{"id":24598,"date":"2025-11-13T17:23:53","date_gmt":"2025-11-13T08:23:53","guid":{"rendered":"https:\/\/ctiweb.co.jp\/con\/?p=24598"},"modified":"2025-11-19T10:37:01","modified_gmt":"2025-11-19T01:37:01","slug":"%e3%80%90%e5%8d%8a%e5%b0%8e%e4%bd%93%e3%80%91%e5%a4%aa%e9%99%bd%e3%83%9b%e3%83%bc%e3%83%ab%e3%83%87%e3%82%a3%e3%83%b3%e3%82%b0%e3%82%b9%e3%81%ae%e3%83%8d%e3%82%ac%e5%9e%8b%e6%84%9f%e5%85%89%e6%80%a7","status":"publish","type":"post","link":"https:\/\/ctiweb.co.jp\/con\/%e3%80%90%e5%8d%8a%e5%b0%8e%e4%bd%93%e3%80%91%e5%a4%aa%e9%99%bd%e3%83%9b%e3%83%bc%e3%83%ab%e3%83%87%e3%82%a3%e3%83%b3%e3%82%b0%e3%82%b9%e3%81%ae%e3%83%8d%e3%82%ac%e5%9e%8b%e6%84%9f%e5%85%89%e6%80%a7\/","title":{"rendered":"\u3010\u534a\u5c0e\u4f53\u3011\u592a\u967d\u30db\u30fc\u30eb\u30c7\u30a3\u30f3\u30b0\u30b9\u306e\u30cd\u30ac\u578b\u611f\u5149\u6027\u7d76\u7e01\u6750\u6599\u300cFPIM\u30b7\u30ea\u30fc\u30ba\u300d\u300112\u30a4\u30f3\u30c1\u30a6\u30a8\u30cf\u30fc\u4e0a\u3067CD1.6\u03bcm\u306e3\u5c64RDL\u5f62\u6210\u306b\u6210\u529f\u3002ICSJ2025\u3067\u8ad6\u6587\u767a\u8868"},"content":{"rendered":"<div class=\"wp-block-image\">\n<figure class=\"alignright size-full is-resized\"><img loading=\"lazy\" src=\"https:\/\/ctiweb.co.jp\/con\/wp-content\/uploads\/2025\/11\/image-50.png\" alt=\"\" class=\"wp-image-24600\" width=\"135\" height=\"182\" \/><figcaption><strong>\u88fd\u54c1\u30a4\u30e1\u30fc\u30b8<\/strong><\/figcaption><\/figure><\/div>\n\n\n<p>\u3000<a href=\"https:\/\/www.taiyo-hd.co.jp\/\"><strong><span style=\"color: #0000ff\">\u592a\u967d\u30db\u30fc\u30eb\u30c7\u30a3\u30f3\u30b0\u30b9<\/span><\/strong><\/a>\u306f\u30012025\u5e7411\u670813\u65e5\u3001\u300c<a href=\"https:\/\/www.ieee-csj.org\/\"><strong><span style=\"color: #0000ff\">14th IEEE CPMT Symposium Japan\uff08ICSJ2025\uff09<\/span><\/strong><\/a>\u300d\u306b\u304a\u3044\u3066\u3001\u6b21\u4e16\u4ee3\u534a\u5c0e\u4f53\u30d1\u30c3\u30b1\u30fc\u30b8\u30f3\u30b0\u7528\u6750\u6599\u3067\u3042\u308b\u3001\u30c0\u30de\u30b7\u30f3\u30d7\u30ed\u30bb\u30b9\u5411\u3051\u5fae\u7d30\u30d4\u30c3\u30c1RDL<sup>\u203b1<\/sup> \u30cd\u30ac\u578b\u611f\u5149\u6027\u7d76\u7e01\u6750\u6599\u300cFPIM<sup>TM<\/sup>\u30b7\u30ea\u30fc\u30ba\u300d\u306b\u95a2\u3057\u3001\u4e16\u754c\u6700\u5927\u7d1a\u306e\u534a\u5c0e\u4f53\u7814\u7a76\u6a5f\u95a2\u3067\u3042\u308b<a href=\"https:\/\/www.imec-int.com\/en\"><strong><span style=\"color: #0000ff\">imec<\/span><\/strong><\/a>\u3068\u306e\u5171\u8457\u8ad6\u6587\u300cDevelopment of 1.6 \u03bcm Fine-Pitch RDL Damascene Process using Low-NA i-Line Stepper and a New Negative-tone Photosensitive Dielectric Material\u300d\u3092\u767a\u8868\u3057\u305f\u3002<br \/>\u3000RDL\u306f\u3001\u3088\u308a\u52b9\u7387\u7684\u306a\u96fb\u6c17\u63a5\u7d9a\u306e\u305f\u3081\u534a\u5c0e\u4f53\u30d1\u30c3\u30b1\u30fc\u30b8\u30f3\u30b0\u306e\u6700\u5148\u7aef\u69cb\u9020\u306b\u304a\u3044\u3066\u91cd\u8981\u306a\u6280\u8853\u3067\u3042\u308a\u3001\u73fe\u5728\u306f\u4e3b\u306b\u30bb\u30df\u30a2\u30c7\u30a3\u30c6\u30a3\u30d6\u30d7\u30ed\u30bb\u30b9\uff08SAP\uff09<sup>\u203b2<\/sup> 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1.6\u03bcm\u3001\u30d3\u30a2\u5c64\u3067CD2.0\u03bcm\uff08\u30d3\u30a2\u4e2d\u5fc3\u9593\u30d4\u30c3\u30c1CD4.0\u03bcm\uff09\u3001RDL2\u5c64\u3067CD1.6\u03bcm\u3068\u76ee\u6a19\u5bf8\u6cd5\u3092\u9054\u6210\u3057\u305f\u3002\u3053\u308c\u306f\u3001\u4eca\u56de\u4f7f\u7528\u3057\u305fLow NA\u30b9\u30c6\u30c3\u30d1\u30fc<sup>\u203b5<\/sup> \u306b\u304a\u3051\u308b\u89e3\u50cf\u9650\u754c\u306b\u6975\u3081\u3066\u8fd1\u3044\u5024\u3002\u307e\u305fCD1.6\u03bcm\u306eRDL1\u5c64\u306b\u304a\u3051\u308b\u3001\u30ea\u30fc\u30af\u96fb\u6d41\u304a\u3088\u3073\u62b5\u6297\u306e\u96fb\u6c17\u7279\u6027\u306e\u8a55\u4fa1\u7d50\u679c\u3082\u826f\u597d\u3067\u3042\u3063\u305f\u3002\u4eca\u56de\u306eimec\u3068\u306e\u5171\u540c\u7814\u7a76\u306b\u3088\u308b\u6210\u679c\u3068\u3057\u3066\u3001\u540c\u6750\u6599\u306f\u3001\u512a\u308c\u305f\u96fb\u6c17\u7279\u6027\u3068\u3001\u9ad8\u89e3\u50cf\u6027\u3001\u307e\u305f\u3001CMP\u30d7\u30ed\u30bb\u30b9\u203b6 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\/>\u203b1\u3000 RDL\uff08\u518d\u914d\u7dda\u5c64\uff09\u306f\u3001\u534a\u5c0e\u4f53\u30c1\u30c3\u30d7\u8868\u9762\u306b\u5f62\u6210\u3055\u308c\u308b\u3001\u96fb\u6c17\u914d\u7dda\u3092\u518d\u5206\u914d\u3059\u308b\u305f\u3081\u306e\u5c64\u3002<br \/>\u203b2\u3000 \u5168\u4f53\u306b\u8584\u3044\u30b7\u30fc\u30c9\u5c64\u3092\u5f62\u6210\u5f8c\u3001\u914d\u7dda\u90e8\u5206\u3092\u96fb\u89e3\u3081\u3063\u304d\u306b\u3066\u30d1\u30bf\u30fc\u30f3\u5f62\u6210\u3059\u308b\u65b9\u6cd5\u3002<br \/>\u203b3\u3000\u7d76\u7e01\u819c\u4e0a\u306b\u914d\u7dda\u90e8\u5206\u306e\u6e9d\u3092\u5f62\u6210\u3057\u3001\u30b9\u30d1\u30c3\u30bf\u3001CVD\u3001\u96fb\u89e3\u3081\u3063\u304d\u306a\u3069\u3067\u6e9d\u3092\u57cb\u3081\u8fbc\u307f\u30d1\u30bf\u30fc\u30f3\u3092\u5f62\u6210\u3059\u308b\u65b9\u6cd5\u3002<br \/>\u203b4\u3000CD\uff08\u30af\u30ea\u30c6\u30a3\u30ab\u30eb\u30c7\u30a3\u30e1\u30f3\u30b7\u30e7\u30f3\uff09\u306f\u3001\u5fae\u7d30\u306a\u30d1\u30bf\u30fc\u30f3\u5bf8\u6cd5\u306e\u3053\u3068\u3002<br \/>\u203b5\u3000Veeco\u793e\u88fdLow NA\uff080.16\uff09i\u7dda\u9732\u5149\u88c5\u7f6eAP300\uff08\u7b2c\u4e00\u4e16\u4ee3\uff09\u3002<br \/>\u203b6\u3000CMP\u30d7\u30ed\u30bb\u30b9\uff08\u5316\u5b66\u6a5f\u68b0\u5e73\u5766\u5316\/\u7814\u78e8\uff09\u306f\u3001\u534a\u5c0e\u4f53\u88fd\u9020\u3067\u30a6\u30a8\u30cf\u30fc\u8868\u9762\u3092\u5316\u5b66\u7684\u30fb\u6a5f\u68b0\u7684\u306b\u5e73\u5766\u5316\u3059\u308b\u5de5\u7a0b\u3002<\/p>\n\n\n<div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full is-resized\"><img loading=\"lazy\" src=\"https:\/\/ctiweb.co.jp\/con\/wp-content\/uploads\/2025\/11\/image-49.png\" alt=\"\" class=\"wp-image-24599\" width=\"387\" height=\"144\" srcset=\"https:\/\/ctiweb.co.jp\/con\/wp-content\/uploads\/2025\/11\/image-49.png 1015w, https:\/\/ctiweb.co.jp\/con\/wp-content\/uploads\/2025\/11\/image-49-300x112.png 300w, https:\/\/ctiweb.co.jp\/con\/wp-content\/uploads\/2025\/11\/image-49-768x288.png 768w\" sizes=\"(max-width: 387px) 85vw, 387px\" \/><figcaption><strong>\u8a55\u4fa1\u7528\u30b5\u30f3\u30d7\u30eb\u69cb\u9020<\/strong><\/figcaption><\/figure><\/div>\n\n\n<p>\u25a0imec\u3068\u592a\u967d\u30db\u30fc\u30eb\u30c7\u30a3\u30f3\u30b0\u30b9\u306e\u9023\u643a\u306b\u3064\u3044\u3066<br>\u3000imec\u306f\u3001\u300cInteruniversity Microelectronics Centre\u300d\u306e\u7565\u79f0\u3067\u3001\u30d9\u30eb\u30ae\u30fc\u306b\u672c\u90e8\u3092\u7f6e\u304f\u4e16\u754c\u6700\u5927\u7d1a\u306e\u534a\u5c0e\u4f53\u7814\u7a76\u6a5f\u95a2\u3002\u4e16\u754c\u4e2d\u306e\u5927\u5b66\u3084\u4f01\u696d\u3068\u9023\u643a\u3059\u308b\u30aa\u30fc\u30d7\u30f3\u30a4\u30ce\u30d9\u30fc\u30b7\u30e7\u30f3\u3092\u63a8\u9032\u3057\u3001\u534a\u5c0e\u4f53\u6700\u5148\u7aef\u6280\u8853\u306e\u958b\u767a\u306b\u8ca2\u732e\u3057\u3066\u3044\u308b\u3002imec\u3068\u592a\u967d\u30db\u30fc\u30eb\u30c7\u30a3\u30f3\u30b0\u30b9\u306f\u30012022\u5e7410\u6708\u306b\u6b21\u4e16\u4ee3\u534a\u5c0e\u4f53\u30d1\u30c3\u30b1\u30fc\u30b8\u30f3\u30b0\u7528\u6750\u6599\u3067\u3042\u308b\u3001\u30c0\u30de\u30b7\u30f3\u30d7\u30ed\u30bb\u30b9\u5411\u3051\u5fae\u7d30\u30d4\u30c3\u30c1RDL\u30cd\u30ac\u578b\u611f\u5149\u6027\u7d76\u7e01\u6750\u6599\u306e\u5171\u540c\u7814\u7a76\u3092\u958b\u59cb\u3002\u592a\u967d\u30db\u30fc\u30eb\u30c7\u30a3\u30f3\u30b0\u30b9\u306f\u30012024\u5e7411\u6708\u3088\u308aimec\u3078\u99d0\u5728\u54e1\u3092\u6d3e\u9063\u3059\u308b\u306a\u3069\u3001\u3088\u308a\u5186\u6ed1\u306b\u9023\u643a\u304c\u53d6\u308c\u308b\u74b0\u5883\u3092\u6574\u3048\u3001\u65e5\u3005\u3001\u534a\u5c0e\u4f53\u5148\u7aef\u6750\u6599\u306e\u7814\u7a76\u958b\u767a\u3092\u884c\u3063\u3066\u3044\u308b\u3002<\/p>\n","protected":false},"excerpt":{"rendered":"<p>\u3010\u534a\u5c0e\u4f53\u3011\u592a\u967d\u30db\u30fc\u30eb\u30c7\u30a3\u30f3\u30b0\u30b9\u306e\u30cd\u30ac\u578b\u611f\u5149\u6027\u7d76\u7e01\u6750\u6599\u300cFPIM\u30b7\u30ea\u30fc\u30ba\u300d\u300112\u30a4\u30f3\u30c1\u30a6\u30a8\u30cf\u30fc\u4e0a\u3067CD1.6\u03bcm\u306e3\u5c64RDL\u5f62\u6210\u306b\u6210\u529f\u3002ICSJ2025\u306b\u3066\u8ad6\u6587\u767a\u8868\uff5e<br 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