{"id":18768,"date":"2025-05-31T09:33:14","date_gmt":"2025-05-31T00:33:14","guid":{"rendered":"https:\/\/ctiweb.co.jp\/con\/?p=18768"},"modified":"2025-06-07T17:18:20","modified_gmt":"2025-06-07T08:18:20","slug":"%e3%80%90%e5%8d%8a%e5%b0%8e%e4%bd%93%e3%80%91st%e3%83%9e%e3%82%a4%e3%82%af%e3%83%ad%e3%82%a8%e3%83%ac%e3%82%af%e3%83%88%e3%83%ad%e3%83%8b%e3%82%af%e3%82%b9%e3%80%81%e5%9c%a7%e9%9b%bbmems%e6%8a%80","status":"publish","type":"post","link":"https:\/\/ctiweb.co.jp\/con\/%e3%80%90%e5%8d%8a%e5%b0%8e%e4%bd%93%e3%80%91st%e3%83%9e%e3%82%a4%e3%82%af%e3%83%ad%e3%82%a8%e3%83%ac%e3%82%af%e3%83%88%e3%83%ad%e3%83%8b%e3%82%af%e3%82%b9%e3%80%81%e5%9c%a7%e9%9b%bbmems%e6%8a%80\/","title":{"rendered":"\u3010\u534a\u5c0e\u4f53\u3011ST\u30de\u30a4\u30af\u30ed\u30a8\u30ec\u30af\u30c8\u30ed\u30cb\u30af\u30b9\u3001\u5727\u96fbMEMS\u6280\u8853\u306e\u767a\u5c55\u306b\u5411\u3051\u30b7\u30f3\u30ac\u30dd\u30fc\u30eb\u306e\u300cLab-in-Fab\u300d\u578b\u7814\u7a76\u958b\u767a\u306b\u304a\u3051\u308b\u5354\u529b\u62e1\u5927"},"content":{"rendered":"
\n
\"\"<\/figure><\/div>\n\n\n

\u3000\u591a\u7a2e\u591a\u69d8\u306a\u96fb\u5b50\u6a5f\u5668\u306b\u534a\u5c0e\u4f53\u3092\u63d0\u4f9b\u3059\u308b\u4e16\u754c\u7684\u534a\u5c0e\u4f53\u30e1\u30fc\u30ab\u30fc\u306eST\u30de\u30a4\u30af\u30ed\u30a8\u30ec\u30af\u30c8\u30ed\u30cb\u30af\u30b9<\/span><\/strong><\/a>\uff08\u4ee5\u4e0bST\uff09\u306f\u3001A*STAR\uff08\u30b7\u30f3\u30ac\u30dd\u30fc\u30eb\u79d1\u5b66\u6280\u8853\u7814\u7a76\u5e81\uff09\u306eInstitute of Microelectronics\uff08IME\uff09\u304a\u3088\u3073ULVAC\u793e\u3068\u5354\u529b\u3057\u3001\u30b7\u30f3\u30ac\u30dd\u30fc\u30eb\u306b\u304a\u3051\u308b\u300cLab-in-Fab\u300d\uff08LiF\uff09\u578b\u7814\u7a76\u958b\u767a\u3092\u62e1\u5927\u3059\u308b\u3053\u3068\u3092\u767a\u8868\u3057\u305f\u3002\u3053\u306e\u65b0\u305f\u306a\u6bb5\u968e\u3067\u306f\u3001\u30b7\u30f3\u30ac\u30dd\u30fc\u30eb\u306eA*STAR\u7269\u8cea\u6750\u6599\u5de5\u5b66\u7814\u7a76\u6240\uff08A*STAR IMRE\uff09\u304a\u3088\u3073\u30b7\u30f3\u30ac\u30dd\u30fc\u30eb\u56fd\u7acb\u5927\u5b66\uff08NUS\uff09\u3068\u306e\u30d7\u30ed\u30b8\u30a7\u30af\u30c8\u3092\u5b9f\u65bd\u3059\u308b\u3002
\u3000\u3053\u306e\u53d6\u308a\u7d44\u307f\u3067\u306f\u3001\u74b0\u5883\u306b\u512a\u3057\u3044\u925b\u30d5\u30ea\u30fc\u5727\u96fb\u6750\u6599\u306e\u958b\u767a\u63a8\u9032\u3068\u3001\u30b3\u30b9\u30c8\u52b9\u7387\u306b\u512a\u308c\u305f\u5c0f\u578b\u306e\u30bb\u30f3\u30b5\u304a\u3088\u3073\u30a2\u30af\u30c1\u30e5\u30a8\u30fc\u30bf\u3092\u5b9f\u73fe\u3057\u3066\u3044\u304f\u3002\u9ad8\u7b49\u6559\u80b2\u6a5f\u95a2\u3084\u30b9\u30bf\u30fc\u30c8\u30a2\u30c3\u30d7\u4f01\u696d\u3001\u4e2d\u5c0f\u4f01\u696d\u3001\u591a\u56fd\u7c4d\u4f01\u696d\u304c\u3001\u3053\u306e\u5305\u62ec\u7684\u306a\u88fd\u9020\u30e9\u30a4\u30f3\u3092\u6d3b\u7528\u3057\u3066\u3001\u5727\u96fbMEMS\uff08Micro-Electro-Mechanical Systems\uff09\u306e\u88fd\u54c1\u5316\u307e\u3067\u306e\u671f\u9593\u3092\u77ed\u7e2e\u3059\u308b\u3002\u88fd\u9020\u304c\u898b\u8fbc\u307e\u308c\u308b\u88fd\u54c1\u306b\u306f\u30013D\u30de\u30c3\u30d4\u30f3\u30b0\u304a\u3088\u3073\u30a4\u30e1\u30fc\u30b8\u30f3\u30b0\u5411\u3051\u5727\u96fbMEMS\u306e\u8d85\u97f3\u6ce2\u30c8\u30e9\u30f3\u30b9\u30c7\u30e5\u30fc\u30b5\uff08PMUT\uff09\u3084\u3001\u30d1\u30fc\u30bd\u30ca\u30eb\u96fb\u5b50\u6a5f\u5668\u5411\u3051\u5c0f\u578b\u30b9\u30d4\u30fc\u30ab\u3001\u30b9\u30de\u30fc\u30c8\u30d5\u30a9\u30f3\u306e\u30ab\u30e1\u30e9\u30fb\u30e2\u30b8\u30e5\u30fc\u30eb\u5411\u3051\u81ea\u52d5\u7126\u70b9\u30c7\u30d0\u30a4\u30b9\u306a\u3069\u304c\u3042\u308b\u3002
\u3000ST\u306e\u30a2\u30ca\u30ed\u30b0\u30fb\u30d1\u30ef\u30fc&\u30c7\u30a3\u30b9\u30af\u30ea\u30fc\u30c8\u30fbMEMS&\u30bb\u30f3\u30b5\u30b0\u30eb\u30fc\u30d7 \u30b0\u30eb\u30fc\u30d7\u30fb\u30d0\u30a4\u30b9\u30d7\u30ec\u30b8\u30c7\u30f3\u30c8 \u517c \u4e2d\u592e\u7814\u7a76\u958b\u767a\u62c5\u5f53\u30b8\u30a7\u30cd\u30e9\u30eb\u30fb\u30de\u30cd\u30fc\u30b8\u30e3\u3067\u3042\u308bAnton Hofmeister\u6c0f\u306f\u3001\u300cLab-in-Fab 2.0\u306b\u304a\u3044\u3066\u3001A*STAR IME\u3068ULVAC\u793e\u3068\u306e\u5354\u529b\u3092\u9032\u5c55\u3055\u305b\u3001A*STAR IMRE\u3068NUS\u3068\u306e\u65b0\u898f\u30d7\u30ed\u30b8\u30a7\u30af\u30c8\u3092\u958b\u59cb\u3067\u304d\u308b\u3053\u3068\u3092\u5927\u5909\u559c\u3070\u3057\u304f\u601d\u3044\u307e\u3059\u3002\u3053\u306e\u53d6\u308a\u7d44\u307f\u306f\u3001\u5727\u96fbMEMS\u6280\u8853\u306e\u30a4\u30ce\u30d9\u30fc\u30b7\u30e7\u30f3\u3092\u4fc3\u9032\u3057\u3001\u6b21\u4e16\u4ee3\u88fd\u54c1\u306e\u5e02\u5834\u6295\u5165\u3092\u652f\u63f4\u3057\u307e\u3059\u300d\u3068\u30b3\u30e1\u30f3\u30c8\u3057\u3066\u3044\u308b\u3002
\u3000A*STAR\u306e\u526f\u6700\u9ad8\u8cac\u4efb\u8005\uff08\u30a4\u30ce\u30d9\u30fc\u30b7\u30e7\u30f3\u304a\u3088\u3073\u30a8\u30f3\u30bf\u30fc\u30d7\u30e9\u30a4\u30ba\u62c5\u5f53\uff09\u3067\u3042\u308bYeo Yee Chia\u6559\u6388\u306f\u3001\u300c\u79c1\u305f\u3061\u306f\u3001\u6750\u6599\u3001\u30c4\u30fc\u30eb\u3001\u30d7\u30ed\u30bb\u30b9\u30fb\u30e2\u30b8\u30e5\u30fc\u30eb\u3001\u6280\u8853\u958b\u767a\u3001\u8a2d\u8a08\u3001\u88fd\u9020\u306b\u304a\u3051\u308b\u4e3b\u8981\u30a4\u30ce\u30d9\u30fc\u30bf\u9593\u306e\u9023\u643a\u3092\u5f37\u5316\u30fb\u62e1\u5927\u3059\u308b\u3053\u3068\u3067\u3001\u7814\u7a76\u958b\u767a\u306e\u6210\u679c\u3092\u5fdc\u7528\u3059\u308b\u65b9\u6cd5\u3092\u5909\u9769\u3057\u3088\u3046\u3068\u3057\u3066\u3044\u307e\u3059\u3002\u3053\u308c\u306b\u3088\u308a\u3001\u74b0\u5883\u306b\u512a\u3057\u3044\u925b\u30d5\u30ea\u30fc\u6750\u6599\u3092\u4f7f\u7528\u3057\u305f\u9ad8\u96fb\u529b\u52b9\u7387\u306e\u6b21\u4e16\u4ee3\u5727\u96fbMEMS\u88fd\u54c1\u306e\u5546\u54c1\u5316\u304c\u52a0\u901f\u3057\u3001\u4e16\u754c\u306e\u534a\u5c0e\u4f53\u30d0\u30ea\u30e5\u30fc\u30c1\u30a7\u30fc\u30f3\u306b\u304a\u3051\u308b\u30b7\u30f3\u30ac\u30dd\u30fc\u30eb\u306e\u5730\u4f4d\u3092\u5f37\u5316\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059\u300d\u3068\u30b3\u30e1\u30f3\u30c8\u3057\u3066\u3044\u308b\u3002
\u3000ULVAC\u793e\u306e\u57f7\u884c\u5f79\u54e1 \u517c \u88c5\u7f6e\u4e8b\u696d\u672c\u90e8 \u96fb\u5b50\u6a5f\u5668\u4e8b\u696d\u90e8\u9577\u306e\u5ca9\u4e95\u6cbb\u61b2\u6c0f\u306f\u300c\u3053\u306e\u753b\u671f\u7684\u306a\u53d6\u308a\u7d44\u307f\u306b\u53c2\u52a0\u3057\u3001\u5727\u96fbMEMS\u696d\u754c\u5411\u3051\u88fd\u9020\u6280\u8853\u30bd\u30ea\u30e5\u30fc\u30b7\u30e7\u30f3\u306e\u5f53\u793e\u306e\u6280\u8853\u529b\u3067\u8ca2\u732e\u3067\u304d\u308b\u3053\u3068\u3092\u5149\u6804\u306b\u601d\u3044\u307e\u3059\u300d\u3068\u30b3\u30e1\u30f3\u30c8\u3057\u3066\u3044\u308b\u3002
\u30002020\u5e74\u306b\u8a2d\u7acb\u3055\u308c\u305fLab-in-Fab\u578b\u7814\u7a76\u958b\u767a\u3067\u306f\u3001\u30c1\u30bf\u30f3\u9178\u30b8\u30eb\u30b3\u30f3\u9178\u925b\uff08PZT\uff09\u8584\u819c\u3092\u5f62\u6210\u3059\u308b\u7269\u7406\u6c17\u76f8\u6210\u9577\uff08PVD\uff09\u6cd5\u3092\u767a\u5c55\u3055\u305b\u3001\u925b\u542b\u6709\u91cf\u3092\u5f93\u6765\u306e\u30d0\u30eb\u30af\u5727\u96fb\u6280\u8853\u3068\u6bd4\u3079\u3066\u5927\u5e45\u306b\u524a\u6e1b\u3057\u305f\u3002\u3053\u306e\u521d\u671f\u306e\u6210\u529f\u304c\u3001\u4eca\u56de\u306e\u62e1\u5f35\u306b\u3064\u306a\u304c\u3063\u3066\u3044\u308b\u3002
\u3000\u5727\u96fbMEMS\u306f\u3001\u30b7\u30f3\u30ac\u30dd\u30fc\u30eb\u306e\u7814\u7a76\u958b\u767a\u306b\u304a\u3051\u308b\u91cd\u70b9\u9818\u57df\u306e1\u3064\u3002\u305d\u306e\u4ed6\u306e\u91cd\u70b9\u9818\u57df\u306b\u306f\u3001\u7570\u7a2e\u96c6\u7a4d\u6280\u8853\u306b\u57fa\u3065\u304f\u5148\u9032\u7684\u306a\u30d1\u30c3\u30b1\u30fc\u30b8\u30f3\u30b0\u6280\u8853\u3001\u30ef\u30a4\u30c9\u30d0\u30f3\u30c9\u30ae\u30e3\u30c3\u30d7\u534a\u5c0e\u4f53\uff08SiC\u3001GaN\u306a\u3069\uff09\u3001\u30df\u30ea\u6ce2RF\uff08\u7121\u7dda\u5468\u6ce2\u6570\uff09\u6280\u8853\u3001\u5148\u9032\u30d5\u30a9\u30c8\u30cb\u30af\u30b9\uff08\u30d5\u30e9\u30c3\u30c8\u30fb\u30aa\u30d7\u30c6\u30a3\u30af\u30b9\u3068\u30d5\u30a9\u30c8\u30cb\u30af\u30b9\u306e\u7570\u7a2e\u96c6\u7a4d\u6280\u8853\u306a\u3069\uff09\u304c\u3042\u308b\u3002\u3053\u308c\u3089\u306e\u91cd\u70b9\u9818\u57df\u306f\u3001\u30a4\u30ce\u30d9\u30fc\u30b7\u30e7\u30f3\u4e3b\u5c0e\u306e\u7d4c\u6e08\u304a\u3088\u3073\u793e\u4f1a\u306b\u5411\u3051\u305f\u30b7\u30f3\u30ac\u30dd\u30fc\u30eb\u306e\u767a\u5c55\u306b\u8ca2\u732e\u3059\u308b\u6280\u8853\u3068\u3057\u3066\u3001\u30b7\u30f3\u30ac\u30dd\u30fc\u30eb\u306e\u300c\u7814\u7a76\u30fb\u30a4\u30ce\u30d9\u30fc\u30b7\u30e7\u30f3\u30fb\u4f01\u696d2025\u8a08\u753b\u300d\uff08RIE 2025\uff09\u3067\u6307\u5b9a\u3055\u308c\u3066\u3044\u308b\u3002
\u3000Lab-in-Fab\u306f\u30b7\u30f3\u30ac\u30dd\u30fc\u30eb\u306e\u534a\u5c0e\u4f53\u30a8\u30b3\u30b7\u30b9\u30c6\u30e0\u306b\u304a\u3044\u3066\u91cd\u8981\u306a\u5f79\u5272\u3092\u679c\u305f\u3057\u3066\u304a\u308a\u3001\u30bb\u30f3\u30b5\u304a\u3088\u3073\u30a2\u30af\u30c1\u30e5\u30a8\u30fc\u30bf\u88fd\u54c1\u4f01\u696d\u3084\u30e1\u30fc\u30ab\u30fc\u3001\u305d\u306e\u30b5\u30d7\u30e9\u30a4\u30e4\u3068\u306e\u5171\u540c\u7814\u7a76\u3092\u4fc3\u9032\u3057\u3066\u3044\u308b\u3002Lab-in-Fab\u306e\u5148\u9032\u6750\u6599\u3084\u30c7\u30d0\u30a4\u30b9\u30fb\u30d7\u30e9\u30c3\u30c8\u30d5\u30a9\u30fc\u30e0\u3092\u30d9\u30fc\u30b9\u3068\u3057\u305f\u30de\u30eb\u30c1\u30fb\u30d7\u30ed\u30b8\u30a7\u30af\u30c8\u30fb\u30a6\u30a7\u30cf\uff081\u679a\u306e\u30a6\u30a7\u30cf\u306b\u8907\u6570\u306e\u4f01\u696d\u306e\u30c1\u30c3\u30d7\u3092\u96c6\u7a4d\u3059\u308b\u30d7\u30ed\u30b8\u30a7\u30af\u30c8\uff09\u30fb\u30b5\u30fc\u30d3\u30b9\u3092\u63d0\u4f9b\u3059\u308b\u3053\u3068\u3067\u3001\u30b7\u30f3\u30ac\u30dd\u30fc\u30eb\u306e\u9ad8\u7b49\u6559\u80b2\u6a5f\u95a2\u3068\u56fd\u969b\u7684\u306a\u9ad8\u7b49\u6559\u80b2\u6a5f\u95a2\u3092\u30b5\u30dd\u30fc\u30c8\u3057\u3066\u3044\u308b\u3002\u307e\u305f\u3001\u5727\u96fbMEMS\u5206\u91ce\u306b\u304a\u3051\u308b\u56fd\u5185\u304a\u3088\u3073\u30b0\u30ed\u30fc\u30d0\u30eb\u4eba\u6750\u306e\u80b2\u6210\u3092\u76ee\u7684\u3068\u3057\u3066\u3001\u30a4\u30f3\u30bf\u30fc\u30f3\u30b7\u30c3\u30d7\u3084\u535a\u58eb\u8ab2\u7a0b\u3067\u306e\u7814\u7a76\u6a5f\u4f1a\u3092\u63d0\u4f9b\u3057\u3066\u3044\u308b\u3002
\u3000MEMS\u306e\u30b0\u30ed\u30fc\u30d0\u30eb\u30fb\u30ea\u30fc\u30c0\u30fc\u3067\u3042\u308bST\u306f\u300120\u5e74\u4ee5\u4e0a\u306b\u308f\u305f\u308aMEMS\u5e02\u5834\u3067\u4e2d\u5fc3\u7684\u306a\u5f79\u5272\u3092\u679c\u305f\u3057\u3066\u304d\u305f\u3002IDM\uff08\u8a2d\u8a08\u30fb\u88fd\u9020\u3092\u62c5\u3046\u534a\u5c0e\u4f53\u30e1\u30fc\u30ab\u30fc\uff09\u306e\u30d3\u30b8\u30cd\u30b9\u30fb\u30e2\u30c7\u30eb\u3092\u6d3b\u7528\u3057\u3001\u8a2d\u8a08\u3068\u88fd\u9020\u3092\u7d71\u5408\u3059\u308b\u80fd\u529b\u306b\u3088\u3063\u3066\u9867\u5ba2\u3092\u30b5\u30dd\u30fc\u30c8\u3057\u3066\u3044\u308b\u3002
\u3000ST\u306f\u30b7\u30f3\u30ac\u30dd\u30fc\u30eb\u306e\u534a\u5c0e\u4f53\u696d\u754c\u306b\u3044\u3061\u65e9\u304f\u6295\u8cc7\u3057\u305f\u4f01\u696d\u306e1\u793e\u3002Lab-in-Fab\u578b\u7814\u7a76\u958b\u767a\u306fST\u306e\u30a2\u30f3\u30e2\u30ad\u30e7\u5de5\u5834\u306e\u91cd\u8981\u30a2\u30bb\u30c3\u30c8\u3068\u3057\u3066\u3001\u65e2\u5b58\u306e\u91cf\u7523\u6d3b\u52d5\u3092\u88dc\u5b8c\u3059\u308b\u3068\u3068\u3082\u306b\u3001\u30b7\u30f3\u30ac\u30dd\u30fc\u30eb\u306e\u534a\u5c0e\u4f53\u88fd\u9020\u30a8\u30b3\u30b7\u30b9\u30c6\u30e0\u306e\u767a\u5c55\u306b\u8ca2\u732e\u3057\u3066\u3044\u308b\u3002
\u3000\u4e3b\u8981\u30b9\u30c6\u30fc\u30af\u30db\u30eb\u30c0\u30fc\u306e\u30b3\u30e1\u30f3\u30c8\u306f\u6b21\u306e\u901a\u308a\u3002
David Horsley\u6559\u6388\uff08\u30ce\u30fc\u30b9\u30a4\u30fc\u30b9\u30bf\u30f3\u5927\u5b66 \u96fb\u6c17\u30fb\u30b3\u30f3\u30d4\u30e5\u30fc\u30bf\u5de5\u5b66 \u6559\u6388\uff09
\u3000\u300cLab-in-Fab\u304c\u5fdc\u529b\u306e\u5236\u5fa1\u3084\u30a8\u30c3\u30c1\u30f3\u30b0\u306a\u3069\u306e\u4e00\u822c\u7684\u306a\u8ab2\u984c\u3092\u89e3\u6c7a\u3057\u3066\u304f\u308c\u308b\u305f\u3081\u3001\u7814\u7a76\u8005\u306f\u7121\u99c4\u306a\u52b4\u529b\u3092\u8cbb\u3084\u3059\u3053\u3068\u306a\u304f\u81ea\u5206\u306e\u4f5c\u696d\u306b\u96c6\u4e2d\u3067\u304d\u307e\u3059\u300d
Fang Weileun\u6559\u6388\uff08\u56fd\u7acb\u6e05\u83ef\u5927\u5b66 \u7279\u4efb\u6559\u6388\uff09
\u3000\u300cLab-in-Fab\u306b\u3088\u308a\u3001\u7814\u7a76\u8005\u30b0\u30eb\u30fc\u30d7\u3084\u30b9\u30bf\u30fc\u30c8\u30a2\u30c3\u30d7\u304c\u72ec\u81ea\u306e\u88fd\u54c1\u3092\u958b\u767a\u3057\u3001\u91cf\u7523\u4f53\u5236\u3078\u306e\u79fb\u884c\u3092\u5927\u5e45\u306b\u7c21\u7565\u5316\u3067\u304d\u307e\u3059\u300d
Lu Yipeng\u6559\u6388\uff08\u5317\u4eac\u5927\u5b66 \u96c6\u7a4d\u56de\u8def\u5b66\u90e8 \u51c6\u6559\u6388\uff09
\u3000\u300cLab-in-Fab\u306e\u53d6\u308a\u7d44\u307f\u306f\u3001\u5727\u96fbMEMS\u6280\u8853\u306e\u767a\u5c55\u306b\u304a\u3044\u3066\u5927\u304d\u306a\u5909\u9769\u3092\u8d77\u3053\u3057\u307e\u3057\u305f\u3002\u516c\u5171\u90e8\u9580\u3068\u6c11\u9593\u90e8\u9580\u304c\u5354\u529b\u3057\u305f\u3053\u3068\u3067\u3001\u5358\u72ec\u3067\u306f\u4e0d\u53ef\u80fd\u3060\u3063\u305f\u98db\u8e8d\u7684\u306a\u9032\u6b69\u3092\u9054\u6210\u3067\u304d\u307e\u3057\u305f\u3002\u3053\u306e\u9769\u65b0\u7684\u306a\u30a8\u30b3\u30b7\u30b9\u30c6\u30e0\u306b\u53c2\u52a0\u3067\u304d\u305f\u3053\u3068\u3092\u8a87\u308a\u306b\u601d\u3044\u307e\u3059\u300d
\u7530\u4e2d\u79c0\u6cbb\u6559\u6388\uff08\u6771\u5317\u5927\u5b66 \u30ed\u30dc\u30c6\u30a3\u30af\u30b9\u5c02\u653b \u6559\u6388\uff09
\u3000\u300c\u958b\u767a\u306e\u81ea\u7531\u5ea6\u304c\u5927\u304d\u304f\u3001\u6240\u8981\u6642\u9593\u3092\u5927\u5e45\u306b\u77ed\u7e2e\u3067\u304d\u307e\u3059\u300d<\/p>\n","protected":false},"excerpt":{"rendered":"

\u3010\u534a\u5c0e\u4f53\u3011ST\u30de\u30a4\u30af\u30ed\u30a8\u30ec\u30af\u30c8\u30ed\u30cb\u30af\u30b9\u3001\u5727\u96fbMEMS\u6280\u8853\u306e\u767a\u5c55\u306b\u5411\u3051\u30b7\u30f3\u30ac\u30dd\u30fc\u30eb\u306e\u300cLab-in-Fab\u300d\u578b\u7814\u7a76\u958b\u767a\u306b\u304a\u3051\u308b\u5354\u529b\u62e1\u5927
\n\u3000\u591a\u7a2e\u591a\u69d8\u306a\u96fb\u5b50\u6a5f\u5668\u306b\u534a\u5c0e\u4f53\u3092\u63d0\u4f9b\u3059\u308b\u4e16\u754c\u7684\u534a\u5c0e\u4f53\u30e1\u30fc\u30ab\u30fc\u306eST\u30de\u30a4\u30af\u30ed\u30a8\u30ec\u30af\u30c8\u30ed\u30cb\u30af\u30b9\uff08\u4ee5\u4e0bST\uff09\u306f\u3001A*STAR\uff08\u30b7\u30f3\u30ac\u30dd\u30fc\u30eb\u79d1\u5b66\u6280\u8853\u7814\u7a76\u5e81\uff09\u306eInstitute of Microelectronics\uff08IME\uff09\u304a\u3088\u3073ULVAC\u793e\u3068\u5354\u529b\u3057\u3001\u30b7\u30f3\u30ac\u30dd\u30fc\u30eb\u306b\u304a\u3051\u308b\u300cLab-in-Fab\u300d\uff08LiF\uff09\u578b\u7814\u7a76\u958b\u767a\u3092\u62e1\u5927\u3059\u308b\u3053\u3068\u3092\u767a\u8868\u3057\u305f\u3002\u3053\u306e\u65b0\u305f\u306a\u6bb5\u968e\u3067\u306f\u3001\u30b7\u30f3\u30ac\u30dd\u30fc\u30eb\u306eA*STAR\u7269\u8cea\u6750\u6599\u5de5\u5b66\u7814\u7a76\u6240\uff08A*STAR IMRE\uff09\u304a\u3088\u3073\u30b7\u30f3\u30ac\u30dd\u30fc\u30eb\u56fd\u7acb\u5927\u5b66\uff08NUS\uff09\u3068\u306e\u30d7\u30ed\u30b8\u30a7\u30af\u30c8\u3092\u5b9f\u65bd\u3059\u308b\u3002
\n\u3000\u3053\u306e\u53d6\u308a\u7d44\u307f\u3067\u306f\u3001\u74b0\u5883\u306b\u512a\u3057\u3044\u925b\u30d5\u30ea\u30fc\u5727\u96fb\u6750\u6599\u306e\u958b\u767a\u63a8\u9032\u3068\u3001\u30b3\u30b9\u30c8\u52b9\u7387\u306b\u512a\u308c\u305f\u5c0f\u578b\u306e\u30bb\u30f3\u30b5\u304a\u3088\u3073\u30a2\u30af\u30c1\u30e5\u30a8\u30fc\u30bf\u3092\u5b9f\u73fe\u3057\u3066\u3044\u304f\u3002\u9ad8\u7b49\u6559\u80b2\u6a5f\u95a2\u3084\u30b9\u30bf\u30fc\u30c8\u30a2\u30c3\u30d7\u4f01\u696d\u3001\u4e2d\u5c0f\u4f01\u696d\u3001\u591a\u56fd\u7c4d\u4f01\u696d\u304c\u3001\u3053\u306e\u5305\u62ec\u7684\u306a\u88fd\u9020\u30e9\u30a4\u30f3\u3092\u6d3b\u7528\u3057\u3066\u3001\u5727\u96fbMEMS\uff08Micro-Electro-Mechanical Systems\uff09\u306e\u88fd\u54c1\u5316\u307e\u3067\u306e\u671f\u9593\u3092\u77ed\u7e2e\u3059\u308b\u3002\u88fd\u9020\u304c\u898b\u8fbc\u307e\u308c\u308b\u88fd\u54c1\u306b\u306f\u30013D\u30de\u30c3\u30d4\u30f3\u30b0\u304a\u3088\u3073\u30a4\u30e1\u30fc\u30b8\u30f3\u30b0\u5411\u3051\u5727\u96fbMEMS\u306e\u8d85\u97f3\u6ce2\u30c8\u30e9\u30f3\u30b9\u30c7\u30e5\u30fc\u30b5\uff08PMUT\uff09\u3084\u3001\u30d1\u30fc\u30bd\u30ca\u30eb\u96fb\u5b50\u6a5f\u5668\u5411\u3051\u5c0f\u578b\u30b9\u30d4\u30fc\u30ab\u3001\u30b9\u30de\u30fc\u30c8\u30d5\u30a9\u30f3\u306e\u30ab\u30e1\u30e9\u30fb\u30e2\u30b8\u30e5\u30fc\u30eb\u5411\u3051\u81ea\u52d5\u7126\u70b9\u30c7\u30d0\u30a4\u30b9\u306a\u3069\u304c\u3042\u308b\u3002
\n\u3000ST\u306e\u30a2\u30ca\u30ed\u30b0\u30fb\u30d1\u30ef\u30fc&\u30c7\u30a3\u30b9\u30af\u30ea\u30fc\u30c8\u30fbMEMS&\u30bb\u30f3\u30b5\u30b0\u30eb\u30fc\u30d7 \u30b0\u30eb\u30fc\u30d7\u30fb\u30d0\u30a4\u30b9\u30d7\u30ec\u30b8\u30c7\u30f3\u30c8 \u517c \u4e2d\u592e\u7814\u7a76\u958b\u767a\u62c5\u5f53\u30b8\u30a7\u30cd\u30e9\u30eb\u30fb\u30de\u30cd\u30fc\u30b8\u30e3\u3067\u3042\u308bAnton Hofmeister\u6c0f\u306f\u3001\u300cLab-in-Fab 2.0\u306b\u304a\u3044\u3066\u3001A*STAR IME\u3068ULVAC\u793e\u3068\u306e\u5354\u529b\u3092\u9032\u5c55\u3055\u305b\u3001A*STAR IMRE\u3068NUS\u3068\u306e\u65b0\u898f\u30d7\u30ed\u30b8\u30a7\u30af\u30c8\u3092\u958b\u59cb\u3067\u304d\u308b\u3053\u3068\u3092\u5927\u5909\u559c\u3070\u3057\u304f\u601d\u3044\u307e\u3059\u3002\u3053\u306e\u53d6\u308a\u7d44\u307f\u306f\u3001\u5727\u96fbMEMS\u6280\u8853\u306e\u30a4\u30ce\u30d9\u30fc\u30b7\u30e7\u30f3\u3092\u4fc3\u9032\u3057\u3001\u6b21\u4e16\u4ee3\u88fd\u54c1\u306e\u5e02\u5834\u6295\u5165\u3092\u652f\u63f4\u3057\u307e\u3059\u300d\u3068\u30b3\u30e1\u30f3\u30c8\u3057\u3066\u3044\u308b\u3002
\n\u3000A*STAR\u306e\u526f\u6700\u9ad8\u8cac\u4efb\u8005\uff08\u30a4\u30ce\u30d9\u30fc\u30b7\u30e7\u30f3\u304a\u3088\u3073\u30a8\u30f3\u30bf\u30fc\u30d7\u30e9\u30a4\u30ba\u62c5\u5f53\uff09\u3067\u3042\u308bYeo Yee Chia\u6559\u6388\u306f\u3001\u300c\u79c1\u305f\u3061\u306f\u3001\u6750\u6599\u3001\u30c4\u30fc\u30eb\u3001\u30d7\u30ed\u30bb\u30b9\u30fb\u30e2\u30b8\u30e5\u30fc\u30eb\u3001\u6280\u8853\u958b\u767a\u3001\u8a2d\u8a08\u3001\u88fd\u9020\u306b\u304a\u3051\u308b\u4e3b\u8981\u30a4\u30ce\u30d9\u30fc\u30bf\u9593\u306e\u9023\u643a\u3092\u5f37\u5316\u30fb\u62e1\u5927\u3059\u308b\u3053\u3068\u3067\u3001\u7814\u7a76\u958b\u767a\u306e\u6210\u679c\u3092\u5fdc\u7528\u3059\u308b\u65b9\u6cd5\u3092\u5909\u9769\u3057\u3088\u3046\u3068\u3057\u3066\u3044\u307e\u3059\u3002\u3053\u308c\u306b\u3088\u308a\u3001\u74b0\u5883\u306b\u512a\u3057\u3044\u925b\u30d5\u30ea\u30fc\u6750\u6599\u3092\u4f7f\u7528\u3057\u305f\u9ad8\u96fb\u529b\u52b9\u7387\u306e\u6b21\u4e16\u4ee3\u5727\u96fbMEMS\u88fd\u54c1\u306e\u5546\u54c1\u5316\u304c\u52a0\u901f\u3057\u3001\u4e16\u754c\u306e\u534a\u5c0e\u4f53\u30d0\u30ea\u30e5\u30fc\u30c1\u30a7\u30fc\u30f3\u306b\u304a\u3051\u308b\u30b7\u30f3\u30ac\u30dd\u30fc\u30eb\u306e\u5730\u4f4d\u3092\u5f37\u5316\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059\u300d\u3068\u30b3\u30e1\u30f3\u30c8\u3057\u3066\u3044\u308b\u3002
\n\u3000ULVAC\u793e\u306e\u57f7\u884c\u5f79\u54e1 \u517c \u88c5\u7f6e\u4e8b\u696d\u672c\u90e8 \u96fb\u5b50\u6a5f\u5668\u4e8b\u696d\u90e8\u9577\u306e\u5ca9\u4e95\u6cbb\u61b2\u6c0f\u306f\u300c\u3053\u306e\u753b\u671f\u7684\u306a\u53d6\u308a\u7d44\u307f\u306b\u53c2\u52a0\u3057\u3001\u5727\u96fbMEMS\u696d\u754c\u5411\u3051\u88fd\u9020\u6280\u8853\u30bd\u30ea\u30e5\u30fc\u30b7\u30e7\u30f3\u306e\u5f53\u793e\u306e\u6280\u8853\u529b\u3067\u8ca2\u732e\u3067\u304d\u308b\u3053\u3068\u3092\u5149\u6804\u306b\u601d\u3044\u307e\u3059\u300d\u3068\u30b3\u30e1\u30f3\u30c8\u3057\u3066\u3044\u308b\u3002
\n\u30002020\u5e74\u306b\u8a2d\u7acb\u3055\u308c\u305fLab-in-Fab\u578b\u7814\u7a76\u958b\u767a\u3067\u306f\u3001\u30c1\u30bf\u30f3\u9178\u30b8\u30eb\u30b3\u30f3\u9178\u925b\uff08PZT\uff09\u8584\u819c\u3092\u5f62\u6210\u3059\u308b\u7269\u7406\u6c17\u76f8\u6210\u9577\uff08PVD\uff09\u6cd5\u3092\u767a\u5c55\u3055\u305b\u3001\u925b\u542b\u6709\u91cf\u3092\u5f93\u6765\u306e\u30d0\u30eb\u30af\u5727\u96fb\u6280\u8853\u3068\u6bd4\u3079\u3066\u5927\u5e45\u306b\u524a\u6e1b\u3057\u305f\u3002\u3053\u306e\u521d\u671f\u306e\u6210\u529f\u304c\u3001\u4eca\u56de\u306e\u62e1\u5f35\u306b\u3064\u306a\u304c\u3063\u3066\u3044\u308b\u3002
\n\u3000\u5727\u96fbMEMS\u306f\u3001\u30b7\u30f3\u30ac\u30dd\u30fc\u30eb\u306e\u7814\u7a76\u958b\u767a\u306b\u304a\u3051\u308b\u91cd\u70b9\u9818\u57df\u306e1\u3064\u3002\u305d\u306e\u4ed6\u306e\u91cd\u70b9\u9818\u57df\u306b\u306f\u3001\u7570\u7a2e\u96c6\u7a4d\u6280\u8853\u306b\u57fa\u3065\u304f\u5148\u9032\u7684\u306a\u30d1\u30c3\u30b1\u30fc\u30b8\u30f3\u30b0\u6280\u8853\u3001\u30ef\u30a4\u30c9\u30d0\u30f3\u30c9\u30ae\u30e3\u30c3\u30d7\u534a\u5c0e\u4f53\uff08SiC\u3001GaN\u306a\u3069\uff09\u3001\u30df\u30ea\u6ce2RF\uff08\u7121\u7dda\u5468\u6ce2\u6570\uff09\u6280\u8853\u3001\u5148\u9032\u30d5\u30a9\u30c8\u30cb\u30af\u30b9\uff08\u30d5\u30e9\u30c3\u30c8\u30fb\u30aa\u30d7\u30c6\u30a3\u30af\u30b9\u3068\u30d5\u30a9\u30c8\u30cb\u30af\u30b9\u306e\u7570\u7a2e\u96c6\u7a4d\u6280\u8853\u306a\u3069\uff09\u304c\u3042\u308b\u3002\u3053\u308c\u3089\u306e\u91cd\u70b9\u9818\u57df\u306f\u3001\u30a4\u30ce\u30d9\u30fc\u30b7\u30e7\u30f3\u4e3b\u5c0e\u306e\u7d4c\u6e08\u304a\u3088\u3073\u793e\u4f1a\u306b\u5411\u3051\u305f\u30b7\u30f3\u30ac\u30dd\u30fc\u30eb\u306e\u767a\u5c55\u306b\u8ca2\u732e\u3059\u308b\u6280\u8853\u3068\u3057\u3066\u3001\u30b7\u30f3\u30ac\u30dd\u30fc\u30eb\u306e\u300c\u7814\u7a76\u30fb\u30a4\u30ce\u30d9\u30fc\u30b7\u30e7\u30f3\u30fb\u4f01\u696d2025\u8a08\u753b\u300d\uff08RIE 2025\uff09\u3067\u6307\u5b9a\u3055\u308c\u3066\u3044\u308b\u3002
\n\u3000Lab-in-Fab\u306f\u30b7\u30f3\u30ac\u30dd\u30fc\u30eb\u306e\u534a\u5c0e\u4f53\u30a8\u30b3\u30b7\u30b9\u30c6\u30e0\u306b\u304a\u3044\u3066\u91cd\u8981\u306a\u5f79\u5272\u3092\u679c\u305f\u3057\u3066\u304a\u308a\u3001\u30bb\u30f3\u30b5\u304a\u3088\u3073\u30a2\u30af\u30c1\u30e5\u30a8\u30fc\u30bf\u88fd\u54c1\u4f01\u696d\u3084\u30e1\u30fc\u30ab\u30fc\u3001\u305d\u306e\u30b5\u30d7\u30e9\u30a4\u30e4\u3068\u306e\u5171\u540c\u7814\u7a76\u3092\u4fc3\u9032\u3057\u3066\u3044\u308b\u3002Lab-in-Fab\u306e\u5148\u9032\u6750\u6599\u3084\u30c7\u30d0\u30a4\u30b9\u30fb\u30d7\u30e9\u30c3\u30c8\u30d5\u30a9\u30fc\u30e0\u3092\u30d9\u30fc\u30b9\u3068\u3057\u305f\u30de\u30eb\u30c1\u30fb\u30d7\u30ed\u30b8\u30a7\u30af\u30c8\u30fb\u30a6\u30a7\u30cf\uff081\u679a\u306e\u30a6\u30a7\u30cf\u306b\u8907\u6570\u306e\u4f01\u696d\u306e\u30c1\u30c3\u30d7\u3092\u96c6\u7a4d\u3059\u308b\u30d7\u30ed\u30b8\u30a7\u30af\u30c8\uff09\u30fb\u30b5\u30fc\u30d3\u30b9\u3092\u63d0\u4f9b\u3059\u308b\u3053\u3068\u3067\u3001\u30b7\u30f3\u30ac\u30dd\u30fc\u30eb\u306e\u9ad8\u7b49\u6559\u80b2\u6a5f\u95a2\u3068\u56fd\u969b\u7684\u306a\u9ad8\u7b49\u6559\u80b2\u6a5f\u95a2\u3092\u30b5\u30dd\u30fc\u30c8\u3057\u3066\u3044\u308b\u3002\u307e\u305f\u3001\u5727\u96fbMEMS\u5206\u91ce\u306b\u304a\u3051\u308b\u56fd\u5185\u304a\u3088\u3073\u30b0\u30ed\u30fc\u30d0\u30eb\u4eba\u6750\u306e\u80b2\u6210\u3092\u76ee\u7684\u3068\u3057\u3066\u3001\u30a4\u30f3\u30bf\u30fc\u30f3\u30b7\u30c3\u30d7\u3084\u535a\u58eb\u8ab2\u7a0b\u3067\u306e\u7814\u7a76\u6a5f\u4f1a\u3092\u63d0\u4f9b\u3057\u3066\u3044\u308b\u3002
\n\u3000MEMS\u306e\u30b0\u30ed\u30fc\u30d0\u30eb\u30fb\u30ea\u30fc\u30c0\u30fc\u3067\u3042\u308bST\u306f\u300120\u5e74\u4ee5\u4e0a\u306b\u308f\u305f\u308aMEMS\u5e02\u5834\u3067\u4e2d\u5fc3\u7684\u306a\u5f79\u5272\u3092\u679c\u305f\u3057\u3066\u304d\u305f\u3002IDM\uff08\u8a2d\u8a08\u30fb\u88fd\u9020\u3092\u62c5\u3046\u534a\u5c0e\u4f53\u30e1\u30fc\u30ab\u30fc\uff09\u306e\u30d3\u30b8\u30cd\u30b9\u30fb\u30e2\u30c7\u30eb\u3092\u6d3b\u7528\u3057\u3001\u8a2d\u8a08\u3068\u88fd\u9020\u3092\u7d71\u5408\u3059\u308b\u80fd\u529b\u306b\u3088\u3063\u3066\u9867\u5ba2\u3092\u30b5\u30dd\u30fc\u30c8\u3057\u3066\u3044\u308b\u3002
\n\u3000ST\u306f\u30b7\u30f3\u30ac\u30dd\u30fc\u30eb\u306e\u534a\u5c0e\u4f53\u696d\u754c\u306b\u3044\u3061\u65e9\u304f\u6295\u8cc7\u3057\u305f\u4f01\u696d\u306e1\u793e\u3002Lab-in-Fab\u578b\u7814\u7a76\u958b\u767a\u306fST\u306e\u30a2\u30f3\u30e2\u30ad\u30e7\u5de5\u5834\u306e\u91cd\u8981\u30a2\u30bb\u30c3\u30c8\u3068\u3057\u3066\u3001\u65e2\u5b58\u306e\u91cf\u7523\u6d3b\u52d5\u3092\u88dc\u5b8c\u3059\u308b\u3068\u3068\u3082\u306b\u3001\u30b7\u30f3\u30ac\u30dd\u30fc\u30eb\u306e\u534a\u5c0e\u4f53\u88fd\u9020\u30a8\u30b3\u30b7\u30b9\u30c6\u30e0\u306e\u767a\u5c55\u306b\u8ca2\u732e\u3057\u3066\u3044\u308b\u3002
\n\u3000\u4e3b\u8981\u30b9\u30c6\u30fc\u30af\u30db\u30eb\u30c0\u30fc\u306e\u30b3\u30e1\u30f3\u30c8\u306f\u6b21\u306e\u901a\u308a\u3002
\nDavid Horsley\u6559\u6388\uff08\u30ce\u30fc\u30b9\u30a4\u30fc\u30b9\u30bf\u30f3\u5927\u5b66 \u96fb\u6c17\u30fb\u30b3\u30f3\u30d4\u30e5\u30fc\u30bf\u5de5\u5b66 \u6559\u6388\uff09
\n\u3000\u300cLab-in-Fab\u304c\u5fdc\u529b\u306e\u5236\u5fa1\u3084\u30a8\u30c3\u30c1\u30f3\u30b0\u306a\u3069\u306e\u4e00\u822c\u7684\u306a\u8ab2\u984c\u3092\u89e3\u6c7a\u3057\u3066\u304f\u308c\u308b\u305f\u3081\u3001\u7814\u7a76\u8005\u306f\u7121\u99c4\u306a\u52b4\u529b\u3092\u8cbb\u3084\u3059\u3053\u3068\u306a\u304f\u81ea\u5206\u306e\u4f5c\u696d\u306b\u96c6\u4e2d\u3067\u304d\u307e\u3059\u300d
\nFang Weileun\u6559\u6388\uff08\u56fd\u7acb\u6e05\u83ef\u5927\u5b66 \u7279\u4efb\u6559\u6388\uff09
\n\u3000\u300cLab-in-Fab\u306b\u3088\u308a\u3001\u7814\u7a76\u8005\u30b0\u30eb\u30fc\u30d7\u3084\u30b9\u30bf\u30fc\u30c8\u30a2\u30c3\u30d7\u304c\u72ec\u81ea\u306e\u88fd\u54c1\u3092\u958b\u767a\u3057\u3001\u91cf\u7523\u4f53\u5236\u3078\u306e\u79fb\u884c\u3092\u5927\u5e45\u306b\u7c21\u7565\u5316\u3067\u304d\u307e\u3059\u300d
\nLu Yipeng\u6559\u6388\uff08\u5317\u4eac\u5927\u5b66 \u96c6\u7a4d\u56de\u8def\u5b66\u90e8 \u51c6\u6559\u6388\uff09
\n\u3000\u300cLab-in-Fab\u306e\u53d6\u308a\u7d44\u307f\u306f\u3001\u5727\u96fbMEMS\u6280\u8853\u306e\u767a\u5c55\u306b\u304a\u3044\u3066\u5927\u304d\u306a\u5909\u9769\u3092\u8d77\u3053\u3057\u307e\u3057\u305f\u3002\u516c\u5171\u90e8\u9580\u3068\u6c11\u9593\u90e8\u9580\u304c\u5354\u529b\u3057\u305f\u3053\u3068\u3067\u3001\u5358\u72ec\u3067\u306f\u4e0d\u53ef\u80fd\u3060\u3063\u305f\u98db\u8e8d\u7684\u306a\u9032\u6b69\u3092\u9054\u6210\u3067\u304d\u307e\u3057\u305f\u3002\u3053\u306e\u9769\u65b0\u7684\u306a\u30a8\u30b3\u30b7\u30b9\u30c6\u30e0\u306b\u53c2\u52a0\u3067\u304d\u305f\u3053\u3068\u3092\u8a87\u308a\u306b\u601d\u3044\u307e\u3059\u300d
\n\u7530\u4e2d\u79c0\u6cbb\u6559\u6388\uff08\u6771\u5317\u5927\u5b66 \u30ed\u30dc\u30c6\u30a3\u30af\u30b9\u5c02\u653b \u6559\u6388\uff09
\n\u3000\u300c\u958b\u767a\u306e\u81ea\u7531\u5ea6\u304c\u5927\u304d\u304f\u3001\u6240\u8981\u6642\u9593\u3092\u5927\u5e45\u306b\u77ed\u7e2e\u3067\u304d\u307e\u3059\u300d<\/p>\n

ST\u30de\u30a4\u30af\u30ed\u30a8\u30ec\u30af\u30c8\u30ed\u30cb\u30af\u30b9\u306b\u3064\u3044\u3066
\nST\u306f\u3001\u7d0450,000\u540d\u306e\u5f93\u696d\u54e1\u3092\u64c1\u3057\u3001\u5305\u62ec\u7684\u306a\u30b5\u30d7\u30e9\u30a4\u30fb\u30c1\u30a7\u30fc\u30f3\u3068\u6700\u5148\u7aef\u306e\u88fd\u9020\u8a2d\u5099\u3092\u6709\u3059\u308b\u4e16\u754c\u7684\u306a\u7dcf\u5408\u534a\u5c0e\u4f53\u30e1\u30fc\u30ab\u30fc\u3067\u3059\u3002\u7d0420\u4e07\u793e\u3092\u8d85\u3048\u308b\u304a\u5ba2\u69d8\u3084\u6570\u5343\u793e\u306e\u30d1\u30fc\u30c8\u30ca\u30fc\u4f01\u696d\u3068\u5354\u529b\u3057\u306a\u304c\u3089\u3001\u304a\u5ba2\u69d8\u306e\u30d3\u30b8\u30cd\u30b9\u5275\u51fa\u3084\u6301\u7d9a\u53ef\u80fd\u306a\u793e\u4f1a\u3092\u30b5\u30dd\u30fc\u30c8\u3059\u308b\u534a\u5c0e\u4f53\u30bd\u30ea\u30e5\u30fc\u30b7\u30e7\u30f3\u306e\u958b\u767a\u306a\u3089\u3073\u306b\u30a8\u30b3\u30b7\u30b9\u30c6\u30e0\u306e\u69cb\u7bc9\u306b\u53d6\u308a\u7d44\u3093\u3067\u3044\u307e\u3059\u3002ST\u306e\u30c6\u30af\u30ce\u30ed\u30b8\u30fc\u306f\u3001\u30b9\u30de\u30fc\u30c8\u30fb\u30e2\u30d3\u30ea\u30c6\u30a3\u3001\u96fb\u529b\u30a8\u30cd\u30eb\u30ae\u30fc\u7ba1\u7406\u306e\u52b9\u7387\u5316\u3001\u30af\u30e9\u30a6\u30c9\u63a5\u7d9a\u578b\u81ea\u5f8b\u30c7\u30d0\u30a4\u30b9\u306e\u666e\u53ca\u3092\u53ef\u80fd\u306b\u3057\u307e\u3059\u3002 ST\u306f\u3001\u3059\u3079\u3066\u306e\u76f4\u63a5\u30fb\u9593\u63a5\u6392\u51fa\uff08\u30b9\u30b3\u30fc\u30d71\u304a\u3088\u30732\uff09\u3001\u306a\u3089\u3073\u306b\u88fd\u54c1\u8f38\u9001\u3001\u5f93\u696d\u54e1\u306e\u51fa\u5f35\u30fb\u901a\u52e4\u306b\u3088\u308b\u6392\u51fa\uff08\u30b9\u30b3\u30fc\u30d73\u306e\u6ce8\u529b\u5206\u91ce\uff09\u306b\u304a\u3051\u308b\u30ab\u30fc\u30dc\u30f3\u30cb\u30e5\u30fc\u30c8\u30e9\u30eb\u9054\u6210\u306b\u5411\u3051\u305f\u53d6\u308a\u7d44\u307f\u3092\u9032\u3081\u3066\u304a\u308a\u30012027\u5e74\u672b\u307e\u3067\u306b\u518d\u751f\u53ef\u80fd\u30a8\u30cd\u30eb\u30ae\u30fc\u306e\u4f7f\u7528\u7387\u3092100\uff05\u306b\u3059\u308b\u8a08\u753b\u3067\u3059\u3002\u3055\u3089\u306b\u8a73\u3057\u3044\u60c5\u5831\u306fST\u306e\u30a6\u30a7\u30d6\u30b5\u30a4\u30c8\uff08http:\/\/www.st.com\uff09\u3092\u3054\u89a7\u304f\u3060\u3055\u3044\u3002<\/p>\n","protected":false},"author":6,"featured_media":0,"comment_status":"closed","ping_status":"","sticky":false,"template":"","format":"standard","meta":[],"categories":[17],"tags":[19],"_links":{"self":[{"href":"https:\/\/ctiweb.co.jp\/con\/wp-json\/wp\/v2\/posts\/18768"}],"collection":[{"href":"https:\/\/ctiweb.co.jp\/con\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/ctiweb.co.jp\/con\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/ctiweb.co.jp\/con\/wp-json\/wp\/v2\/users\/6"}],"replies":[{"embeddable":true,"href":"https:\/\/ctiweb.co.jp\/con\/wp-json\/wp\/v2\/comments?post=18768"}],"version-history":[{"count":2,"href":"https:\/\/ctiweb.co.jp\/con\/wp-json\/wp\/v2\/posts\/18768\/revisions"}],"predecessor-version":[{"id":18771,"href":"https:\/\/ctiweb.co.jp\/con\/wp-json\/wp\/v2\/posts\/18768\/revisions\/18771"}],"wp:attachment":[{"href":"https:\/\/ctiweb.co.jp\/con\/wp-json\/wp\/v2\/media?parent=18768"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/ctiweb.co.jp\/con\/wp-json\/wp\/v2\/categories?post=18768"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/ctiweb.co.jp\/con\/wp-json\/wp\/v2\/tags?post=18768"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}