u30bf\u3078\u306eSnO\u2082\u3084In\u2082O\u2083\u306e\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u6280\u8853\u203b\u8ad6\u6587\u60c5\u5831\u3092\u6c34\u96fb\u89e3\u7528\u30bb\u30d1\u30ec\u30fc\u30bf\u306a\u3069\u3078\u306e\u6280\u8853\u5fdc\u7528\u306e\u53ef\u80fd\u6027\u3092\u793a\u3059\u305f\u3081\u306b\u5b9f\u9a13\u3092\u8a66\u307f\u305f\u3002<\/p>\n\n\n\n

\u7814\u7a76\u6210\u679c<\/h2>\n\n\n\n

\u3000\u540c\u7814\u7a76\u3067\u306f\u3001\u30df\u30b9\u30c8CVD\u6cd5\u3092\u7528\u3044\u3066SnO\u2082\u3068In\u2082O\u2083\u3092Ti\u57fa\u677f\u306b\u305d\u308c\u305e\u308c\u6210\u819c\u3057\u305f\u3002\u8a55\u4fa1\u65b9\u6cd5\u3068\u3057\u3066\u306f\u3001\u56fa\u4f53\u9ad8\u5206\u5b50(PEM)\u578b\u6c34\u96fb\u89e3\u306e\u9178\u6027\u74b0\u5883\u3092\u518d\u73fe\u3059\u308b\u786b\u9178\u6c34\u6eb6\u6db2\u4e2d\u3067\u96fb\u6975\u6027\u80fd\u306e\u691c\u8a3c\u3092\u884c\u3063\u305f\u3002
\u3000\u63a5\u89e6\u62b5\u6297\u306f\u56db\u7aef\u5b50\u6cd5\u3092\u7528\u3044\u3066\u8a66\u6599\u306e\u5782\u76f4\u65b9\u5411\u6210\u5206\u306e\u62b5\u6297\u5024\u3092\u6e2c\u5b9a\u3057\u3001\u8010\u98df\u8a66\u9a13\u306f\u5185\u90e8\u74b0\u5883\u3092\u6a21\u3057\u305f\u786b\u9178\u6c34\u6eb6\u6db2(H\u2082SO\u2084, pH3)\u4e2d\u3067\u5b9a\u96fb\u4f4d\u5206\u6975\u8a66\u9a13\u3092\u884c\u3063\u305f\u3002
\u307e\u305f\u96fb\u4f4d\u306f2.0V (vs. RHE)\u3001\u8a66\u9a13\u6642\u9593\u306f72\u6642\u9593\u3068\u3057\u305f\u3002<\/p>\n\n\n\n

\u3000\u5b9f\u9a13\u7d50\u679c\u3068\u3057\u3066\u3001Ti\u57fa\u677f\u4e0a\u306b\u6210\u819c\u3057\u305f\u4f4e\u62b5\u6297SnO\u2082\u3068ITO\uff08Sn\u3092\u6dfb\u52a0\u3057\u305fIn\u2082O\u2083\uff09\u203b4\u306f\u56f33\u306b\u793a\u3059\u3088\u3046\u306b7.6m\u03a9cm\u00b2\u30016.4m\u03a9cm\u00b2\u3092\u305d\u308c\u305e\u308c\u9054\u6210\u3057\u305f\u3002
\u3000\u3053\u308c\u306f\u3001\u91d1\u3084\u30d7\u30e9\u30c1\u30ca\u3092\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u3057\u305f\u969b\u306e\u63a5\u89e6\u62b5\u6297\u5024\uff081 \u2013 5m\u03a9cm\u00b2\uff09\u306b\u5339\u6575\u3059\u308b\u5024\u3067\u3042\u308a\u3001\u30bb\u30d1\u30ec\u30fc\u30bf\u306e\u4f4e\u30b3\u30b9\u30c8\u5316\u3001\u3072\u3044\u3066\u306f\u3001\u6c34\u96fb\u89e3\u306e\u4f4e\u30b3\u30b9\u30c8\u5316\u3078\u306e\u6709\u7528\u6027\u3092\u793a\u3059\u3053\u3068\u304c\u3067\u304d\u305f\u3002
\u3000\u307e\u305f\u3001\u56f34\u306b\u793a\u3059\u3088\u3046\u306b\u3001\u6c34\u96fb\u89e3\u306e\u52d5\u4f5c\u74b0\u5883\u3092\u6a21\u3057\u305f\u786b\u9178\u6c34\u6eb6\u4e2d\u306b72\u6642\u95932.0V(vs. RHE)\u5b9a\u96fb\u4f4d\u5206\u6975\u3057\u305f\u5f8c\u306eTi\u57fa\u677f\u3001Ti\u57fa\u677f\u4e0a\u306b\u4f5c\u88fd\u3057\u305fSnO\u2082\uff08SnO\u2082 on Ti\uff09\u306b\u5bfe\u3057\u3001\u8a66\u9a13\u524d\u5f8c\u306b\u304a\u3051\u308b\u63a5\u89e6\u62b5\u6297\u5024\u3092\u6e2c\u5b9a\u3057\u305f\u3068\u3053\u308d\u3001SnO\u2082 on Ti\u3067\u306f\u3001\u8a66\u9a13\u5f8c\u306e\u63a5\u89e6\u62b5\u6297\u5024\u304c\u6025\u6fc0\u306b\u4e0a\u6607\u3059\u308b\u3053\u3068\u304c\u306a\u3044\u3053\u3068\u304c\u78ba\u8a8d\u3055\u308c\u305f\u3002<\/p>\n\n\n

\n
\"\"<\/figure><\/div>\n\n\n

\u3000\u6b21\u306b\u3001\u5b9a\u96fb\u4f4d\u5206\u6975\u8a66\u9a13\u306b\u304a\u3044\u3066\u3082\u88681\u306b\u793a\u3059\u3088\u3046\u306b\u8a98\u5c0e\u7d50\u5408\u30d7\u30e9\u30ba\u30de\u767a\u5149\u5206\u5149(ICP-AES)\u5206\u6790\u306e\u7d50\u679c\u3001\u6eb6\u6db2\u4e2d\u306bSn\u3084Ti\u6210\u5206\u304c\u6eb6\u51fa\u3059\u308b\u3053\u3068\u306a\u304f\u826f\u597d\u306a\u8010\u98df\u6027\u3092\u793a\u3059\u3053\u3068\u304c\u78ba\u8a8d\u3055\u308c\u305f\u3002
\u3000\u4ee5\u4e0a\u306e\u7d50\u679c\u3088\u308a\u3001\u30df\u30b9\u30c8CVD\u6cd5\u306b\u3088\u308b\u91d1\u5c5e\u9178\u5316\u819c\u304c\u6c34\u96fb\u89e3\u30bb\u30d1\u30ec\u30fc\u30bf\u5fdc\u7528\u306b\u5341\u5206\u306a\u7279\u6027\u3092\u5f97\u308b\u3053\u3068\u304c\u3067\u304d\u305f\u3002<\/p>\n\n\n\n

\u4eca\u5f8c\u306e\u5c55\u958b<\/h2>\n\n\n\n

\u3000\u4eca\u56de\u958b\u767a\u3055\u308c\u305f\u30df\u30b9\u30c8CVD\u6cd5\u3092\u7528\u3044\u305fSnO\u2082\u3001In\u2082O\u2083\u306e\u91d1\u5c5e\u9178\u5316\u819c\u306f\u6c34\u96fb\u89e3\u3067\u306e\u69cb\u6210\u90e8\u54c1\u6750\u6599\u306e\u4f4e\u62b5\u6297\u5316\u3068\u9ad8\u8010\u98df\u6027\u3092\u793a\u305b\u305f\u3053\u3068\u304b\u3089\u3001\u30df\u30b9\u30c8CVD\u306b\u3088\u308b\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u6280\u8853\u306f\u3001\u5e0c\u5c11\u91d1\u5c5e\u3084\u8cb4\u91d1\u5c5e\u985e\u3092\u4f7f\u7528\u305b\u305a\u306b\u4f4e\u30b3\u30b9\u30c8\u3067\u9ad8\u52b9\u7387\u306a\u6c34\u306e\u96fb\u6c17\u5206\u89e3\u306b\u3088\u308b\u30b0\u30ea\u30fc\u30f3\u6c34\u7d20\u88fd\u9020\u304c\u53ef\u80fd\u3068\u306a\u308a\u3001\u518d\u751f\u53ef\u80fd\u30a8\u30cd\u30eb\u30ae\u30fc\u3092\u96fb\u6e90\u3068\u3057\u305f\u6c34\u96fb\u89e3\u6280\u8853\u306e\u666e\u53ca\u306b\u5927\u304d\u304f\u8ca2\u732e\u3059\u308b\u3082\u306e\u3068\u671f\u5f85\u3055\u308c\u308b\u3002
\u3000\u540c\u7814\u7a76\u6210\u679c\u306f\u7279\u8a31\u51fa\u9858\u4e2d\u3067\u3042\u308a\u3001\u4eca\u5f8c\u306f\u4eca\u56de\u306e\u6210\u679c\u3092\u57fa\u306b\u66f4\u306a\u308b\u7279\u6027\u6539\u5584\u306b\u53d6\u308a\u7d44\u307f\u3001\u3088\u308a\u5b89\u4fa1\u3067\u9ad8\u54c1\u8cea\u306a\u6c34\u96fb\u89e3\u306e\u5b9f\u73fe\u306b\u5411\u3051\u3066\u7814\u7a76\u958b\u767a\u3092\u9032\u3081\u3066\u3044\u304f\u3002<\/p>\n\n\n\n

\u8ad6\u6587\u60c5\u5831<\/h2>\n

\u8ad6\u6587\u540d\uff1a\u71c3\u6599\u96fb\u6c60\u30bb\u30d1\u30ec\u30fc\u30bf\u306b\u88ab\u8986\u3059\u308b\u5c0e\u96fb\u6027\u30fb\u8010\u98df\u6027ITO\u8584\u819c\u306e\u4f5c\u88fd<\/p>\n

\u8457\u8005\uff1aTaisei HATTORI, Takashi TANAKA, Eiji KIKUCHI, Tomoki OTSUKA, Tsutomu ARAKI, and Kentaro KANEKO<\/p>\n

\u767a\u8868\u96d1\u8a8c\uff1a\u6750\u6599 (Journal of Society of Materials Science, Japan)<\/p>\n

\u63b2\u8f09\u65e5\uff1a2024\u5e744\u670815\u65e5<\/p>\n

DOI\uff1ahttps:\/\/doi.org\/10.2472\/jsms.73.356<\/span><\/a><\/p>\n

URL\uff1ahttps:\/\/www.jstage.jst.go.jp\/article\/jsms\/73\/4\/73_356\/_article\/-char\/ja<\/a><\/span><\/p>\n

\u7528\u8a9e\u8aac\u660e<\/h2>\n

\u203b1 \u30df\u30b9\u30c8CVD\u6cd5\uff1a<\/span>
\u5316\u5b66\u6c17\u76f8\u6210\u9577(Chemical Vapor Deposition, CVD)\u6cd5\u306e\u4e00\u7a2e\u3067\u3042\u308a\u3001\u9178\u5316\u7269\u534a\u5c0e\u4f53\u306e\u5408\u6210\u306a\u3069\u306b\u7528\u3044\u3089\u308c\u3066\u3044\u308b\u8584\u819c\u6210\u9577\u624b\u6cd5\u3002<\/span>
\u6210\u819c\u6750\u6599\u306f\u6c34\u3084\u6709\u6a5f\u6eb6\u5a92\u306b\u539f\u6599\u3092\u6eb6\u304b\u3059\u65b9\u6cd5\u306e\u305f\u3081\u6210\u819c\u30d7\u30ed\u30bb\u30b9\u3067\u306e\u30c9\u30fc\u30d4\u30f3\u30b0\u3084\u6df7\u6676\u306e\u4f5c\u88fd\u304c\u7c21\u4fbf\u3067\u3042\u308a\u3001\u307e\u305f\u5e38\u5727\u6210\u819c\u304c\u53ef\u80fd\u306e\u305f\u3081\u771f\u7a7a\u88c5\u7f6e\u3092\u5fc5\u8981\u3068\u3057\u306a\u3044\u306e\u3067\u88c5\u7f6e\u304c\u7c21\u4fbf\u3067\u5b89\u4fa1\u3067\u3042\u308b\u7279\u9577\u304c\u3042\u308b\u3002<\/span><\/p>\n

\u00a0<\/p>\n

\u203b2 \u30bb\u30d1\u30ec\u30fc\u30bf\uff1a<\/span>
\u71c3\u6599\u3068\u306a\u308b\u6c34\u7d20\u30ac\u30b9\u3084\u9178\u7d20\u30ac\u30b9\u3092\u9001\u308a\u8fbc\u3080\u3001\u751f\u6210\u3055\u308c\u305f\u6c34\u3092\u6392\u51fa\u3059\u308b\u6d41\u8def\u3092\u5f62\u6210\u3059\u308b\u677f\u72b6\u306e\u90e8\u54c1\u3002<\/span>
\u5c0e\u96fb\u6027\u3068\u8010\u98df\u6027\u304c\u6c42\u3081\u3089\u308c\u308b\u3002<\/span><\/p>\n

\u00a0<\/p>\n

\u203b3 \u56fa\u4f53\u9ad8\u5206\u5b50(PEM)\u578b\u6c34\u96fb\u89e3\uff1a<\/span>
\u56fa\u4f53\u9ad8\u5206\u5b50(PEM)\u578b\u6c34\u96fb\u89e3\u306f\u3001\u56fa\u4f53\u9ad8\u5206\u5b50\u819c(PEM)\u3092\u7528\u3044\u3066\u6c34\u3092\u96fb\u6c17\u5206\u89e3\u3059\u308b\u6c34\u7d20\u88fd\u9020\u65b9\u6cd5\u3002<\/span>
PEM\u306fPolymer Electrolyte Membrane\u306e\u7565\u3002<\/span>
\u6c34\u96fb\u89e3\u30d7\u30ed\u30bb\u30b9\u3067\u306f\u3001\u96fb\u89e3\u88c5\u7f6e\u304c\u96fb\u6c17\u3068\u6c34\u3092\u6c17\u4f53\u306e\u6c34\u7d20\u3068\u9178\u7d20\u306b\u5909\u63db\u3057\u307e\u3059\u3002<\/span>
\u56fa\u4f53\u9ad8\u5206\u5b50\u819c(PEM)\u306f\u6c34\u7d20\u30a4\u30aa\u30f3(\u30d7\u30ed\u30c8\u30f3)\u3092\u8f38\u9001\u3059\u308b\u80fd\u529b\u3092\u6301\u3061\u3001\u96fb\u6c17\u5206\u89e3\u306b\u3088\u308b\u6c34\u7d20\u3068\u9178\u7d20\u306e\u5206\u96e2\u3084\u96fb\u6975\u306e\u96fb\u6c17\u7684\u7d76\u7e01\u3092\u78ba\u4fdd\u3059\u308b\u3002<\/span>
PEM\u306fProton Exchange Membrane(\u30d7\u30ed\u30c8\u30f3\u4ea4\u63db\u819c)\u3068\u3082\u547c\u3070\u308c<\/span>\u308b\u3002<\/p>\n

\u00a0<\/p>\n

\u203b4 ITO(Sn\u3092\u6dfb\u52a0\u3057\u305f\u9178\u5316\u30a4\u30f3\u30b8\u30a6\u30e0\uff1aIn\u2082O\u2083)\uff1a<\/span>
\u5c0e\u96fb\u6027\u304c\u9ad8\u3044\u30ef\u30a4\u30c9\u30d0\u30f3\u30c9\u30ae\u30e3\u30c3\u30d7\u534a\u5c0e\u4f53\u3068\u3057\u3066\u3001\u30c7\u30a3\u30b9\u30d7\u30ec\u30a4\u7528\u9014\u306e\u900f\u660e\u5c0e\u96fb\u819c\u3068\u3057\u3066\u6709\u540d\u306a\u91d1\u5c5e\u9178\u5316\u7269\u3067\u3042\u308b\u3002<\/span>
\u71c3\u6599\u96fb\u6c60\u30bb\u30d1\u30ec\u30fc\u30bf\u306b\u6c42\u3081\u3089\u308c\u308b\u5c0e\u96fb\u6027\u3068\u8010\u8150\u98df\u6027\u3092\u517c\u306d\u5099\u3048\u308b\u6750\u6599\u3068\u3057\u3066\u3082\u6709\u7528\u3067\u3042\u308b\u4e8b\u304c\u8ad6\u6587\u60c5\u5831\u306e\u8ad6\u6587\u306b\u3088\u308a\u793a\u3055\u308c\u305f\u3002<\/span><\/p>\n","protected":false},"excerpt":{"rendered":"

\u3000\u7acb\u547d\u9928\u5927\u5b66\u7dcf\u5408\u79d1\u5b66\u6280\u8853\u7814\u7a76\u6a5f\u69cb\uff08\u6ecb\u8cc0\u770c\u8349\u6d25\u5e02\uff09\u306e\u91d1\u5b50\u5065\u592a\u90ce\u6559\u6388\uff08\u534a\u5c0e\u4f53\u5fdc\u7528\u7814\u7a76\u30bb\u30f3\u30bf\u30fc\u3008RISA\u3009\u30bb\u30f3\u30bf\u30fc\u9577\u3001\u7acb\u547d\u9928\u5148\u9032\u7814\u7a76\u30a2\u30ab\u30c7\u30df\u30fc\u3008RARA\u3009\u30d5\u30a7\u30ed\u30fc\uff09\u3001\u540c\u5927\u5b66\u5927\u5b66\u9662\u7406\u5de5\u5b66\u7814\u7a76\u79d1\u306e\u8352\u6728\u52aa\u6559\u6388\u3001\u540c\u7814\u7a76\u79d1\u535a\u58eb\u524d\u671f\u8ab2\u7a0b2\u56de\u751f\u306e\u670d\u90e8\u592a\u653f\u3055\u3093\u3089\u306e\u7814\u7a76\u30b0\u30eb\u30fc\u30d7\u306f\u3001\u5ca9\u5d0e\u96fb\u6c17\u3001\u30a2\u30a4\u30c6\u30c3\u30af\u3068\u5171\u540c\u3067\u3001\u5b89\u4fa1\u306a\u534a\u5c0e\u4f53\u6210\u819c\u65b9\u6cd5\u3067\u3042\u308b\u30df\u30b9\u30c8CVD\u6cd5\u203b1\u3092\u7528\u3044\u3066\u3001\u6c34\u96fb\u89e3\u30bb\u30d1\u30ec\u30fc\u30bf\u203b2\u306b\u6709\u52b9\u306a\u4f4e\u62b5\u6297\u304b\u3064\u9ad8\u8010\u98df\u6027\u3092\u6709\u3059\u308b\u91d1\u5c5e\u9178\u5316\u7269\u819c\uff08\u9178\u5316\u30b9\u30ba\u3008SnO\u2082\u3009\u3001\u9178\u5316\u30a4\u30f3\u30b8\u30a6\u30e0\u3008In\u2082O\u2083\u3009\uff09\u306e\u4f5c\u88fd\u306b\u6210\u529f\u3057\u3001\u6c34\u96fb\u89e3\u3067\u4f7f\u7528\u3055\u308c\u308b\u30bb\u30d1\u30ec\u30fc\u30bf\u306b\u5bfe\u3057\u3001\u30df\u30b9\u30c8CVD\u3067\u6210\u819c\u3057\u305f\u91d1\u5c5e\u9178\u5316\u819c\u304c\u6709\u7528\u6027\u306e\u3042\u308b\u3053\u3068\u3092\u4e16\u754c\u3067\u521d\u3081\u3066\u793a\u3057\u305f\u3002<\/p>\n","protected":false},"author":7,"featured_media":0,"comment_status":"closed","ping_status":"","sticky":false,"template":"","format":"standard","meta":[],"categories":[17],"tags":[19],"_links":{"self":[{"href":"https:\/\/ctiweb.co.jp\/con\/wp-json\/wp\/v2\/posts\/17079"}],"collection":[{"href":"https:\/\/ctiweb.co.jp\/con\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/ctiweb.co.jp\/con\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/ctiweb.co.jp\/con\/wp-json\/wp\/v2\/users\/7"}],"replies":[{"embeddable":true,"href":"https:\/\/ctiweb.co.jp\/con\/wp-json\/wp\/v2\/comments?post=17079"}],"version-history":[{"count":4,"href":"https:\/\/ctiweb.co.jp\/con\/wp-json\/wp\/v2\/posts\/17079\/revisions"}],"predecessor-version":[{"id":17096,"href":"https:\/\/ctiweb.co.jp\/con\/wp-json\/wp\/v2\/posts\/17079\/revisions\/17096"}],"wp:attachment":[{"href":"https:\/\/ctiweb.co.jp\/con\/wp-json\/wp\/v2\/media?parent=17079"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/ctiweb.co.jp\/con\/wp-json\/wp\/v2\/categories?post=17079"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/ctiweb.co.jp\/con\/wp-json\/wp\/v2\/tags?post=17079"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}