{"id":29776,"date":"2026-04-09T12:28:12","date_gmt":"2026-04-09T03:28:12","guid":{"rendered":"https:\/\/ctiweb.co.jp\/con\/?p=29776"},"modified":"2026-04-09T12:30:23","modified_gmt":"2026-04-09T03:30:23","slug":"%e3%80%90%e3%83%ad%e3%82%b8%e3%83%83%e3%82%af%e3%83%81%e3%83%83%e3%83%97%e7%94%a8%e6%88%90%e8%86%9c%e8%a3%85%e7%bd%ae%e3%80%91%e3%82%a2%e3%83%97%e3%83%a9%e3%82%a4%e3%83%89-%e3%83%9e%e3%83%86%e3%83%aa","status":"publish","type":"post","link":"https:\/\/ctiweb.co.jp\/con\/%e3%80%90%e3%83%ad%e3%82%b8%e3%83%83%e3%82%af%e3%83%81%e3%83%83%e3%83%97%e7%94%a8%e6%88%90%e8%86%9c%e8%a3%85%e7%bd%ae%e3%80%91%e3%82%a2%e3%83%97%e3%83%a9%e3%82%a4%e3%83%89-%e3%83%9e%e3%83%86%e3%83%aa\/","title":{"rendered":"\u3010\u30ed\u30b8\u30c3\u30af\u30c1\u30c3\u30d7\u7528\u6210\u819c\u88c5\u7f6e\u3011\u30a2\u30d7\u30e9\u30a4\u30c9 \u30de\u30c6\u30ea\u30a2\u30eb\u30ba\u3001\u30aa\u30f3\u30b0\u30b9\u30c8\u30ed\u30fc\u30e0\u6642\u4ee3\u306e\u30ed\u30b8\u30c3\u30af\u30c1\u30c3\u30d7\u7528\u6210\u819c\u88c5\u7f6e\u3092\u767a\u8868"},"content":{"rendered":"\n<p>\u20223D Gate-All-Around\u30c8\u30e9\u30f3\u30b8\u30b9\u30bf\u306b\u5411\u3051\u305f\u539f\u5b50\u30b9\u30b1\u30fc\u30eb\u306e\u5fae\u7d30\u69cb\u9020\u3092\u5f62\u6210\u3059\u308b\u534a\u5c0e\u4f53\u88fd\u9020\u88c5\u7f6e<br>\u2022Precision\u2122 Selective Nitride PECVD\u306f\u30b7\u30e3\u30ed\u30fc \u30c8\u30ec\u30f3\u30c1 \u30a2\u30a4\u30bd\u30ec\u30fc\u30b7\u30e7\u30f3\u306e\u5b8c\u5168\u6027\u3092\u4fdd\u3061\u306a\u304c\u3089\u5bc4\u751f\u5bb9\u91cf\u3092\u4f4e\u6e1b\u3001\u30c1\u30c3\u30d7\u306e\u96fb\u529b\u52b9\u7387\u3092\u5927\u5e45\u306b\u6539\u5584<br>\u2022Trillium\u2122 ALD\u306f\u30b7\u30ea\u30b3\u30f3 \u30ca\u30ce\u30b7\u30fc\u30c8\u3092\u8907\u96d1\u306a\u30e1\u30bf\u30eb\u30b2\u30fc\u30c8\u30b9\u30bf\u30c3\u30af\u3067\u56f2\u307f\u3001\u5e83\u7bc4\u306aAI\u30b3\u30f3\u30d4\u30e5\u30fc\u30c6\u30a3\u30f3\u30b0\u7528\u9014\u306b\u6700\u9069\u5316\u3055\u308c\u305f\u30c8\u30e9\u30f3\u30b8\u30b9\u30bf\u3092\u5b9f\u73fe<br>\u2022\u8907\u6570\u306e\u5927\u624b\u30d5\u30a1\u30a6\u30f3\u30c9\u30ea\uff0f\u30ed\u30b8\u30c3\u30af\u30e1\u30fc\u30ab\u30fc\u304c2nm\u4ee5\u964d\u306e\u30d7\u30ed\u30bb\u30b9\u306b\u65b0\u88c5\u7f6e\u3092\u6d3b\u7528<br><br>\u3000<span style=\"color: #0000ff\"><a style=\"color: #0000ff\" href=\"https:\/\/www.appliedmaterials.com\/\" target=\"_blank\" rel=\"noopener\"><strong>\u30a2\u30d7\u30e9\u30a4\u30c9 \u30de\u30c6\u30ea\u30a2\u30eb\u30ba<\/strong><\/a><\/span>\uff08Applied Materials, Inc., Nasdaq AMAT\u3001\u672c\u793e\uff1a\u7c73\u56fd\u30ab\u30ea\u30d5\u30a9\u30eb\u30cb\u30a2\u5dde\u30b5\u30f3\u30bf\u30af\u30e9\u30e9\uff09\u306f4\u67088\u65e5\uff08\u73fe\u5730\u6642\u9593\uff09\u3001\u4e16\u754c\u6700\u5148\u7aef\u30ed\u30b8\u30c3\u30af\u30c1\u30c3\u30d7\u306e\u6975\u3081\u3066\u5fae\u7d30\u306a\u69cb\u9020\u3092\u5f62\u6210\u3059\u308b\u534a\u5c0e\u4f53\u88fd\u9020\u88c5\u7f6e2\u6a5f\u7a2e\u3092\u767a\u8868\u3057\u305f\u3002\u6750\u6599\u6210\u819c\u3092\u539f\u5b50\u30ec\u30d9\u30eb\u306e\u7cbe\u5ea6\u3067\u5236\u5fa1\u3057\u3001\u3088\u308a\u9ad8\u901f\u304b\u3064\u96fb\u529b\u52b9\u7387\u306e\u9ad8\u3044\u30c8\u30e9\u30f3\u30b8\u30b9\u30bf\u306e\u91cf\u7523\u5316\u3092\u901a\u3058\u3066\u30b0\u30ed\u30fc\u30d0\u30eb\u306aAI\u30a4\u30f3\u30d5\u30e9\u306e\u62e1\u5927\u30da\u30fc\u30b9\u3092\u7dad\u6301\u3059\u308b\u3002<br><br><\/p>\n\n\n<div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full\"><img loading=\"lazy\" width=\"861\" height=\"500\" src=\"https:\/\/ctiweb.co.jp\/con\/wp-content\/uploads\/2026\/04\/Precision-Selective-Nitride-PECVD-and-Endura-Trillium-ALD-rendering.png\" alt=\"\" class=\"wp-image-29778\" srcset=\"https:\/\/ctiweb.co.jp\/con\/wp-content\/uploads\/2026\/04\/Precision-Selective-Nitride-PECVD-and-Endura-Trillium-ALD-rendering.png 861w, https:\/\/ctiweb.co.jp\/con\/wp-content\/uploads\/2026\/04\/Precision-Selective-Nitride-PECVD-and-Endura-Trillium-ALD-rendering-300x174.png 300w, https:\/\/ctiweb.co.jp\/con\/wp-content\/uploads\/2026\/04\/Precision-Selective-Nitride-PECVD-and-Endura-Trillium-ALD-rendering-768x446.png 768w\" sizes=\"(max-width: 709px) 85vw, (max-width: 909px) 67vw, (max-width: 1362px) 62vw, 840px\" \/><\/figure><\/div>\n\n<div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full\"><img loading=\"lazy\" width=\"693\" height=\"500\" src=\"https:\/\/ctiweb.co.jp\/con\/wp-content\/uploads\/2026\/04\/Trillium-and-Selective-Nitride-GAA-Application.png\" alt=\"\" class=\"wp-image-29779\" srcset=\"https:\/\/ctiweb.co.jp\/con\/wp-content\/uploads\/2026\/04\/Trillium-and-Selective-Nitride-GAA-Application.png 693w, https:\/\/ctiweb.co.jp\/con\/wp-content\/uploads\/2026\/04\/Trillium-and-Selective-Nitride-GAA-Application-300x216.png 300w\" sizes=\"(max-width: 709px) 85vw, (max-width: 909px) 67vw, (max-width: 984px) 61vw, (max-width: 1362px) 45vw, 600px\" \/><\/figure><\/div>\n\n\n\n\n<p>\u3000AI\u30b3\u30f3\u30d4\u30e5\u30fc\u30c6\u30a3\u30f3\u30b0\u9700\u8981\u306e\u6025\u5897\u3092\u80cc\u666f\u306b\u3001\u534a\u5c0e\u4f53\u696d\u754c\u306f\u30d7\u30ed\u30bb\u30c3\u30b5\u30c1\u30c3\u30d7\u5185\u306b\u6570\u5343\u5104\u500b\u642d\u8f09\u3055\u308c\u308b\u30c8\u30e9\u30f3\u30b8\u30b9\u30bf1\u500b\u5f53\u305f\u308a\u304b\u3089\u3001\u3088\u308a\u9ad8\u3044\u30a8\u30cd\u30eb\u30ae\u30fc\u52b9\u7387\u6027\u80fd\u3092\u5f15\u304d\u51fa\u3059\u305f\u3081\u3001\u30b9\u30b1\u30fc\u30ea\u30f3\u30b0\u306e\u9650\u754c\u306b\u6311\u6226\u3057\u3066\u3044\u308b\u3002\u3053\u306e\u8ab2\u984c\u306b\u5fdc\u3048\u308b\u3079\u304f\u3001\u4e16\u754c\u6709\u6570\u306e\u30ed\u30b8\u30c3\u30af\u30e1\u30fc\u30ab\u30fc\u5404\u793e\u306f2nm\u30ce\u30fc\u30c9\u4ee5\u964d\u3067\u65b0\u305f\u306aGate-All-Around\uff08GAA\uff09\u30c8\u30e9\u30f3\u30b8\u30b9\u30bf\u3092\u5c0e\u5165\u3057\u3066\u3044\u308b\u3002GAA\u3078\u306e\u79fb\u884c\u306b\u3088\u308a\u3001\u540c\u4e00\u6d88\u8cbb\u96fb\u529b\u3067\u306e\u6027\u80fd\u304c\u5927\u5e45\u306b\u5411\u4e0a\u3059\u308b\u4e00\u65b9\u3067\u3001\u3053\u308c\u3092\u5b9f\u73fe\u3059\u308b\u30d7\u30ed\u30bb\u30b9\u306e\u8907\u96d1\u6027\u306f\u5287\u7684\u306b\u5897\u5927\u3059\u308b\u3002GAA\u30c8\u30e9\u30f3\u30b8\u30b9\u30bf\u5185\u90e8\u306e\u8907\u96d1\u306a3D\u69cb\u9020\u3092\u5f62\u6210\u3059\u308b\u305f\u3081\u306b\u306f500\u3092\u8d85\u3048\u308b\u5de5\u7a0b\u304c\u5fc5\u8981\u3068\u306a\u308a\u3001\u305d\u306e\u591a\u304f\u3067\u3001\u539f\u5b50\u30b5\u30a4\u30ba\u306b\u8feb\u308b\u53b3\u3057\u3044\u516c\u5dee\u5185\u3067\u3001\u3053\u308c\u307e\u3067\u306b\u306a\u3044\u7cbe\u5ea6\u30fb\u518d\u73fe\u6027\u30fb\u5236\u5fa1\u6027\u3092\u6301\u3064\u6210\u819c\u6280\u8853\u304c\u6c42\u3081\u3089\u308c\u308b\u3002<br>\u3000\u540c\u793e\u304c\u767a\u8868\u3057\u305f2\u3064\u306e\u534a\u5c0e\u4f53\u88fd\u9020\u88c5\u7f6e\u306f\u3001\u30de\u30c6\u30ea\u30a2\u30eb\u30a4 \u30ce\u30d9\u30fc\u30b7\u30e7\u30f3\u3092\u6d3b\u7528\u3057\u3001GAA\u30c8\u30e9\u30f3\u30b8\u30b9\u30bf\u306b\u7528\u3044\u308b\u304d\u308f\u3081\u3066\u8907\u96d1\u306a\u5fae\u7d30\u5f62\u72b6\u3092\u5f62\u6210\u3059\u308b\u3082\u306e\u3002\u3053\u308c\u3089\u306e\u65b0\u6280\u8853\u306f\u3001\u5148\u9032\u30c1\u30c3\u30d7\u306e\u6027\u80fd\u3068\u96fb\u529b\u52b9\u7387\u3092\u5927\u304d\u304f\u5de6\u53f3\u3059\u308b\u91cd\u8981\u306a\u91d1\u5c5e\u3084\u7d76\u7e01\u6750\u6599\u306e\u6210\u819c\u3092\u53ef\u80fd\u306b\u3059\u308b\u3002<br>\u3000\u30a2\u30d7\u30e9\u30a4\u30c9 \u30de\u30c6\u30ea\u30a2\u30eb\u30ba\u306e\u30bb\u30df\u30b3\u30f3\u30c0\u30af\u30bf \u30d7\u30ed\u30c0\u30af\u30c8\u30b0\u30eb\u30fc\u30d7 \u30d7\u30ec\u30b8\u30c7\u30f3\u30c8\u3001\u30d7\u30e9\u30d6\u30fc\u30fb\u30e9\u30b8\u30e3\u306f\u6b21\u306e\u3088\u3046\u306b\u8ff0\u3079\u3066\u3044\u308b\u3002\u300c\u696d\u754c\u306f\u975e\u7dda\u5f62\u306b\u6025\u5909\u3059\u308b\u6642\u4ee3\u3092\u8fce\u3048\u3064\u3064\u3042\u308a\u3001\u3082\u306f\u3084\u5f93\u6765\u306e\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u306b\u3088\u308b\u30c1\u30c3\u30d7\u30b9\u30b1\u30fc\u30ea\u30f3\u30b0\u3060\u3051\u3067\u306f\u4e0d\u5341\u5206\u3067\u3059\u3002\u6700\u5148\u7aef\u306e\u30ed\u30b8\u30c3\u30af\u30ce\u30fc\u30c9\u306f\u30aa\u30f3\u30b0\u30b9\u30c8\u30ed\u30fc\u30e0 \u30ec\u30d9\u30eb\u306b\u9054\u3057\u3066\u304a\u308a\u3001\u30c1\u30c3\u30d7\u306e\u6027\u80fd\u3068\u96fb\u529b\u52b9\u7387\u306f\u30de\u30c6\u30ea\u30a2\u30eb\u306b\u5927\u304d\u304f\u4f9d\u5b58\u3057\u307e\u3059\u3002\u30a2\u30d7\u30e9\u30a4\u30c9 \u30de\u30c6\u30ea\u30a2\u30eb\u30ba\u306f\u30de\u30c6\u30ea\u30a2\u30eb \u30a8\u30f3\u30b8\u30cb\u30a2\u30ea\u30f3\u30b0\u5206\u91ce\u306b\u304a\u3051\u308b\u5275\u696d\u4ee5\u6765\u306e\u30ea\u30fc\u30c9\u3092\u751f\u304b\u3057\u3001\u753b\u671f\u7684\u306a\u30c8\u30e9\u30f3\u30b8\u30b9\u30bf\u3092\u751f\u3080\u3053\u308c\u3089\u306e\u88fd\u9020\u88c5\u7f6e\u3092\u304a\u5ba2\u69d8\u306b\u63d0\u4f9b\u3057\u3066\u3001AI\u30b3\u30f3\u30d4\u30e5\u30fc\u30c6\u30a3\u30f3\u30b0 \u30ed\u30fc\u30c9\u30de\u30c3\u30d7\u306e\u57fa\u76e4\u3092\u56fa\u3081\u307e\u3059\u3002\u300d<\/p>\n\n\n\n<p><br><strong>Precision\u2122 Selective Nitride PECVD\uff1a\u30b7\u30e3\u30ed\u30fc \u30c8\u30ec\u30f3\u30c1 \u30a2\u30a4\u30bd\u30ec\u30fc\u30b7\u30e7\u30f3\u306e\u5b8c\u5168\u6027\u3092\u7dad\u6301<\/strong><br>\u3000\u958b\u767a\u304c\u9032\u3080\u6b21\u4e16\u4ee3AI\u7528\u306eGPU\u3067\u306f\u3001\u5207\u624b1\u679a\u307b\u3069\u306e\u9762\u7a4d\u306b3,000\u5104\u500b\u4ee5\u4e0a\u3082\u306e\u30c8\u30e9\u30f3\u30b8\u30b9\u30bf\u304c\u96c6\u7a4d\u3055\u308c\u308b\u3068\u898b\u8fbc\u307e\u308c\u3066\u3044\u308b\u3002\u305d\u306e\u969b\u306b\u7d76\u7e01\u5206\u96e2\uff08\u30a2\u30a4\u30bd\u30ec\u30fc\u30b7\u30e7\u30f3\uff09\u304c\u4e0d\u5341\u5206\u3060\u3068\u3001\u96a3\u308a\u5408\u3046\u30c8\u30e9\u30f3\u30b8\u30b9\u30bf\u9593\u3067\u96fb\u5b50\u304c\u62e1\u6563\u3057\u3001\u5bc4\u751f\u5bb9\u91cf\u304c\u767a\u751f\u3059\u308b\u307b\u304b\u3001\u4e0d\u6e2c\u306e\u96fb\u6c17\u7684\u76f8\u4e92\u4f5c\u7528\u304c\u751f\u3058\u3066\u3001\u4fe1\u53f7\u306e\u9045\u5ef6\u3001\u96fb\u529b\u306e\u30ed\u30b9\u3001\u30c1\u30c3\u30d7\u306e\u96fb\u529b\u52b9\u7387\uff08performance-per-watt\uff09\u4f4e\u4e0b\u306a\u3069\u3092\u5f15\u304d\u8d77\u3053\u3059\u6050\u308c\u304c\u3042\u308b\u3002<br><br>\u3000\u5148\u9032\u7684\u30c8\u30e9\u30f3\u30b8\u30b9\u30bf \u30a2\u30fc\u30ad\u30c6\u30af\u30c1\u30e3\u3067\u306f\u3001\u96a3\u63a5\u3059\u308b\u30c8\u30e9\u30f3\u30b8\u30b9\u30bf\u3092\u96fb\u6c17\u7684\u306b\u5206\u96e2\u3059\u308b\u624b\u6cd5\u3068\u3057\u3066\u30b7\u30e3\u30ed\u30fc \u30c8\u30ec\u30f3\u30c1 \u30a2\u30a4\u30bd\u30ec\u30fc\u30b7\u30e7\u30f3\uff08STI\uff09\u304c\u7528\u3044\u3089\u308c\u308b\u3002\u5177\u4f53\u7684\u306b\u306f\u3001\u30c8\u30e9\u30f3\u30b8\u30b9\u30bf\u9593\u306e\u8868\u9762\u306b\u30c8\u30ec\u30f3\u30c1\uff08\u6e9d\uff09\u3092\u30a8\u30c3\u30c1\u30f3\u30b0\u3057\u3001\u305d\u3053\u306b\u9178\u5316\u30b7\u30ea\u30b3\u30f3\u306a\u3069\u306e\u7d76\u7e01\u6750\u6599\u3092\u57cb\u3081\u8fbc\u3093\u3067\u3001\u96fb\u8377\u3092\u9694\u96e2\u3057\u4e0d\u8981\u306a\u30ea\u30fc\u30af\u3092\u9632\u6b62\u3059\u308b\u6280\u6cd5\u3002\u3057\u304b\u3057\u3001GAA\u30c7\u30d0\u30a4\u30b9\u306b\u304a\u3051\u308bSTI\u306f\u6975\u3081\u3066\u5fae\u7d30\u3067\u3042\u308b\u305f\u3081\u3001\u91cf\u7523\u5de5\u7a0b\u3092\u901a\u3058\u3066\u7d76\u7e01\u6027\u80fd\u306e\u7dad\u6301\u304c\u56f0\u96e3\u3067\u3059\u3002\u6e9d\u304c\u5f62\u6210\u3055\u308c\u305f\u5f8c\u3001\u591a\u6570\u306e\u5f8c\u7d9a\u5de5\u7a0b\u3092\u7d4c\u308b\u305f\u3081\u3001\u305d\u306e\u904e\u7a0b\u3067\u7d76\u7e01\u6750\u6599\u3067\u3042\u308b\u9178\u5316\u30b7\u30ea\u30b3\u30f3\u304c\u5f90\u3005\u306b\u640d\u8017\u3057\u3001\u30c1\u30c3\u30d7\u5168\u4f53\u306e\u6027\u80fd\u306b\u60aa\u5f71\u97ff\u3092\u53ca\u307c\u3059\u6050\u308c\u304c\u3042\u308b\u3002<br><br><a href=\"https:\/\/www.appliedmaterials.com\/us\/en\/product-library\/precision-selective-nitride-pecvd.html\" target=\"_blank\" rel=\"noopener\"><span style=\"color: #0000ff\"><strong>Applied Producer\u2122 Precision\u2122 Selective Nitride PECVD*<\/strong><\/span><\/a>\u3067\u306f\u3001\u696d\u754c\u521d\u306e\u9078\u629e\u7684\u30dc\u30c8\u30e0\u30a2\u30c3\u30d7\u6210\u819c\u30d7\u30ed\u30bb\u30b9\u306b\u3088\u308a\u3001\u30c8\u30ec\u30f3\u30c1\u5185\u3067\u5fc5\u8981\u306a\u90e8\u5206\u306b\u306e\u307f\u7a92\u5316\u30b7\u30ea\u30b3\u30f3\u3092\u6210\u819c\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u308b\u3002\u3055\u3089\u306b\u3001\u9178\u5316\u30b7\u30ea\u30b3\u30f3\u306e\u4e0a\u306b\u9ad8\u5bc6\u5ea6\u306e\u7a92\u5316\u30b7\u30ea\u30b3\u30f3\u3092\u6210\u819c\u3059\u308b\u3053\u3068\u3067\u3001\u5f8c\u5de5\u7a0b\u306b\u3088\u308b\u30ea\u30bb\u30b9\u3092\u9632\u304e\u7d76\u7e01\u6027\u304c\u7dad\u6301\u3055\u308c\u308b\u3002\u4f4e\u6e29\u30d7\u30ed\u30bb\u30b9\u306e\u305f\u3081\u3001\u4e0b\u5c64\u306e\u8584\u819c\u3084\u69cb\u9020\u4f53\u3078\u306e\u640d\u50b7\u3082\u56de\u907f\u3067\u304d\u308b\u3002\u7d76\u7e01\u6e9d\u306e\u5f62\u3068\u9ad8\u3055\u304c\u5143\u306e\u307e\u307e\u306a\u306e\u3067\u3001\u96fb\u6c17\u7684\u7279\u6027\u304c\u4e00\u5b9a\u306b\u4fdd\u305f\u308c\u3001\u5bc4\u751f\u5bb9\u91cf\u3084\u30ea\u30fc\u30af\u96fb\u6d41\u304c\u6e1b\u5c11\u3057\u3001\u30c7\u30d0\u30a4\u30b9\u5168\u4f53\u306e\u30d1\u30d5\u30a9\u30fc\u30de\u30f3\u30b9\u304c\u5927\u5e45\u306b\u5411\u4e0a\u3059\u308b\u3002<br><br>\u3000\u73fe\u5728\u3001\u8907\u6570\u306e\u5927\u624b\u30ed\u30b8\u30c3\u30af\u30c1\u30c3\u30d7\u30e1\u30fc\u30ab\u30fc\u304c2nm\u4ee5\u964d\u306eGAA\u30d7\u30ed\u30bb\u30b9\u30ce\u30fc\u30c9\u306bPrecision Selective Nitride PECVD\u306e\u63a1\u7528\u3092\u9032\u3081\u3066\u3044\u308b\u3002<br><br><strong>Trillium\u2122 ALD\uff1a\u539f\u5b50\u30b9\u30b1\u30fc\u30eb\u5747\u4e00\u6027\u3067\u8907\u96d1\u306a\u91d1\u5c5e\u30b2\u30fc\u30c8\u69cb\u9020\u3092\u5f62\u6210<\/strong><br>\u3000\u500b\u3005\u306eGAA\u30c8\u30e9\u30f3\u30b8\u30b9\u30bf\u306f\u30b9\u30a4\u30c3\u30c1\u3068\u3057\u3066\u6a5f\u80fd\u3059\u308b\u3002\u8907\u6570\u306e\u30e1\u30bf\u30eb\u5c64\u304b\u3089\u306a\u308b\u30b2\u30fc\u30c8\u30b9\u30bf\u30c3\u30af\u306f\u3057\u304d\u3044\u5024\u96fb\u5727\u3092\u6c7a\u5b9a\u3057\u3001\u30c8\u30e9\u30f3\u30b8\u30b9\u30bf\u306e\u30aa\u30f3\u30fb\u30aa\u30d5\u3092\u5236\u5fa1\u3059\u308b\u3002\u30c7\u30fc\u30bf\u30bb\u30f3\u30bf\u30fc\u304b\u3089\u30a8\u30c3\u30b8\u306b\u81f3\u308b\u30e6\u30cb\u30fc\u30af\u306a\u5404\u7a2eAI\u30ef\u30fc\u30af\u30ed\u30fc\u30c9\u306b\u5bfe\u5fdc\u3059\u308b\u305f\u3081\u3001\u30d4\u30fc\u30af\u30d1\u30d5\u30a9\u30fc\u30de\u30f3\u30b9\u7528\u306b\u30c1\u30e5\u30fc\u30cb\u30f3\u30b0\u3055\u308c\u305f\u9ad8\u901f\u30b9\u30a4\u30c3\u30c1\u3084\u3001\u96fb\u529b\u4f7f\u7528\u3092\u6700\u5c0f\u5316\u3059\u308b\u3088\u3046\u30c1\u30e5\u30fc\u30cb\u30f3\u30b0\u3055\u308c\u305f\u30b9\u30a4\u30c3\u30c1\u306a\u3069\u3001\u5e83\u7bc4\u306a\u30c8\u30e9\u30f3\u30b8\u30b9\u30bf\u8a2d\u8a08\u30aa\u30d7\u30b7\u30e7\u30f3\u304c\u30c1\u30c3\u30d7\u30e1\u30fc\u30ab\u30fc\u304b\u3089\u63d0\u4f9b\u3055\u308c\u3066\u3044\u308b\u3002\u3053\u3046\u3057\u305f\u30c8\u30ec\u30fc\u30c9\u30aa\u30d5\u306e\u9375\u3068\u306a\u308b\u306e\u304c\u3001\u9ad8\u7cbe\u5ea6\u30e1\u30bf\u30eb\u6210\u819c\u3092\u6d3b\u7528\u3057\u305f\u30e1\u30bf\u30eb\u30b2\u30fc\u30c8\u30b9\u30bf\u30c3\u30af\u306e\u6700\u9069\u5316\u3002<br><br>\u3000GAA\u30c8\u30e9\u30f3\u30b8\u30b9\u30bf\u3067\u306f\u300110nm\uff08\u30d2\u30c8\u306e\u6bdb\u9aea\u306e\u7d041\u4e07\u5206\u306e1\uff09\u9593\u9694\u3067\u5e73\u884c\u306b\u914d\u7f6e\u3055\u308c\u305f\u8907\u6570\u306e\u30ca\u30ce\u30b7\u30fc\u30c8\u306e\u5468\u56f2\u3092\u3001\u30b2\u30fc\u30c8\u30b9\u30bf\u30c3\u30af\u304c\u304f\u307e\u306a\u304f\u8986\u3046\u3002\u30b2\u30fc\u30c8\u30b9\u30bf\u30c3\u30af\u306b\u30ae\u30e3\u30c3\u30d7\u3084\u4e0d\u5747\u4e00\u304c\u3042\u308b\u3068\u3001\u30c8\u30e9\u30f3\u30b8\u30b9\u30bf\u306e\u30b9\u30a4\u30c3\u30c1\u30f3\u30b0\u7279\u6027\u306b\u3070\u3089\u3064\u304d\u304c\u751f\u3058\u3001\u30c1\u30c3\u30d7\u306e\u6027\u80fd\u3001\u6d88\u8cbb\u96fb\u529b\u3001\u4fe1\u983c\u6027\u3001\u6b69\u7559\u307e\u308a\u306b\u60aa\u5f71\u97ff\u304c\u53ca\u3073\u304b\u306d\u306a\u3044\u3002\u5f93\u6765\u306e\u30e1\u30bf\u30eb\u6210\u819c\u624b\u6cd5\u3067\u306f\u3001\u3053\u3046\u3057\u305f\u7a76\u6975\u306e\u8981\u6c42\u306b\u5fdc\u3048\u308b\u306e\u306f\u56f0\u96e3\u3067\u3042\u3063\u305f\u3002<br><br><a href=\"https:\/\/www.appliedmaterials.com\/us\/en\/product-library\/endura-trillium-ald.html\" target=\"_blank\" rel=\"noopener\"><span style=\"color: #0000ff\"><strong>Applied Endura\u2122 Trillium\u2122 ALD**<\/strong><\/span><\/a>\u306f\u3001\u304d\u308f\u3081\u3066\u8907\u96d1\u306aGAA\u30c8\u30e9\u30f3\u30b8\u30b9\u30bf \u30b2\u30fc\u30c8 \u30b9\u30bf\u30c3\u30af\u306b\u7cbe\u5bc6\u306a\u30e1\u30bf\u30eb\u6210\u819c\u3092\u65bd\u3059\u3088\u3046\u8a2d\u8a08\u3055\u308c\u305f<a href=\"https:\/\/www.appliedmaterials.com\/us\/en\/semiconductor\/solutions-and-software\/ims.html\" target=\"_blank\" rel=\"noopener\"><span style=\"color: #0000ff\"><strong>Integrated Materials Solution\u2122<\/strong><\/span><\/a>\u3002\u3053\u306e\u88c5\u7f6e\u306f\u3001\u30a2\u30d7\u30e9\u30a4\u30c9 \u30de\u30c6\u30ea\u30a2\u30eb\u30ba\u304c\u30e1\u30bf\u30ebALD\u6280\u8853\u3067\u57f9\u3063\u3066\u304d\u305f\u30ea\u30fc\u30c0\u30fc\u30b7\u30c3\u30d7\u3092\u5148\u9032\u30c8\u30e9\u30f3\u30b8\u30b9\u30bf \u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u306b\u5fdc\u7528\u3057\u305f\u3082\u306e\u3002\u8907\u6570\u306e\u30e1\u30bf\u30eb\u6210\u819c\u30b9\u30c6\u30c3\u30d7\u3092\u5358\u4e00\u30d7\u30e9\u30c3\u30c8\u30d5\u30a9\u30fc\u30e0\u306b\u30a4\u30f3\u30c6\u30b0\u30ec\u30fc\u30c8\u3057\u305fTrillium\u306f\u3001\u5404\u7a2e\u306e\u30c8\u30e9\u30f3\u30b8\u30b9\u30bf\u306b\u5408\u308f\u305b\u305f\u67d4\u8edf\u306a\u3057\u304d\u3044\u5024\u96fb\u5727\u306e\u30c1\u30e5\u30fc\u30cb\u30f3\u30b0\u3092\u53ef\u80fd\u306b\u3057\u3066\u3044\u308b\u3002\u534a\u5c0e\u4f53\u696d\u754c\u53f2\u4e0a\u6700\u3082\u5927\u304d\u306a\u6210\u529f\u3092\u53ce\u3081\u305f<a href=\"https:\/\/www.appliedmaterials.com\/us\/en\/product-library\/endura-pvd.html\" target=\"_blank\" rel=\"noopener\"><strong><span style=\"color: #0000ff\">Endura\u30d7\u30e9\u30c3\u30c8\u30d5\u30a9\u30fc\u30e0<\/span><\/strong><\/a>\u306e\u8d85\u9ad8\u771f\u7a7a\u6280\u8853\u306b\u3088\u308a\u3001\u30af\u30ea\u30fc\u30f3\u30eb\u30fc\u30e0\u5185\u306e\u4e0d\u7d14\u7269\u304b\u3089\u30a6\u30a7\u30fc\u30cf\u3092\u4fdd\u8b77\u3057\u3001\u30ca\u30ce\u30b7\u30fc\u30c8\u9593\u306e\u6975\u5fae\u5c0f\u7a7a\u9593\u3067\u3082\u9ad8\u54c1\u8cea\u306a\u6210\u819c\u3092\u5b9f\u73fe\u3059\u308b\u3002\u30e1\u30bf\u30eb\u30b2\u30fc\u30c8\u30b9\u30bf\u30c3\u30af\u5c64\u306e\u539a\u3055\u3092\u30aa\u30f3\u30b0\u30b9\u30c8\u30ed\u30fc\u30e0\u30ec\u30d9\u30eb\u3067\u5236\u5fa1\u3059\u308b\u3053\u3068\u3067\u3001Trillium ALD\u306f\u5148\u9032GAA\u30c8\u30e9\u30f3\u30b8\u30b9\u30bf\u306b\u6c42\u3081\u3089\u308c\u308b\u30c1\u30e5\u30fc\u30cb\u30f3\u30b0\u6027\u3068\u4fe1\u983c\u6027\u3092\u78ba\u4fdd\u3057\u3001\u30c8\u30e9\u30f3\u30b8\u30b9\u30bf\u306e\u6027\u80fd\u3001\u96fb\u529b\u52b9\u7387\u3001\u4fe1\u983c\u6027\u3092\u9ad8\u3081\u308b\u3002<br><br>\u3000\u30a2\u30d7\u30e9\u30a4\u30c9 \u30de\u30c6\u30ea\u30a2\u30eb\u30ba\u306eTrillium ALD\u306f\u3001\u8907\u6570\u4e16\u4ee3\u306eFinFET\u30d7\u30ed\u30bb\u30b9\u30ce\u30fc\u30c9\u3067\u30e1\u30bf\u30eb\u30b2\u30fc\u30c8\u30b9\u30bf\u30c3\u30af\u6210\u819c\u306e\u30d9\u30f3\u30c1\u30de\u30fc\u30af\u3068\u3057\u3066\u5b9a\u8a55\u3092\u5f97\u3066\u3044\u308b\u3002GAA\u69cb\u9020\u306e\u9650\u5b9a\u3055\u308c\u305f\u30b9\u30da\u30fc\u30b9\u306b\u5bfe\u5fdc\u3059\u308b\u305f\u3081\u3001\u3088\u308a\u8584\u3044\u4ed5\u4e8b\u95a2\u6570\u91d1\u5c5e\u3084\u754c\u9762\u30c0\u30a4\u30dd\u30fc\u30eb\u6750\u6599\u3092\u6271\u3048\u308b\u65b0\u6a5f\u80fd\u3092\u8ffd\u52a0\u3059\u308b\u306a\u3069\u3001GAA\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u3078\u306e\u7279\u5316\u3092\u9032\u3081\u3066\u304d\u305f\u3002\u73fe\u5728\u306f\u8907\u6570\u306e\u5927\u624b\u30ed\u30b8\u30c3\u30af\u30c1\u30c3\u30d7\u30e1\u30fc\u30ab\u30fc\u304cTrillium ALD\u30922nm\u4ee5\u964d\u306eGAA\u30d7\u30ed\u30bb\u30b9\u30ce\u30fc\u30c9\u306b\u63a1\u7528\u3057\u3064\u3064\u3042\u308b\u3002<\/p>\n\n\n\n<p><br \/>* PECVD = \u30d7\u30e9\u30ba\u30deCVD\uff08\u30d7\u30e9\u30ba\u30de\u5f37\u5316\u5316\u5b66\u6c17\u76f8\u6210\u9577\uff09<br \/>**ALD = \u539f\u5b50\u5c64\u5806\u7a4d<\/p>\n","protected":false},"excerpt":{"rendered":"<p>\u3000\u30a2\u30d7\u30e9\u30a4\u30c9 \u30de\u30c6\u30ea\u30a2\u30eb\u30ba\uff08Applied Materials, Inc., Nasdaq AMAT\u3001\u672c\u793e\uff1a\u7c73\u56fd\u30ab\u30ea\u30d5\u30a9\u30eb\u30cb\u30a2\u5dde\u30b5\u30f3\u30bf\u30af\u30e9\u30e9\uff09\u306f4\u67088\u65e5\uff08\u73fe\u5730\u6642\u9593\uff09\u3001\u4e16\u754c\u6700\u5148\u7aef\u30ed\u30b8\u30c3\u30af\u30c1\u30c3\u30d7\u306e\u6975\u3081\u3066\u5fae\u7d30\u306a\u69cb\u9020\u3092\u5f62\u6210\u3059\u308b\u534a\u5c0e\u4f53\u88fd\u9020\u88c5\u7f6e2\u6a5f\u7a2e\u3092\u767a\u8868\u3057\u305f\u3002\u6750\u6599\u6210\u819c\u3092\u539f\u5b50\u30ec\u30d9\u30eb\u306e\u7cbe\u5ea6\u3067\u5236\u5fa1\u3057\u3001\u3088\u308a\u9ad8\u901f\u304b\u3064\u96fb\u529b\u52b9\u7387\u306e\u9ad8\u3044\u30c8\u30e9\u30f3\u30b8\u30b9\u30bf\u306e\u91cf\u7523\u5316\u3092\u901a\u3058\u3066\u30b0\u30ed\u30fc\u30d0\u30eb\u306aAI\u30a4\u30f3\u30d5\u30e9\u306e\u62e1\u5927\u30da\u30fc\u30b9\u3092\u7dad\u6301\u3059\u308b\u3002<\/p>\n","protected":false},"author":8,"featured_media":29778,"comment_status":"closed","ping_status":"","sticky":false,"template":"","format":"standard","meta":[],"categories":[18],"tags":[48],"_links":{"self":[{"href":"https:\/\/ctiweb.co.jp\/con\/wp-json\/wp\/v2\/posts\/29776"}],"collection":[{"href":"https:\/\/ctiweb.co.jp\/con\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/ctiweb.co.jp\/con\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/ctiweb.co.jp\/con\/wp-json\/wp\/v2\/users\/8"}],"replies":[{"embeddable":true,"href":"https:\/\/ctiweb.co.jp\/con\/wp-json\/wp\/v2\/comments?post=29776"}],"version-history":[{"count":3,"href":"https:\/\/ctiweb.co.jp\/con\/wp-json\/wp\/v2\/posts\/29776\/revisions"}],"predecessor-version":[{"id":29782,"href":"https:\/\/ctiweb.co.jp\/con\/wp-json\/wp\/v2\/posts\/29776\/revisions\/29782"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/ctiweb.co.jp\/con\/wp-json\/wp\/v2\/media\/29778"}],"wp:attachment":[{"href":"https:\/\/ctiweb.co.jp\/con\/wp-json\/wp\/v2\/media?parent=29776"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/ctiweb.co.jp\/con\/wp-json\/wp\/v2\/categories?post=29776"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/ctiweb.co.jp\/con\/wp-json\/wp\/v2\/tags?post=29776"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}