{"id":29613,"date":"2026-04-07T09:10:32","date_gmt":"2026-04-07T00:10:32","guid":{"rendered":"https:\/\/ctiweb.co.jp\/con\/?p=29613"},"modified":"2026-04-07T09:10:32","modified_gmt":"2026-04-07T00:10:32","slug":"%e3%80%90%e7%b2%92%e5%ad%90%e8%a8%88%e6%95%b0%e6%a9%9f%e3%80%91%e3%83%aa%e3%82%aa%e3%83%b3%e3%80%81%e3%80%8c%e6%b5%81%e4%bd%93%e5%8a%9b%e5%ad%a6%e5%bc%8f%e6%b6%b2%e4%b8%ad%e7%b2%92%e5%ad%90%e8%a8%88","status":"publish","type":"post","link":"https:\/\/ctiweb.co.jp\/con\/%e3%80%90%e7%b2%92%e5%ad%90%e8%a8%88%e6%95%b0%e6%a9%9f%e3%80%91%e3%83%aa%e3%82%aa%e3%83%b3%e3%80%81%e3%80%8c%e6%b5%81%e4%bd%93%e5%8a%9b%e5%ad%a6%e5%bc%8f%e6%b6%b2%e4%b8%ad%e7%b2%92%e5%ad%90%e8%a8%88\/","title":{"rendered":"\u3010\u7c92\u5b50\u8a08\u6570\u6a5f\u3011\u30ea\u30aa\u30f3\u3001\u300c\u6d41\u4f53\u529b\u5b66\u5f0f\u6db2\u4e2d\u7c92\u5b50\u8a08\u6570\u5668 PT-01F\u300d\u3092\u767a\u58f2"},"content":{"rendered":"\n<p>\u3000<a href=\"https:\/\/particle.rion.co.jp\/\" target=\"_blank\" rel=\"noopener\"><span style=\"color: #0000ff\"><strong>\u30ea\u30aa\u30f3<\/strong><\/span><\/a>\u306f\u3001<a href=\"https:\/\/www.aist.go.jp\/\" target=\"_blank\" rel=\"noopener\"><span style=\"color: #0000ff\"><strong>\u7523\u696d\u6280\u8853\u7dcf\u5408\u7814\u7a76\u6240<\/strong><\/span><\/a>\u3001<a href=\"https:\/\/www.kioxia.com\/ja-jp\/top.html\" target=\"_blank\" rel=\"noopener\"><span style=\"color: #0000ff\"><strong>\u30ad\u30aa\u30af\u30b7\u30a2<\/strong><\/span><\/a>\u3068\u5171\u540c\u3067\u958b\u767a\u3057\u305f\u6d41\u308c\u5834\u7c92\u5b50\u8ffd\u8de1\u6cd5\uff08Flow Particle Tracking\uff1aFPT\u3001\u4ee5\u4e0bFPT\u6cd5)\u3092\u7528\u3044\u305f\u300c\u6d41\u308c\u5834\u4e2d\u306b\u304a\u3051\u308b\u7c92\u5b50\u306e\u7269\u6027\u63a8\u5b9a\u624b\u6cd5\u300d\u3092\u57fa\u306b\u3001\u4e16\u754c\u521d<sup>\u203b1<\/sup>\u3068\u306a\u308b\u300c\u6d41\u4f53\u529b\u5b66\u5f0f\u6db2\u4e2d\u7c92\u5b50\u8a08\u6570\u5668 PT-01F\u300d\u30922026\u5e744\u670810\u65e5\u306b\u767a\u58f2\u3059\u308b\u3002\u540c\u88fd\u54c1\u306f\u3001\u3053\u308c\u307e\u3067\u30ea\u30aa\u30f3\u304c\u84c4\u7a4d\u3057\u3066\u304d\u305f\u5149\u6563\u4e71\u6280\u8853\u3092\u57fa\u76e4\u3068\u3057\u3001\u65b0\u305f\u306b\u958b\u767a\u3057\u305fFPT\u6cd5\u3092\u7528\u3044\u308b\u3053\u3068\u3067\u3001\u6d41\u308c\u5834\u4e2d\u3067\u306e\u5fae\u7d30\u7c92\u5b50\u306e\u5927\u304d\u3055\u3001\u500b\u6570\u3001\u5c48\u6298\u7387\u306e\u8a08\u6e2c\u3092\u5b9f\u73fe\u3059\u308b\u3002\u5149\u6563\u4e71\u76f8\u5f53\u5f84\u306b\u3088\u308b\u7c92\u5b50\u500b\u6570\u6fc3\u5ea6\u5206\u5e03\u3092\u6e2c\u5b9a\u3059\u308b\u5f93\u6765\u306e\u5149\u6563\u4e71\u5f0f\u6db2\u4e2d\u30d1\u30fc\u30c6\u30a3\u30af\u30eb\u30ab\u30a6\u30f3\u30bf(\u4ee5\u4e0bLPC)\u3092\u9032\u5316\u3055\u305b\u305f\u65b0\u3057\u3044\u30b3\u30f3\u30bb\u30d7\u30c8\u306e\u5fae\u7c92\u5b50\u8a08\u6e2c\u88c5\u7f6e\u3002<\/p>\n<p>\u3000\u540c\u88fd\u54c1\u306f\u7c92\u5b50\u306e\u30d6\u30e9\u30a6\u30f3\u904b\u52d5\u3092\u8ffd\u8de1\u3001\u89e3\u6790\u3057\u3001\u62e1\u6563\u4fc2\u6570\u304b\u3089\u5e7e\u4f55\u5b66\u7684\u5bf8\u6cd5\u306b\u8fd1\u3044\u7c92\u5b50\u5f84\u3092\u7b97\u51fa\u3059\u308b\u3068\u540c\u6642\u306b\u3001\u540c\u4e00\u7c92\u5b50\u306e\u6563\u4e71\u5149\u5f37\u5ea6\u3092\u7528\u3044\u3066\u5c48\u6298\u7387\u3092\u63a8\u5b9a\u3059\u308b\u3053\u3068\u3067\u3001\u7c92\u5b50\u306e\u7269\u6027\u63a8\u5b9a\u3092\u30b5\u30dd\u30fc\u30c8\u3059\u308b\u3002\u3053\u308c\u306b\u3088\u308a\u3001\u5148\u7aef\u306e\u534a\u5c0e\u4f53\u88fd\u9020\u5de5\u7a0b\u306b\u304a\u3051\u308b\u8d85\u7d14\u6c34\u3001\u85ac\u6db2\u306e\u54c1\u8cea\u7ba1\u7406\u3084\u3001\u6b69\u7559\u307e\u308a\u4f4e\u4e0b\u306e\u539f\u56e0\u7a76\u660e\u306b\u5bc4\u4e0e\u3059\u308b\u3002<br \/><br \/>\u203b1 \u3000\u6d41\u308c\u5834\u306b\u304a\u3051\u308b\u7c92\u5b50\u306e\u7269\u6027\u63a8\u5b9a\u3092\u53ef\u80fd\u3068\u3059\u308b\u88fd\u54c1\u3068\u3057\u3066\uff082026\u5e743\u6708\u672b\u73fe\u5728\/\u30ea\u30aa\u30f3\u8abf\u3079\uff09<\/p>\n\n\n<div class=\"wp-block-image\">\n<figure class=\"aligncenter size-large\"><img loading=\"lazy\" width=\"1024\" height=\"414\" src=\"https:\/\/ctiweb.co.jp\/con\/wp-content\/uploads\/2026\/04\/5_original-1024x414.jpg\" alt=\"\" class=\"wp-image-29615\" srcset=\"https:\/\/ctiweb.co.jp\/con\/wp-content\/uploads\/2026\/04\/5_original-1024x414.jpg 1024w, https:\/\/ctiweb.co.jp\/con\/wp-content\/uploads\/2026\/04\/5_original-300x121.jpg 300w, https:\/\/ctiweb.co.jp\/con\/wp-content\/uploads\/2026\/04\/5_original-768x311.jpg 768w, https:\/\/ctiweb.co.jp\/con\/wp-content\/uploads\/2026\/04\/5_original-1536x622.jpg 1536w, https:\/\/ctiweb.co.jp\/con\/wp-content\/uploads\/2026\/04\/5_original-2048x829.jpg 2048w, https:\/\/ctiweb.co.jp\/con\/wp-content\/uploads\/2026\/04\/5_original-1200x486.jpg 1200w\" sizes=\"(max-width: 709px) 85vw, (max-width: 909px) 67vw, (max-width: 1362px) 62vw, 840px\" \/><figcaption>\u6d41\u4f53\u529b\u5b66\u5f0f\u6db2\u4e2d\u7c92\u5b50\u8a08\u6570\u5668 PT-01F<\/figcaption><\/figure><\/div>\n\n\n<p>\u3000\u8fd1\u5e74\u3001\u534a\u5c0e\u4f53\u88fd\u9020\u5de5\u7a0b\u306b\u304a\u3051\u308b\u8d85\u7d14\u6c34\u3084\u85ac\u6db2\u30e9\u30a4\u30f3\u306e\u7c92\u5b50\u7ba1\u7406\u3067\u306f\u3001\u6b69\u7559\u307e\u308a\u3084\u7a3c\u50cd\u7387\u306e\u5411\u4e0a\u3092\u56f3\u308b\u969b\u306b\u3001\u6db2\u4f53\u4e2d\u306e\u5fae\u7c92\u5b50\u306e\u5927\u304d\u3055\u3084\u6570\u306e\u60c5\u5831\u3060\u3051\u3067\u306a\u304f\u3001\u4f8b\u3048\u3070\u6c17\u6ce1\u3084\u30d5\u30c3\u7d20\u6a39\u8102\u3001\u91d1\u5c5e\u306a\u3069\u306e\u7d44\u6210\u60c5\u5831\u3092\u77e5\u308b\u3053\u3068\u304c\u6b20\u9665\u3084\u751f\u7523\u88c5\u7f6e\u4e0d\u5177\u5408\u306e\u539f\u56e0\u8ffd\u7a76\u30fb\u6539\u5584\u306e\u8fd1\u9053\u3068\u306a\u308b\u5834\u5408\u304c\u3042\u308a\u3001\u5e02\u5834\u304b\u3089\u306e\u8981\u671b\u304c\u9ad8\u307e\u3063\u3066\u3044\u308b\u3002\u7c92\u5b50\u6355\u96c6\u30d5\u30a3\u30eb\u30bf\u306e\u9078\u5b9a\u306b\u3042\u305f\u3063\u3066\u306f\u3001\u5e7e\u4f55\u5bf8\u6cd5\u306b\u8fd1\u3044\u7c92\u5b50\u5f84\u3092\u628a\u63e1\u3067\u304d\u308b\u3053\u3068\u304c\u91cd\u8981\u3067\u3042\u308a\u3001\u540c\u69d8\u306b\u5e02\u5834\u304b\u3089\u306e\u8981\u671b\u304c\u3042\u308b\u3002\u307e\u305f\u3001\u3053\u308c\u3089\u306e\u60c5\u5831\u3092\u30a4\u30f3\u30e9\u30a4\u30f3\u3067\u30ea\u30a2\u30eb\u30bf\u30a4\u30e0\u6e2c\u5b9a\u3092\u53ef\u80fd\u306b\u3059\u308b\u88c5\u7f6e\u304c\u6c42\u3081\u3089\u308c\u3066\u3044\u305f\u3002<\/p>\n\n\n\n<p>\u3000\u540c\u88fd\u54c1\u306f\u3001\u6771\u829d\u304c\u53d7\u8a17\u3057\u3001\u7523\u7dcf\u7814\u3068\u5171\u540c\u3067\u9032\u3081\u305f\u65b0\u30a8\u30cd\u30eb\u30ae\u30fc\u30fb\u7523\u696d\u6280\u8853\u7dcf\u5408\u958b\u767a\u6a5f\u69cb(NEDO)\u306e\u300c\u5e73\u621026\u5e74\u5ea6\u30a8\u30cd\u30eb\u30ae\u30fc\u30fb\u74b0\u5883\u65b0\u6280\u8853\u5148\u5c0e\u30d7\u30ed\u30b0\u30e9\u30e0\u300d\u306e\u4e00\u74b0\u3068\u3057\u3066\u5b9f\u65bd\u3055\u308c\u305f\u300c\u30ca\u30ce\u30c7\u30a3\u30d5\u30a7\u30af\u30c8\u30fb\u30de\u30cd\u30b8\u30e1\u30f3\u30c8\u306e\u57fa\u76e4\u6280\u8853\u306e\u7814\u7a76\u958b\u767a\u300d\u3067\u306e\u6210\u679c\u3092\u57fa\u3068\u3057\u3001\u30ea\u30aa\u30f3\u3001\u7523\u7dcf\u7814\u3001\u6771\u829d\u30e1\u30e2\u30ea\uff08\u73fe\uff1a\u30ad\u30aa\u30af\u30b7\u30a2\uff09\u306e\u4e09\u8005\u304c\u3001ISSM<sup>\u203b2<\/sup> 2018\u3067\u5171\u540c\u767a\u8868\u3057\u305f\u300c\u6d41\u308c\u5834\u4e2d\u306e\u500b\u4f53\u7c92\u5b50\u306e\u5e7e\u4f55\u5f84\u304a\u3088\u3073\u7269\u6027\u60c5\u5831\u304c\u5f97\u3089\u308c\u308b\u8a08\u6e2c\u88c5\u7f6e\u300d\u306e\u6280\u8853<sup>\u203b3<\/sup>\u3092\u6d3b\u7528\u3057\u3066\u3044\u308b\u3002<\/p>\n<p>\u30002016\u5e74\u304b\u30892018\u5e74\u306bNEDO\u306e\u300c\u8d85\u5148\u7aef\u6750\u6599\u8d85\u9ad8\u901f\u958b\u767a\u57fa\u76e4\u6280\u8853\u30d7\u30ed\u30b8\u30a7\u30af\u30c8\u300d\u306e\u300c\u5148\u7aef\u30ca\u30ce\u8a08\u6e2c\u8a55\u4fa1\u6280\u8853\u958b\u767a\u300d\u3092\u901a\u3058\u3066\u3001\u30ea\u30aa\u30f3\u3001\u7523\u7dcf\u7814\u3001\u6771\u829d\u30e1\u30e2\u30ea\u306e\u4e09\u8005\u306b\u3088\u308b\u88c5\u7f6e\u958b\u767a\u3092\u5171\u540c\u3067\u5b9f\u65bd\u3057\u3001\u305d\u306e\u5f8c\u3001\u56fd\u5185\u306e\u88c5\u7f6e\u3001\u6750\u6599\u3001\u30d1\u30fc\u30c4\u306a\u3069\u306e\u5404\u30e1\u30fc\u30ab\u30fc(16\u793e)\u3067\u5148\u884c\u8a55\u4fa1\u3092\u884c\u3044\u3001\u88fd\u54c1\u5316\u306b\u81f3\u3063\u305f\u3002<br \/><br \/>\u203b2 \u3000International Symposium on Semiconductor Manufacturing<br \/><br \/>\u203b3\u3000YE-O-68 : Takuya Tabuchi : Real Time Measurement of Exact Size and Refractive Index of Particles in Liquid by Flow Particle Tracking Method<br \/><br \/>\u8ad6\u6587\u306b\u95a2\u3059\u308b\u5185\u5bb9\u306f<span style=\"color: #0000ff\"><a style=\"color: #0000ff\" href=\"https:\/\/ieeexplore.ieee.org\/stamp\/stamp.jsp?tp=&amp;arnumber=8846234\" target=\"_blank\" rel=\"noopener\">\u3053\u3061\u3089<\/a><\/span>\u3092\u53c2\u7167<br \/><br \/>\u3000\u540c\u88fd\u54c1\u306f\u4ee5\u4e0b\u306e\u7279\u9577\u306b\u3088\u308a\u3001\u7c92\u5b50\u7ba1\u7406\u3092\u30b5\u30dd\u30fc\u30c8\u3059\u308b\u3002\u3053\u308c\u3089\u306e\u7279\u9577\u306b\u3066\u3001\u6b69\u7559\u307e\u308a\u306e\u6539\u5584\u306e\u307f\u306a\u3089\u305a\u3001\u4e0d\u5177\u5408\u8981\u56e0\u306e\u89e3\u6790\u901f\u5ea6\u306e\u5411\u4e0a\u3001\u751f\u7523\u8a2d\u5099\u306e\u7acb\u4e0a\u3052\u6642\u9593\u306e\u77ed\u7e2e\u306b\u5bc4\u4e0e\u3059\u308b\u3053\u3068\u304c\u671f\u5f85\u3055\u308c\u308b\u3002<br \/><br \/><strong>\u4e3b\u306a\u7279\u9577<\/strong><br \/>\u30fb\u30d6\u30e9\u30a6\u30f3\u904b\u52d5\u306e\u8ffd\u8de1\u3001\u89e3\u6790\u3092\u6d41\u308c\u5834\u4e2d\u3067\u53ef\u80fd\u3068\u3057\u305f\u3053\u3068\u306b\u3088\u308a\u3001\u30a4\u30f3\u30e9\u30a4\u30f3\u3067\u30ea\u30a2\u30eb\u30bf\u30a4\u30e0\u306b\u6e2c\u5b9a\u304c\u53ef\u80fd<br \/>\u30fb\u5e7e\u4f55\u5b66\u5f84\u306b\u3088\u308b\u7c92\u5b50\u500b\u6570\u6fc3\u5ea6\u5206\u5e03\u306e\u6e2c\u5b9a\u3068\u7c92\u5b50\u306e\u5c48\u6298\u7387\u3092\u540c\u6642\u306b\u7b97\u51fa\u3059\u308b\u3053\u3068\u3067\u3001\u7c92\u5b50\u306e\u5e7e\u4f55\u5bf8\u6cd5\u306b\u8fd1\u3044\u5927\u304d\u3055\u306e\u8a55\u4fa1\u3084\u7269\u6027\u63a8\u5b9a\u304c\u3067\u304d\u308b\u60c5\u5831\u3092\u5f97\u308b\u3053\u3068\u304c\u3067\u304d\u308b<br \/>\u30fb\u5c48\u6298\u7387\u3092\u7e26\u8ef8\u3001\u7c92\u5b50\u5f84\u3092\u6a2a\u8ef8\u3068\u3057\u305f\u7c92\u5b50\u306e\u983b\u5ea6\u5206\u5e03\u3092\u5c48\u6298\u7387\u30de\u30c3\u30d7\u3068\u3057\u3066\u8868\u793a\u3059\u308b<\/p>\n\n\n<div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full\"><img loading=\"lazy\" width=\"880\" height=\"414\" src=\"https:\/\/ctiweb.co.jp\/con\/wp-content\/uploads\/2026\/04\/4_original.png\" alt=\"\" class=\"wp-image-29614\" srcset=\"https:\/\/ctiweb.co.jp\/con\/wp-content\/uploads\/2026\/04\/4_original.png 880w, https:\/\/ctiweb.co.jp\/con\/wp-content\/uploads\/2026\/04\/4_original-300x141.png 300w, https:\/\/ctiweb.co.jp\/con\/wp-content\/uploads\/2026\/04\/4_original-768x361.png 768w\" sizes=\"(max-width: 709px) 85vw, (max-width: 909px) 67vw, (max-width: 1362px) 62vw, 840px\" \/><\/figure><\/div>\n\n\n<p>\u30fb\u7c92\u5b50\u5f8430 nm\u304b\u3089100 nm(\u7d14\u6c34\u4e2d\u306e\u6821\u6b63\u7528\u6a19\u6e96\u7c92\u5b50\u306e\u5834\u5408)\u3067\u3001\u5c48\u6298\u73871.0\u304b\u30892.6(\u5149\u5438\u53ce\u6027\u306e\u306a\u3044\u7c92\u5b50)\u306e\u7c92\u5b50\u304c\u6e2c\u5b9a\u53ef\u80fd<br \/>\u30fb\u6e2c\u5b9a\u7d50\u679c\u3092\u30ea\u30a2\u30eb\u30bf\u30a4\u30e0\u3067\u8868\u793a\u3057\u3001\u5373\u6642\u5224\u65ad\u304c\u3067\u304d\u308b<br \/>\u30fb\u63a5\u6db2\u90e8\u306b\u8010\u85ac\u54c1\u306e\u3042\u308b\u6750\u8cea\u3092\u63a1\u7528\u3057\u3066\u3044\u308b\u305f\u3081\u3001\u591a\u7a2e\u985e\u306e\u85ac\u6db2\u306e\u6e2c\u5b9a\u306b\u5bfe\u5fdc<br \/><br \/><strong>\u4e3b\u306a\u7528\u9014<\/strong><br \/>\u30fb\u534a\u5c0e\u4f53\u88fd\u9020\u5de5\u7a0b\u3067\u306e\u8d85\u7d14\u6c34\u3001\u85ac\u6db2\u306e\u7c92\u5b50\u7ba1\u7406<br \/>\u30fb\u6d17\u6d44\u5de5\u7a0b\uff08\u30a6\u30a7\u30cf\u30fb\u90e8\u54c1\uff09\u306e\u8a55\u4fa1<br \/><br \/>\u300c\u6d41\u4f53\u529b\u5b66\u5f0f\u6db2\u4e2d\u7c92\u5b50\u8a08\u6570\u5668 PT-01F\u300d\u306e\u6280\u8853\u60c5\u5831\u306f<a href=\"https:\/\/particle.rion.co.jp\/\" target=\"_blank\" rel=\"noopener\"><span style=\"color: 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