{"id":5628,"date":"2024-02-07T23:11:13","date_gmt":"2024-02-07T14:11:13","guid":{"rendered":"https:\/\/ctiweb.co.jp\/con\/?p=5628"},"modified":"2024-02-07T23:11:13","modified_gmt":"2024-02-07T14:11:13","slug":"%e3%80%90%e5%8d%8a%e5%b0%8e%e4%bd%93%e3%80%91%e3%83%88%e3%83%83%e3%83%91%e3%83%b3%e3%83%95%e3%82%a9%e3%83%88%e3%83%9e%e3%82%b9%e3%82%af%e3%80%81ibm%e3%81%a82nm%e3%83%97%e3%83%ad%e3%82%bb%e3%82%b9","status":"publish","type":"post","link":"https:\/\/ctiweb.co.jp\/con\/%e3%80%90%e5%8d%8a%e5%b0%8e%e4%bd%93%e3%80%91%e3%83%88%e3%83%83%e3%83%91%e3%83%b3%e3%83%95%e3%82%a9%e3%83%88%e3%83%9e%e3%82%b9%e3%82%af%e3%80%81ibm%e3%81%a82nm%e3%83%97%e3%83%ad%e3%82%bb%e3%82%b9\/","title":{"rendered":"\u3010\u534a\u5c0e\u4f53\u3011\u30c8\u30c3\u30d1\u30f3\u30d5\u30a9\u30c8\u30de\u30b9\u30af\u3001IBM\u30682nm\u30d7\u30ed\u30bb\u30b9\u6280\u8853\u5411\u3051EUV\u30d5\u30a9\u30c8\u30de\u30b9\u30af\u306e\u5171\u540c\u958b\u767a\u958b\u59cb"},"content":{"rendered":"\n<p>\u3000TOPPAN\u30db\u30fc\u30eb\u30c7\u30a3\u30f3\u30b0\u30b9\u306e\u30b0\u30eb\u30fc\u30d7\u4f1a\u793e\u3067\u3042\u308b<a href=\"https:\/\/www.photomask.co.jp\/\"><strong><span style=\"color: #0000ff\">\u30c8\u30c3\u30d1\u30f3\u30d5\u30a9\u30c8\u30de\u30b9\u30af<\/span><\/strong><\/a>\u306f\u3001\u6b21\u4e16\u4ee3\u534a\u5c0e\u4f53\u5411\u3051\u306e\u9ad8NA EUV\uff08\u203b1\uff09\u3092\u542b\u3080\u3001EUV\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\uff08\u203b2\uff09\u3092\u4f7f\u7528\u3057\u305f2nm\u30ed\u30b8\u30c3\u30af\u534a\u5c0e\u4f53\u30d7\u30ed\u30bb\u30b9\u30ce\u30fc\u30c9\uff08\u203b3\uff09\u5bfe\u5fdc\u306e\u30d5\u30a9\u30c8\u30de\u30b9\u30af\u306b\u95a2\u3059\u308b\u5171\u540c\u7814\u7a76\u958b\u767a\u5951\u7d04\u3092\u3001IBM\u3068\u7de0\u7d50\u3057\u305f\u3002<br>\u3000\u4eca\u56de\u306e\u5951\u7d04\u306b\u57fa\u3065\u304d\u30012024\u5e742\u6708\u304b\u30895\u5e74\u9593\u3001\u30a2\u30eb\u30d0\u30cb\u30fc\u30fb\u30ca\u30ce\u30c6\u30af\u30fb\u30b3\u30f3\u30d7\u30ec\u30c3\u30af\u30b9\uff08\u7c73\u56fd\u30cb\u30e5\u30fc\u30e8\u30fc\u30af\u5dde\uff09\uff08\u203b4\uff09\u3068\u30c8\u30c3\u30d1\u30f3\u30d5\u30a9\u30c8\u30de\u30b9\u30af\u306e\u671d\u971e\u5de5\u5834\uff08\u57fc\u7389\u770c\u65b0\u5ea7\u5e02\uff09\u3067\u3001\u30d5\u30a9\u30c8\u30de\u30b9\u30af\u958b\u767a\u3092\u5171\u540c\u3067\u884c\u3046\u3002<br><\/p>\n\n\n<div class=\"wp-block-image\">\n<figure class=\"aligncenter size-large is-resized\"><img loading=\"lazy\" src=\"https:\/\/ctiweb.co.jp\/con\/wp-content\/uploads\/2024\/02\/image-32-1024x576.png\" alt=\"\" class=\"wp-image-5629\" width=\"481\" height=\"270\" srcset=\"https:\/\/ctiweb.co.jp\/con\/wp-content\/uploads\/2024\/02\/image-32-1024x576.png 1024w, https:\/\/ctiweb.co.jp\/con\/wp-content\/uploads\/2024\/02\/image-32-300x169.png 300w, https:\/\/ctiweb.co.jp\/con\/wp-content\/uploads\/2024\/02\/image-32-768x432.png 768w, https:\/\/ctiweb.co.jp\/con\/wp-content\/uploads\/2024\/02\/image-32-1200x675.png 1200w, https:\/\/ctiweb.co.jp\/con\/wp-content\/uploads\/2024\/02\/image-32.png 1334w\" sizes=\"(max-width: 481px) 85vw, 481px\" \/><figcaption>EUV\u30d5\u30a9\u30c8\u30de\u30b9\u30af\u3000\u24d2 Toppan Photomask Co., Ltd.<\/figcaption><\/figure><\/div>\n\n\n<p>\u30002nm\u30ce\u30fc\u30c9\u4ee5\u7d30\u306e\u534a\u5c0e\u4f53\u306e\u91cf\u7523\u306b\u306f\u3001\u3053\u308c\u307e\u3067\u4e3b\u6d41\u3067\u3042\u3063\u305f\u300cArF\u30a8\u30ad\u30b7\u30de\u30ec\u30fc\u30b6\u30fc\uff08\u203b5\uff09\u300d\u3092\u5149\u6e90\u3068\u3059\u308b\u9732\u5149\u6280\u8853\u3092\u306f\u308b\u304b\u306b\u8d85\u3048\u308b\u3001\u9ad8\u5ea6\u306a\u6750\u6599\u9078\u629e\u3068\u30d7\u30ed\u30bb\u30b9\u5236\u5fa1\u306e\u77e5\u8b58\u304c\u5fc5\u8981\u3068\u306a\u308b\u3002\u4eca\u56de\u306e\u30c8\u30c3\u30d1\u30f3\u30d5\u30a9\u30c8\u30de\u30b9\u30af\u3068IBM\u306e\u5408\u610f\u306b\u3088\u308a\u3001\u4e21\u793e\u306e\u6301\u3064\u6750\u6599\u6280\u8853\u3068\u88fd\u9020\u30d7\u30ed\u30bb\u30b9\u5236\u5fa1\u6280\u8853\u3092\u878d\u5408\u3057\u30012nm\u30ce\u30fc\u30c9\u4ee5\u7d30\u306e\u534a\u5c0e\u4f53\u91cf\u7523\u306b\u5411\u3051\u305f\u30bd\u30ea\u30e5\u30fc\u30b7\u30e7\u30f3\u306e\u63d0\u4f9b\u3092\u76ee\u6307\u3059\u3002<\/p>\n\n\n\n<p><span style=\"color: #800000\">\u5171\u540c\u7814\u7a76\u958b\u767a\u306e\u80cc\u666f<\/span><br>\u3000\u30c8\u30c3\u30d1\u30f3\u30d5\u30a9\u30c8\u30de\u30b9\u30af\u306f\u30ef\u30fc\u30eb\u30c9\u30ef\u30a4\u30c9\u306a\u751f\u7523\u4f53\u5236\u3092\u69cb\u7bc9\u3059\u308b\u552f\u4e00\u306e\u30d5\u30a9\u30c8\u30de\u30b9\u30af\u30e1\u30fc\u30ab\u30fc\u3068\u3057\u3066\u3001\u534a\u5c0e\u4f53\u7528\u30d5\u30a9\u30c8\u30de\u30b9\u30af\u306e\u5916\u8ca9\u5e02\u5834\u306b\u304a\u3051\u308b\u30c8\u30c3\u30d7\u30b7\u30a7\u30a2\u3092\u5360\u3081\u3066\u304a\u308a\u3001EUV\u9732\u5149\u7528\u30de\u30b9\u30af\u3084\u57fa\u677f\u6750\u6599\u306e\u958b\u767a\u3068\u88fd\u9020\u306b\u7a4d\u6975\u7684\u306b\u53d6\u308a\u7d44\u3093\u3067\u3044\u308b\u3002\u307e\u305f\u3001\u6700\u5148\u7aef\u306e\u30de\u30eb\u30c1\u30d3\u30fc\u30e0\u63cf\u753b\u88c5\u7f6e\u3092\u8907\u6570\u53f0\u5c0e\u5165\u3057\u3001\u6700\u65b0\u306e\u534a\u5c0e\u4f53\u5e02\u5834\u306e\u8981\u6c42\u306b\u3082\u5fdc\u3048\u3066\u3044\u308b\u3002<br>\u3000IBM\u306e\u534a\u5c0e\u4f53\u958b\u767a\u306e\u53d6\u308a\u7d44\u307f\u306f\u3001\u30a2\u30eb\u30d0\u30cb\u30fc\u30fb\u30ca\u30ce\u30c6\u30af\u30fb\u30b3\u30f3\u30d7\u30ec\u30c3\u30af\u30b9\u306b\u3042\u308b\u7814\u7a76\u6240\u3092\u62e0\u70b9\u3068\u3057\u3066\u884c\u308f\u308c\u3066\u3044\u308b\u3002\u305d\u3053\u3067\u306f\u3001IBM\u306e\u7814\u7a76\u54e1\u305f\u3061\u304c\u516c\u5171\u6a5f\u95a2\u3084\u6c11\u9593\u4f01\u696d\u306e\u30d1\u30fc\u30c8\u30ca\u30fc\u3068\u7dca\u5bc6\u306b\u30b3\u30e9\u30dc\u30ec\u30fc\u30b7\u30e7\u30f3\u3057\u3001\u30ed\u30b8\u30c3\u30af\u30fb\u30b9\u30b1\u30fc\u30ea\u30f3\u30b0\u3084\u534a\u5c0e\u4f53\u306e\u80fd\u529b\u306e\u9650\u754c\u3092\u8d85\u3048\u308b\u305f\u3081\u306b\u50cd\u3044\u3066\u3044\u308b\u3002<br>\u3000\u3053\u308c\u307e\u3067\u4e21\u793e\u306f45nm\u30ce\u30fc\u30c9\u3092\u76ae\u5207\u308a\u306b\u300132nm\u300122\/20nm\u300114nm\u3068\u3044\u3063\u305f\u5404\u4e16\u4ee3\u306e\u5148\u7aef\u534a\u5c0e\u4f53\u7528\u30d5\u30a9\u30c8\u30de\u30b9\u30af\u3084\u3001\u521d\u671f\u6bb5\u968e\u306eEUV\u30d5\u30a9\u30c8\u30de\u30b9\u30af\u306e\u7814\u7a76\u30fb\u958b\u767a\u3092\u30012005\u5e74\u304b\u30892015\u5e74\u306b\u304b\u3051\u3066\u5171\u540c\u3067\u63a8\u9032\u3057\u3066\u3044\u305f\u3002\u3053\u306e\u305f\u3073\u65b0\u305f\u306a\u53d6\u308a\u7d44\u307f\u3068\u3057\u3066\u3001\u6b21\u4e16\u4ee3\u534a\u5c0e\u4f53\u5411\u3051\u306e\u9ad8NA 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EUV<br>\u3000\u9ad8NA\uff08Numerical Aperture\uff1a\u958b\u53e3\u6570\uff09 EUV\u306fEUV\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u306e\u9032\u5316\u5f62\u3067\u3001\u3088\u308a\u5fae\u7d30\u306a\u30d1\u30bf\u30fc\u30f3\u3092\u4f5c\u308b\u6280\u8853\u3002\u9ad8NA\u306f\u5149\u3092\u96c6\u3081\u3001\u5fae\u7d30\u306a\u69cb\u9020\u3092\u3088\u308a\u6b63\u78ba\u306b\u4f5c\u308a\u51fa\u3059\u3002\u3053\u308c\u306b\u3088\u308a\u3001\u534a\u5c0e\u4f53\u30c1\u30c3\u30d7\u306e\u6027\u80fd\u3084\u96fb\u529b\u52b9\u7387\u304c\u5411\u4e0a\u3059\u308b\u3002<br>\u203b2\u3000EUV\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3<br>\u3000\u6975\u7aef\u7d2b\u5916\u7dda\uff08EUV\uff09\u5149\uff08\u6ce2\u9577\u7d0413.5nm\uff09\u3092\u4f7f\u7528\u3057\u3001\u5fae\u7d30\u306a\u534a\u5c0e\u4f53\u30d1\u30bf\u30fc\u30f3\u3092\u4f5c\u6210\u3059\u308b\u6280\u8853\u3002\u3053\u306e\u77ed\u3044\u6ce2\u9577\u306f\u3001\u3088\u308a\u5fae\u7d30\u306a\u69cb\u9020\u3092\u53ef\u80fd\u306b\u3057\u3001\u534a\u5c0e\u4f53\u30c1\u30c3\u30d7\u306e\u6027\u80fd\u5411\u4e0a\u306b\u5bc4\u4e0e\u3059\u308b\u3002<br>\u203b3\u3000\u30d7\u30ed\u30bb\u30b9\u30ce\u30fc\u30c9<br>\u3000\u534a\u5c0e\u4f53\u306e\u88fd\u9020\u6280\u8853\uff08\u534a\u5c0e\u4f53\u30d7\u30ed\u30bb\u30b9\uff09\u306e\u4e16\u4ee3\u3092\u8868\u3059\u6307\u6a19\u3002<br>\u203b4\u3000\u30a2\u30eb\u30d0\u30cb\u30fc\u30fb\u30ca\u30ce\u30c6\u30af\u30fb\u30b3\u30f3\u30d7\u30ec\u30c3\u30af\u30b9<br>\u3000\u30cb\u30e5\u30fc\u30e8\u30fc\u30af\u5dde\u653f\u5e9c\u304c\u4e3b\u5c0e\u3057\u8a2d\u7acb\u3057\u305f\u30ca\u30ce\u96fb\u5b50\u5de5\u5b66\u306e\u7814\u7a76\u958b\u767a\u3092\u76ee\u7684\u3068\u3057\u305f\u7523\u5b66\u5b98\u30b3\u30f3\u30bd\u30fc\u30b7\u30a2\u30e0\u3002<br>\u203b5\u3000ArF\u30a8\u30ad\u30b7\u30de\u30ec\u30fc\u30b6\u30fc<br>\u3000\u534a\u5c0e\u4f53\u88fd\u9020\u3067\u7528\u3044\u3089\u308c\u308b\u7279\u6b8a\u306a\u5149\u6e90\u3002\u6ce2\u9577\u304c193nm\u3068\u975e\u5e38\u306b\u77ed\u3044\u305f\u3081\u3001\u5fae\u7d30\u306a\u30d1\u30bf\u30fc\u30f3\u3092\u5f62\u6210\u3059\u308b\u306e\u306b\u9069\u3057\u3066\u3044\u308b\u3002<\/p>\n","protected":false},"excerpt":{"rendered":"<p>\u3010\u534a\u5c0e\u4f53\u3011\u30c8\u30c3\u30d1\u30f3\u30d5\u30a9\u30c8\u30de\u30b9\u30af\u3001IBM\u30682nm\u30d7\u30ed\u30bb\u30b9\u6280\u8853\u5411\u3051EUV\u30d5\u30a9\u30c8\u30de\u30b9\u30af\u306e\u5171\u540c\u958b\u767a\u958b\u59cb<br \/>\n\u3000TOPPAN\u30db\u30fc\u30eb\u30c7\u30a3\u30f3\u30b0\u30b9\u306e\u30b0\u30eb\u30fc\u30d7\u4f1a\u793e\u3067\u3042\u308b\u30c8\u30c3\u30d1\u30f3\u30d5\u30a9\u30c8\u30de\u30b9\u30af\u306f\u3001\u6b21\u4e16\u4ee3\u534a\u5c0e\u4f53\u5411\u3051\u306e\u9ad8NA EUV\uff08\u203b1\uff09\u3092\u542b\u3080\u3001EUV\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\uff08\u203b2\uff09\u3092\u4f7f\u7528\u3057\u305f2nm\u30ed\u30b8\u30c3\u30af\u534a\u5c0e\u4f53\u30d7\u30ed\u30bb\u30b9\u30ce\u30fc\u30c9\uff08\u203b3\uff09\u5bfe\u5fdc\u306e\u30d5\u30a9\u30c8\u30de\u30b9\u30af\u306b\u95a2\u3059\u308b\u5171\u540c\u7814\u7a76\u958b\u767a\u5951\u7d04\u3092\u3001IBM\u3068\u7de0\u7d50\u3057\u305f\u3002<br \/>\n\u3000\u4eca\u56de\u306e\u5951\u7d04\u306b\u57fa\u3065\u304d\u30012024\u5e742\u6708\u304b\u30895\u5e74\u9593\u3001\u30a2\u30eb\u30d0\u30cb\u30fc\u30fb\u30ca\u30ce\u30c6\u30af\u30fb\u30b3\u30f3\u30d7\u30ec\u30c3\u30af\u30b9\uff08\u7c73\u56fd\u30cb\u30e5\u30fc\u30e8\u30fc\u30af\u5dde\uff09\uff08\u203b4\uff09\u3068\u30c8\u30c3\u30d1\u30f3\u30d5\u30a9\u30c8\u30de\u30b9\u30af\u306e\u671d\u971e\u5de5\u5834\uff08\u57fc\u7389\u770c\u65b0\u5ea7\u5e02\uff09\u3067\u3001\u30d5\u30a9\u30c8\u30de\u30b9\u30af\u958b\u767a\u3092\u5171\u540c\u3067\u884c\u3046\u3002<br \/>\n\u30002nm\u30ce\u30fc\u30c9\u4ee5\u7d30\u306e\u534a\u5c0e\u4f53\u306e\u91cf\u7523\u306b\u306f\u3001\u3053\u308c\u307e\u3067\u4e3b\u6d41\u3067\u3042\u3063\u305f\u300cArF\u30a8\u30ad\u30b7\u30de\u30ec\u30fc\u30b6\u30fc\uff08\u203b5\uff09\u300d\u3092\u5149\u6e90\u3068\u3059\u308b\u9732\u5149\u6280\u8853\u3092\u306f\u308b\u304b\u306b\u8d85\u3048\u308b\u3001\u9ad8\u5ea6\u306a\u6750\u6599\u9078\u629e\u3068\u30d7\u30ed\u30bb\u30b9\u5236\u5fa1\u306e\u77e5\u8b58\u304c\u5fc5\u8981\u3068\u306a\u308b\u3002\u4eca\u56de\u306e\u30c8\u30c3\u30d1\u30f3\u30d5\u30a9\u30c8\u30de\u30b9\u30af\u3068IBM\u306e\u5408\u610f\u306b\u3088\u308a\u3001\u4e21\u793e\u306e\u6301\u3064\u6750\u6599\u6280\u8853\u3068\u88fd\u9020\u30d7\u30ed\u30bb\u30b9\u5236\u5fa1\u6280\u8853\u3092\u878d\u5408\u3057\u30012nm\u30ce\u30fc\u30c9\u4ee5\u7d30\u306e\u534a\u5c0e\u4f53\u91cf\u7523\u306b\u5411\u3051\u305f\u30bd\u30ea\u30e5\u30fc\u30b7\u30e7\u30f3\u306e\u63d0\u4f9b\u3092\u76ee\u6307\u3059\u3002<\/p>\n<p>\u5171\u540c\u7814\u7a76\u958b\u767a\u306e\u80cc\u666f<br \/>\n\u3000\u30c8\u30c3\u30d1\u30f3\u30d5\u30a9\u30c8\u30de\u30b9\u30af\u306f\u30ef\u30fc\u30eb\u30c9\u30ef\u30a4\u30c9\u306a\u751f\u7523\u4f53\u5236\u3092\u69cb\u7bc9\u3059\u308b\u552f\u4e00\u306e\u30d5\u30a9\u30c8\u30de\u30b9\u30af\u30e1\u30fc\u30ab\u30fc\u3068\u3057\u3066\u3001\u534a\u5c0e\u4f53\u7528\u30d5\u30a9\u30c8\u30de\u30b9\u30af\u306e\u5916\u8ca9\u5e02\u5834\u306b\u304a\u3051\u308b\u30c8\u30c3\u30d7\u30b7\u30a7\u30a2\u3092\u5360\u3081\u3066\u304a\u308a\u3001EUV\u9732\u5149\u7528\u30de\u30b9\u30af\u3084\u57fa\u677f\u6750\u6599\u306e\u958b\u767a\u3068\u88fd\u9020\u306b\u7a4d\u6975\u7684\u306b\u53d6\u308a\u7d44\u3093\u3067\u3044\u308b\u3002\u307e\u305f\u3001\u6700\u5148\u7aef\u306e\u30de\u30eb\u30c1\u30d3\u30fc\u30e0\u63cf\u753b\u88c5\u7f6e\u3092\u8907\u6570\u53f0\u5c0e\u5165\u3057\u3001\u6700\u65b0\u306e\u534a\u5c0e\u4f53\u5e02\u5834\u306e\u8981\u6c42\u306b\u3082\u5fdc\u3048\u3066\u3044\u308b\u3002<br \/>\n\u3000IBM\u306e\u534a\u5c0e\u4f53\u958b\u767a\u306e\u53d6\u308a\u7d44\u307f\u306f\u3001\u30a2\u30eb\u30d0\u30cb\u30fc\u30fb\u30ca\u30ce\u30c6\u30af\u30fb\u30b3\u30f3\u30d7\u30ec\u30c3\u30af\u30b9\u306b\u3042\u308b\u7814\u7a76\u6240\u3092\u62e0\u70b9\u3068\u3057\u3066\u884c\u308f\u308c\u3066\u3044\u308b\u3002\u305d\u3053\u3067\u306f\u3001IBM\u306e\u7814\u7a76\u54e1\u305f\u3061\u304c\u516c\u5171\u6a5f\u95a2\u3084\u6c11\u9593\u4f01\u696d\u306e\u30d1\u30fc\u30c8\u30ca\u30fc\u3068\u7dca\u5bc6\u306b\u30b3\u30e9\u30dc\u30ec\u30fc\u30b7\u30e7\u30f3\u3057\u3001\u30ed\u30b8\u30c3\u30af\u30fb\u30b9\u30b1\u30fc\u30ea\u30f3\u30b0\u3084\u534a\u5c0e\u4f53\u306e\u80fd\u529b\u306e\u9650\u754c\u3092\u8d85\u3048\u308b\u305f\u3081\u306b\u50cd\u3044\u3066\u3044\u308b\u3002<br \/>\n\u3000\u3053\u308c\u307e\u3067\u4e21\u793e\u306f45nm\u30ce\u30fc\u30c9\u3092\u76ae\u5207\u308a\u306b\u300132nm\u300122\/20nm\u300114nm\u3068\u3044\u3063\u305f\u5404\u4e16\u4ee3\u306e\u5148\u7aef\u534a\u5c0e\u4f53\u7528\u30d5\u30a9\u30c8\u30de\u30b9\u30af\u3084\u3001\u521d\u671f\u6bb5\u968e\u306eEUV\u30d5\u30a9\u30c8\u30de\u30b9\u30af\u306e\u7814\u7a76\u30fb\u958b\u767a\u3092\u30012005\u5e74\u304b\u30892015\u5e74\u306b\u304b\u3051\u3066\u5171\u540c\u3067\u63a8\u9032\u3057\u3066\u3044\u305f\u3002\u3053\u306e\u305f\u3073\u65b0\u305f\u306a\u53d6\u308a\u7d44\u307f\u3068\u3057\u3066\u3001\u6b21\u4e16\u4ee3\u534a\u5c0e\u4f53\u5411\u3051\u306e\u9ad8NA 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