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\n
\"\"<\/figure><\/div>\n\n\n
\n
\u3000\u65e5\u7acb\u30cf\u30a4\u30c6\u30af<\/a><\/span>\u306f\u3001\u30d1\u30bf\u30fc\u30f3\u306a\u3057\u30a6\u30a7\u30fc\u30cf\u8868\u9762\u304a\u3088\u3073\u88cf\u9762\u306e\u7570\u7269\u3084\u6b20\u9665\u3092\u691c\u67fb\u3059\u308b\u300cLS9300AD\u300d\u3092\u767a\u58f2\u3057\u305f\u3002\u540c\u88fd\u54c1\u306f\u3001\u5f93\u6765\u306e\u6697\u8996\u91ce\u5f0f\u30ec\u30fc\u30b6\u30fc\u6563\u4e71\u306b\u3088\u308b\u5fae\u5c0f\u7570\u7269\u30fb\u6b20\u9665\u306e\u691c\u51fa\u306b\u52a0\u3048\u3066\u3001\u3053\u308c\u307e\u3067\u56f0\u96e3\u3060\u3063\u305f\u5fae\u5c0f\u306a\u51f9\u51f8\u72b6\u306e\u6b20\u9665\u691c\u51fa\u3092\u5b9f\u73fe\u3059\u308bDIC\uff08Differential Interference Contrast\uff09\u691c\u67fb\u6a5f\u80fd\u3092\u65b0\u305f\u306b\u642d\u8f09\u3057\u3001\u534a\u5c0e\u4f53\u30c7\u30d0\u30a4\u30b9\u306e\u5fae\u7d30\u5316\u30fb\u8907\u96d1\u5316\u304c\u9032\u3080\u4e2d\u3001\u4f4e\u30a2\u30b9\u30da\u30af\u30c8*1\u306a\u5fae\u5c0f\u6b20\u9665\u306e\u691c\u51fa\u3082\u53ef\u80fd\u306b\u306a\u3063\u305f\u3002\u307e\u305f\u3001\u691c\u67fb\u6642\u306e\u30a6\u30a7\u30fc\u30cf\u56fa\u5b9a\u65b9\u6cd5\u3084\u30b9\u30c6\u30fc\u30b8\u6a5f\u69cb\u306f\u5f93\u6765\u88fd\u54c1\u306b\u5f15\u304d\u7d9a\u304d\u30a6\u30a7\u30fc\u30cf\u30a8\u30c3\u30b8\u30b0\u30ea\u30c3\u30d7\u65b9\u5f0f*2\u3068\u56de\u8ee2\u30b9\u30c6\u30fc\u30b8\u3092\u642d\u8f09\u3057\u3001\u9ad8\u611f\u5ea6\u30fb\u9ad8\u30b9\u30eb\u30fc\u30d7\u30c3\u30c8\u306a\u30a6\u30a7\u30fc\u30cf\u4e21\u9762\u691c\u67fb\u3092\u5b9f\u73fe\u3059\u308b\u3002
\u3000\u65e5\u7acb\u30cf\u30a4\u30c6\u30af\u306f\u3001\u4f4e\u30a2\u30b9\u30da\u30af\u30c8\u306a\u5fae\u5c0f\u6b20\u9665\u306e\u691c\u51fa\u3092\u53ef\u80fd\u306b\u3057\u305f\u9ad8\u611f\u5ea6\u30fb\u9ad8\u30b9\u30eb\u30fc\u30d7\u30c3\u30c8\u306a\u672c\u88fd\u54c1\u3092\u30a6\u30a7\u30fc\u30cf\u30e1\u30fc\u30ab\u30fc\u306b\u63d0\u4f9b\u3059\u308b\u3053\u3068\u3067\u3001\u304a\u5ba2\u3055\u307e\u306e\u30a6\u30a7\u30fc\u30cf\u51fa\u8377\u6642\u306e\u691c\u67fb\u30b3\u30b9\u30c8\u524a\u6e1b\u304a\u3088\u3073\u534a\u5c0e\u4f53\u30c7\u30d0\u30a4\u30b9\u88fd\u9020\u306b\u304a\u3051\u308b\u6b69\u7559\u307e\u308a\u5411\u4e0a\u306b\u8ca2\u732e\u3059\u308b\u3002

<\/div>\n<\/div>\n
\n
\n

*1\u4f4e\u30a2\u30b9\u30da\u30af\u30c8\uff1a\u30a2\u30b9\u30da\u30af\u30c8\u6bd4\u3068\u306f\u3001\u5e83\u7fa9\u306b\u306f\u9577\u65b9\u5f62\u306e\u7e26\u6a2a\u6bd4\u3092\u8868\u3057\u3001\u672c\u30ea\u30ea\u30fc\u30b9\u306b\u304a\u3044\u3066\u3001\u300c\u4f4e\u30a2\u30b9\u30da\u30af\u30c8\u300d\u3068\u306f\u3001\u30a6\u30a7\u30fc\u30cf\u8868\u9762\u304a\u3088\u3073\u88cf\u9762\u306b\u5b58\u5728\u3059\u308b\u51f9\u51f8\u72b6\u306e\u6b20\u9665\u306b\u304a\u3044\u3066\u3001\u6df1\u3055\u3068\u5e45\u306e\u6bd4\u7387\u304c\u6975\u3081\u3066\u5c0f\u3055\u3044\u5fae\u5c0f\u6b20\u9665\u3092\u6307\u3059\u3002

*2 \u30a6\u30a7\u30fc\u30cf\u30a8\u30c3\u30b8\u30b0\u30ea\u30c3\u30d7\u65b9\u5f0f\uff1a\u691c\u67fb\u6642\u306e\u30a6\u30a7\u30fc\u30cf\u56fa\u5b9a\u3092\u7aef\uff08\u30a8\u30c3\u30b8\uff09\u306e\u307f\u306b\u3059\u308b\u65b9\u6cd5

\u25a0\u65b0\u88fd\u54c1\u958b\u767a\u306e\u80cc\u666f<\/strong>
\u3000\u30d1\u30bf\u30fc\u30f3\u306a\u3057\uff08\u56de\u8def\u30d1\u30bf\u30fc\u30f3\u5f62\u6210\u524d\uff09\u30a6\u30a7\u30fc\u30cf\u8868\u9762\u304a\u3088\u3073\u88cf\u9762\u691c\u67fb\u306f\u3001\u30a6\u30a7\u30fc\u30cf\u51fa\u8377\u30fb\u53d7\u3051\u5165\u308c\u6642\u306e\u54c1\u8cea\u4fdd\u8a3c\u3084\u3055\u307e\u3056\u307e\u306a\u534a\u5c0e\u4f53\u30c7\u30d0\u30a4\u30b9\u88fd\u9020\u5de5\u7a0b\u306e\u7570\u7269\u7ba1\u7406\u306a\u3069\u306b\u9069\u7528\u3055\u308c\u3066\u304d\u305f\u3002
\u3000\u30a6\u30a7\u30fc\u30cf\u30e1\u30fc\u30ab\u30fc\u306b\u304a\u3044\u3066\u306f\u3001\u30a6\u30a7\u30fc\u30cf\u88fd\u9020\u306e\u904e\u7a0b\u3067\u767a\u751f\u3059\u308b\u6b20\u9665\u3084\u7570\u7269\u3092\u691c\u67fb\u3059\u308b\u54c1\u8cea\u7ba1\u7406\u306b\u6d3b\u7528\u3055\u308c\u3066\u3044\u308b\u3002\u6628\u4eca\u3067\u306f\u3001\u534a\u5c0e\u4f53\u30c7\u30d0\u30a4\u30b9\u306e\u5fae\u7d30\u5316\u30fb\u8907\u96d1\u5316\u306b\u4f34\u3044\u3001\u534a\u5c0e\u4f53\u30c7\u30d0\u30a4\u30b9\u306e\u88fd\u9020\u5de5\u7a0b\u306b\u304a\u3044\u3066\u6b69\u7559\u307e\u308a\u306b\u5f71\u97ff\u3092\u4e0e\u3048\u308b\u6b20\u9665\u30fb\u7570\u7269\u306e\u30b5\u30a4\u30ba\u3082\u5fae\u5c0f\u306b\u306a\u308a\u3001\u30a6\u30a7\u30fc\u30cf\u8868\u9762\u30fb\u88cf\u9762\u306b\u5b58\u5728\u3059\u308b\u4f4e\u30a2\u30b9\u30da\u30af\u30c8\u306a\u5fae\u5c0f\u6b20\u9665\u3092\u542b\u3081\u305f\u3042\u3089\u3086\u308b\u30bf\u30a4\u30d7\u306e\u6b20\u9665\u7ba1\u7406\u306e\u30cb\u30fc\u30ba\u304c\u9ad8\u307e\u3063\u3066\u3044\u308b\u3002\u307e\u305f\u3001\u793e\u4f1a\u74b0\u5883\u306e\u5909\u5316\u306b\u5fdc\u3058\u3066\u7528\u9014\u3084\u4f7f\u7528\u91cf\u304c\u62e1\u5927\u3057\u3001\u534a\u5c0e\u4f53\u751f\u7523\u91cf\u306e\u5897\u52a0\u304c\u4e88\u60f3\u3055\u308c\u308b\u4e2d\u3001\u691c\u67fb\u30b3\u30b9\u30c8\u6291\u5236\u306e\u89b3\u70b9\u304b\u3089\u3082\u3001\u9ad8\u611f\u5ea6\u304b\u3064\u9ad8\u30b9\u30eb\u30fc\u30d7\u30c3\u30c8\u306a\u691c\u67fb\u88c5\u7f6e\u304c\u6c42\u3081\u3089\u308c\u3066\u3044\u308b\u3002<\/p>\n


\u25a0\u4e3b\u306a\u65b0\u6280\u8853<\/strong>
\u3000\u540c\u88fd\u54c1\u3067\u306f\u3001\u5f93\u6765\u306e\u6697\u8996\u91ce\u5f0f\u30ec\u30fc\u30b6\u30fc\u6563\u4e71\u306b\u52a0\u3048\u3001\u65b0\u6280\u8853\u3067\u3042\u308bDIC\u5149\u5b66\u7cfb\u3092\u642d\u8f09\u3059\u308b\u3053\u3068\u306b\u3088\u308a\u3001\u9ad8\u611f\u5ea6\u30fb\u9ad8\u30b9\u30eb\u30fc\u30d7\u30c3\u30c8\u691c\u67fb\u3068\u4f4e\u30a2\u30b9\u30da\u30af\u30c8\u306a\u5fae\u5c0f\u6b20\u9665\u691c\u51fa\u306e\u4e21\u7acb\u3092\u5b9f\u73fe\u3057\u305f\u3002

(1)\u00a0DIC\u5149\u5b66\u7cfb\u306e\u642d\u8f09
<\/u><\/strong>\u3000\u6697\u8996\u91ce\u7528\u30ec\u30fc\u30b6\u30fc\u3092\u30a6\u30a7\u30fc\u30cf\u8868\u9762\u306b\u7167\u5c04\u3057\u306a\u304c\u3089\u3001DIC\u7528\u30ec\u30fc\u30b6\u30fc\u304b\u3089\u3082\u5206\u96e2\u3057\u305f2\u5149\u7dda\u3092\u30a6\u30a7\u30fc\u30cf\u8868\u9762\u306e\u7570\u306a\u308b2\u70b9\u306b\u7167\u5c04\u3059\u308b\u3002DIC\u7528\u30ec\u30fc\u30b6\u30fc\u304b\u3089\u7167\u5c04\u3057\u305f2\u70b9\u306b\u304a\u3044\u3066\u3001\u30a6\u30a7\u30fc\u30cf\u8868\u9762\u306e\u9ad8\u3055\u306b\u76f8\u9055\u304c\u3042\u308b\u5834\u5408\u3001\u305d\u3053\u304b\u3089\u751f\u3058\u308b\u5fae\u5206\u5e72\u6e09\u4fe1\u53f7\u306e\u4f4d\u76f8\u5dee\u3088\u308a\u3001\u9ad8\u30b3\u30f3\u30c8\u30e9\u30b9\u30c8\u306a\u30a6\u30a7\u30fc\u30cf\u8868\u9762\u306e\u51f9\u51f8\u753b\u50cf\u3092\u5f62\u3059\u308b\u3002\u3053\u308c\u306b\u3088\u308a\u3001\u5f93\u6765\u691c\u51fa\u304c\u96e3\u3057\u304b\u3063\u305f\u30a6\u30a7\u30fc\u30cf\u8868\u9762\u306b\u5b58\u5728\u3059\u308b\u4f4e\u30a2\u30b9\u30da\u30af\u30c8\u5fae\u5c0f\u6b20\u9665\u306e\u9ad8\u3055\u3001\u9762\u7a4d\u3001\u4f4d\u7f6e\u60c5\u5831\u306a\u3069\u304c\u691c\u51fa\u53ef\u80fd\u3002

(2)\u00a0DIC\u5bfe\u5fdc\u65b0\u30c7\u30fc\u30bf\u51e6\u7406\u30b7\u30b9\u30c6\u30e0\u306e\u63a1\u7528
<\/u><\/strong>\u3000DIC\u5149\u5b66\u7cfb\u306e\u642d\u8f09\u306b\u4f34\u3044\u3001\u6697\u8996\u91ce\u5f0f\u30ec\u30fc\u30b6\u30fc\u6563\u4e71\u5149\u5b66\u7cfb\u3068DIC\u5149\u5b66\u7cfb\u306b\u3088\u308a\u5f97\u3089\u308c\u308b\u6b20\u9665\u60c5\u5831\u306e\u30c7\u30fc\u30bf\u51e6\u7406\u30b7\u30b9\u30c6\u30e0\u3092\u305d\u308c\u305e\u308c\u306b\u642d\u8f09\u3057\u305f\u3002\u3053\u308c\u306b\u3088\u308a\u3001\u6697\u8996\u91ce\u5f0f\u30ec\u30fc\u30b6\u30fc\u6563\u4e71\u3068DIC\u5149\u5b66\u7cfb\u306e\u691c\u67fb\u30de\u30c3\u30d7\u3092\u540c\u6642\u306b\u51fa\u529b\u3067\u304d\u3001\u691c\u67fb\u306e\u8fc5\u901f\u6027\u3092\u7dad\u6301\u3057\u306a\u304c\u3089\u3001\u4f4e\u30a2\u30b9\u30da\u30af\u30c8\u306a\u6b20\u9665\u30c7\u30fc\u30bf\u3092\u542b\u3080\u9ad8\u611f\u5ea6\u306a\u691c\u67fb\u3092\u5b9f\u73fe\u3057\u305f\u3002

\u3000\u65e5\u7acb\u30cf\u30a4\u30c6\u30af\u306f\u3001\u672c\u88fd\u54c1\u3092\u306f\u3058\u3081\u3068\u3059\u308b\u5149\u5b66\u6280\u8853\u3092\u7528\u3044\u305f\u30a6\u30a7\u30fc\u30cf\u691c\u67fb\u88c5\u7f6e\u3084\u96fb\u5b50\u7dda\u6280\u8853\u3092\u7528\u3044\u305f\u6e2c\u9577SEM\uff08CD-SEM*3\uff09\u306a\u3069\u306e\u88fd\u54c1\u3092\u901a\u3057\u3066\u3001\u304a\u5ba2\u3055\u307e\u306e\u534a\u5c0e\u4f53\u88fd\u9020\u30d7\u30ed\u30bb\u30b9\u306b\u304a\u3051\u308b\u52a0\u5de5\u30fb\u8a08\u6e2c\u30fb\u691c\u67fb\u5de5\u7a0b\u3067\u306e\u591a\u69d8\u306a\u30cb\u30fc\u30ba\u306b\u5bfe\u5fdc\u3057\u3066\u3044\u304f\u3002

\u3000\u4eca\u5f8c\u3082\u3001\u30d7\u30ed\u30c0\u30af\u30c8\u306b\u30c7\u30b8\u30bf\u30eb\u3092\u52a0\u3048\u305f\u9769\u65b0\u7684\u306a\u30bd\u30ea\u30e5\u30fc\u30b7\u30e7\u30f3\u3092\u30bf\u30a4\u30e0\u30ea\u30fc\u306b\u63d0\u4f9b\u3057\u7d9a\u3051\u308b\u3068\u3068\u3082\u306b\u3001\u304a\u5ba2\u3055\u307e\u3068\u3068\u3082\u306b\u65b0\u305f\u306a\u4fa1\u5024\u3092\u5275\u9020\u3057\u3001\u6700\u5148\u7aef\u306e\u30e2\u30ce\u3065\u304f\u308a\u306b\u8ca2\u732e\u3059\u308b\u3002<\/p>\n

*3 CD-SEM\uff08Critical Dimension-Scanning Electron Microscope\uff09\uff1a\u30a6\u30a7\u30fc\u30cf\u4e0a\u306b\u5f62\u6210\u3055\u308c\u305f\u534a\u5c0e\u4f53\u306e\u5fae\u7d30\u306a\u56de\u8def\u30d1\u30bf\u30fc\u30f3\u306e\u7dda\u5e45\u3084\u7a74\u5f84\u7b49\u306e\u5bf8\u6cd5\u3092\u9ad8\u7cbe\u5ea6\u306b\u8a08\u6e2c\u3059\u308b\u88c5\u7f6e<\/p>\n


\u25a0\u300cLS\u30b7\u30ea\u30fc\u30ba\u300d\u88fd\u54c1\u7d39\u4ecb\u30a6\u30a7\u30d6\u30b5\u30a4\u30c8
https:\/\/www.hitachi-hightech.com\/jp\/ja\/products\/semiconductor-manufacturing\/cd-sem\/inspection-solution\/ls.html\u00a0<\/a><\/span><\/p>\n



<\/p>\n<\/div>\n<\/div>\n\n\n","protected":false},"excerpt":{"rendered":"

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